L. DiCarlo's research while affiliated with Delft University of Technology and other places

We investigate die-level and wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan Josephson junctions, using multiple substrates with and without through-silicon vias (TSVs). Dolan junctions fabricated on planar substrates have the highest yield and lowest room-temperature conductance spread, equivalent to ~100 MHz in transmon frequency. In TSV-integrated substrates, Dolan junctions suffer most in both yield and disorder, making Manhattan junctions preferable. Manhattan junctions show pronounced conductance decrease from wafer center to edge, which we qualitatively capture using a geometric model of spatially-dependent resist shadowing during junction electrode evaporation. Analysis of actual junction overlap areas using scanning electron micrographs supports the model, and further points to a remnant spatial dependence possibly due to contact resistance.

Artificial neural networks are becoming an integral part of digital solutions to complex problems. However, employing neural networks on quantum processors faces challenges related to the implementation of non-linear functions using quantum circuits. In this paper, we use repeat-until-success circuits enabled by real-time control-flow feedback to realize quantum neurons with non-linear activation functions. These neurons constitute elementary building blocks that can be arranged in a variety of layouts to carry out deep learning tasks quantum coherently. As an example, we construct a minimal feedforward quantum neural network capable of learning all 2-to-1-bit Boolean functions by optimization of network activation parameters within the supervised-learning paradigm. This model is shown to perform non-linear classification and effectively learns from multiple copies of a single training state consisting of the maximal superposition of all inputs.

We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tunable couplers, and resonators. We employ grayscale lithography to enable reflow and thereby reduce the peak temperature of our airbridge fabrication process from 200 to 150 °C and link this change to a substantial increase in the physical yield of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.

Minimizing leakage from computational states is a challenge when using many-level systems like superconducting quantum circuits as qubits. We realize and extend the quantum-hardware-efficient, all-microwave leakage reduction unit (LRU) for transmons in a circuit QED architecture proposed by Battistel et al. This LRU effectively reduces leakage in the second- and third-excited transmon states with up to 99% efficacy in 220 ns, with minimum impact on the qubit subspace. As a first application in the context of quantum error correction, we show how multiple simultaneous LRUs can reduce the error detection rate and suppress leakage buildup within 1% in data and ancilla qubits over 50 cycles of a weight-2 stabilizer measurement.

We investigate die-level and wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan Josephson junctions, using multiple substrates with and without through-silicon vias (TSVs). Dolan junctions fabricated on planar substrates have the highest yield and lowest room-temperature conductance spread, equivalent to ~100 MHz in transmon frequency. In TSV-integrated substrates, Dolan junctions suffer most in both yield and disorder, making Manhattan junctions preferable. Manhattan junctions show pronounced conductance decrease from wafer centre to edge, which we qualitatively capture using a geometric model of spatially-dependent resist shadowing during junction electrode evaporation. Analysis of actual junction overlap areas using scanning electron micrographs supports the model, and further points to a remnant spatial dependence possibly due to contact resistance.

We present the use of grounding airbridge arrays to trim the frequency of microwave coplanar-waveguide (CPW) resonators post fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with $100~\mathrm{MHz}$ range and $10~\mathrm{MHz}$ resolution. We showcase two applications in circuit QED. The first is elimination of frequency crowding between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.

Minimizing leakage from computational states is a challenge when using many-level systems like superconducting quantum circuits as qubits. We realize and extend the quantum-hardware-efficient, all-microwave leakage reduction unit (LRU) for transmons in a circuit QED architecture proposed by Battistel et al. This LRU effectively reduces leakage in the second- and third-excited transmon states with up to $99\% $ efficacy in $220~\mathrm{ns}$, with minimum impact on the qubit subspace. As a first application in the context of quantum error correction, we demonstrate the ability of multiple simultaneous LRUs to reduce the error detection rate and to suppress leakage buildup within $1\%$ in data and ancilla qubits over 50 cycles of a weight-2 parity measurement.

Artificial neural networks are becoming an integral part of digital solutions to complex problems. However, employing neural networks on quantum processors faces challenges related to the implementation of non-linear functions using quantum circuits. In this paper, we use repeat-until-success circuits enabled by real-time control-flow feedback to realize quantum neurons with non-linear activation functions. These neurons constitute elementary building blocks that can be arranged in a variety of layouts to carry out deep learning tasks quantum coherently. As an example, we construct a minimal feedforward quantum neural network capable of learning all 2-to-1-bit Boolean functions by optimization of network activation parameters within the supervised-learning paradigm. This model is shown to perform non-linear classification and effectively learns from multiple copies of a single training state consisting of the maximal superposition of all inputs.

Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling transmission lines to cross. Traditional airbridge fabrication produces a curved profile by reflowing resist at elevated temperature prior to metallization. The elevated temperature can affect the coupling energy and even yield of pre-fabricated Josephson elements of superconducting qubits, tuneable couplers and resonators. We employ grayscale lithography in place of reflow to reduce the peak airbridge processing temperature from $200$ to $150^\circ\mathrm{C}$, showing a substantial yield increase of transmon qubits with Josephson elements realized using Al-contacted InAs nanowires.