Xin-Liang Ye's scientific contributions

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Publications (3)


Improving AlGaInP Micro-LEDs Characteristics via Varied Dielectric Passivation Layers
  • Article

March 2024

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28 Reads

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1 Citation

IEEE Transactions on Electron Devices

Zhen-Jin Wang

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Xin-Liang Ye

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[...]

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Yan-Kuin Su

This study aims to improve the characteristics of AlGaInP-based micro light-emitting diodes (micro-LEDs) by utilizing three different passivation layers, including silicon dioxide (SiO $_{\text{2}}$ ), distributed Bragg reflector (DBR), and aluminum oxide (Al $_{\text{2}}$ O $_{\text{3}}$ ) grown by atomic layer deposition (ALD) in combination with DBR. In terms of transmittance and refractive indices, our proposed structure, constructed with ALD-grown Al $_{\text{2}}$ O $_{\text{3}}$ and a nine-layered DBR, exhibits significant improvements in all aspects compared to the traditional structure with a 3000 Å SiO $_{\text{2}}$ passivation layer. Additionally, the structure demonstrates a 124.28% increase in external quantum efficiency (EQE) compared to the LED constructed with a nine-layered DBR. This result indicates that the ALD growth of Al $_{\text{2}}$ O $_{\text{3}}$ effectively reduces sidewall losses, significantly impacting the improvement of micro-LEDs.

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(a) Schematic illustration of GaN-based LED epitaxial structure. (b) Schematic structure of GaN Micro-LED. (c)SEM image of Micro LED array. (d) GaN Micro-LED Illumination Image. (e) Bonding schematic for GaN Micro-LED.
SEM images at two magnifications (top row: 10×, bottom row: 50x) for untreated (2a), (2b) and treated (2c), (2d) Micro LEDs.
Voltage of red Micro LED with and without TMAH treatment.
Light output power of red Micro LEDs with and without TMAH treatment.
External quantum efficiency of red Micro LEDs with and without TMAH treatment.

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Investigation of GaN-Based Micro-LEDs with Effective Tetramethylammonium Hydroxide Treatment
  • Article
  • Full-text available

February 2024

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128 Reads

ECS Journal of Solid State Science and Technology

ECS Journal of Solid State Science and Technology

This study investigates the effects of TMAH treatment on 5 μm-sized GaN-based micro light-emitting diodes (LEDs). Compared with untreated GaN micro-LEDs, the optical output power and external quantum efficiency of TMAH treated micro-LEDs are significantly improved. These results can be attributed to the formation of microstructures on the sidewall of micro-LEDs through the TMAH treatment and the effective light reflection is therefore constructed. This research not only improves the characteristics of LEDs, but also paves the way for green and advanced optoelectronic devices.

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Fig. 1. Fabrication process of AlGaInP-based red micro-LED.
Fig. 8. Light output power of red micro-LED with different sidewall treatments.
Fig. 9. EQE of red micro-LED with different sidewall treatments.
Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid

February 2024

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98 Reads

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1 Citation

IEEE Photonics Journal

The efficiency of AlGaInP micro light-emitting diodes (micro-LEDs) was far weaker than that of GaN-based micro-LEDs in structure and performance. Consequently, there was an urgent demand to enhance their efficiency. In this study, a citric acid treatment strategy is proposed to improve the efficiency of red micro-LEDs, and the etching uniformity of different concentrations was first confirmed. We optimized the concentration of citric acid to 1:1 and modulated the wet etching time at 0, 30, 60, 90, and 120 s to treat the sidewalls of devices. Under an injection current density of 68 nA/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , the forward voltage (Vf) of micro-LEDs after soaking in citric acid ranged from 1.40 to 1.45 V. Compared with the sample operated at the forward voltage without citric acid sidewall treatment, AlGaInP micro-LEDs displayed significantly enhanced forward voltage. This indicates that citric acid effectively removed N-GaAs without damaging the electrical properties of the devices. Among all citric acid-treated micro-LEDs, the sample with a 60 s wet etching process showed the best improvement, with the light output power and external quantum efficiency (EQE) increased by 31.08% and 5.4%, respectively. Our proposed method to treat AlGaInP micro-LEDs presents promising opportunities for the future development of high-performance optoelectronics.

Citations (2)


... The sidewall degradation is more pronounced in the AlGaInP/GaInP MQW system than InGaN/GaN MQW due to its high surface recombination velocity [11]. Although many researchers have explored sidewall passivation techniques, significant improvements have yet to be achieved [10,12,13]. ...

Reference:

Size-dependent optoelectronic characteristics of InGaN/GaN red micro-LEDs on 4-inch Si substrates: high pixel density arrays demonstration
Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid

IEEE Photonics Journal

... D. State-of-the-art AlGaInP and InGaN red LEDs Figure 16 summarizes the state-of-the-art red LEDs that have been reported in the last 6 years. The EQE is divided into three groups: AlGaInP LEDs (sky blue symbol), 68,80,86,151,153,180 InGaN LEDs emitting wavelengths over 625 nm (red symbol), 51,67,77,160,161,165,166,171,[181][182][183][184][185][186][187][188][189] and InGaN LEDs emitting wavelengths less 625 nm (green symbol). 66,163,168,169,188,[190][191][192][193][194][195][196][197][198][199] The EQE of the AlGaInP LEDs tends to decrease with a smaller size. ...

Improving AlGaInP Micro-LEDs Characteristics via Varied Dielectric Passivation Layers
  • Citing Article
  • March 2024

IEEE Transactions on Electron Devices