Kyu Chang Park's research while affiliated with Kyung Hee University and other places

Publications (24)

Article
In x-ray imaging, high resolution is essential, particularly in sectors such as medical and industries where the need for nondestructive defect detection is required. Previous research has shown that altering beam design and the number of gates offset holes has an impact on focal spot size (FSS). However, the specific effects of beam size and offse...
Article
The adoption of vertically aligned carbon nanotubes (VACNTs) as electron emitters in x-ray generation has opened a new path for medical imaging technology advancement. With their outstanding electron emission capabilities, VACNTs provide a distinct advantage in miniaturizing and improving the performance of x-ray devices. This research focuses on t...
Article
Full-text available
The focusing electrode plays an important role to reduce the electron beam trajectory with low dispersion and high brightness. This article summarizes the importance of the vertically aligned multi-walled carbon nanotube effect with the focusing electrode. First of all, the effect of electron beam trajectory is studied with the different heights, h...
Preprint
Full-text available
The focusing electrode plays an important role to reduce the electron beam trajectory with low dispersion and high brightness. This article summarizes the importance of the vertically aligned multi-walled carbon nanotube effect with the focusing electrode. First of all, the effect of electron beam trajectory is studied with the different heights, h...
Article
Nondestructive technology (NDT) is the most popular method for detecting defects inside an object without harming it. A 3D tomography algorithm toolbox and an x-ray imaging system are the essential components of NDT. We fabricated a high-resolution cold cathode electron beam (HRC-beam) based on vertically aligned carbon nanotubes to accomplish this...
Article
Full-text available
This article discusses the development of a cold cathode electron beam (C-beam) based on vertically aligned carbon nanotubes (VACNTs) and the optimization of field emission (FE) from C-beam architecture design. The characteristics of the electron beam are typically required to match the applications of interest. To study the FE, five distinct multi...
Article
We fabricated a cold cathode-driven x-ray source with vertically aligned carbon nanotubes (VACNTs). Dose and spatial resolution characteristics are compared to commercially available portable x-ray sources, and our system outperformed its counterparts. At the same 1.0 mAs condition, our x-ray source represented a dose rate of 0.37 mGy/s, which is 7...
Article
Far-ultraviolet-C (UVC) light is an efficient and safe germicide because the wavelength band eradicates viruses but is harmless to human cells. In this study, electron-beam-pumped AlGaN emitters have been introduced as an alternative to far-UVC light emitting diodes which are limited by certain drawbacks, such as low conductivity and light absorpti...
Article
Laser-produced tin (Sn) plasma (LPP) is used to produce high-performance semiconductors using extreme ultraviolet (EUV), but LPP generates debris that limits the lifespan of the optical system, so research on debris mitigation is being conducted. When electrons are directly irradiated to a solid target, occurrence of debris can be minimized, and co...
Article
Full-text available
We introduce a novel patterning technique based on e-beam lithography using vertically aligned carbon nanotube (VACNT) emitters with self-assembled monolayers (SAMs). A 20 μm line width of silicon wafer patterning was successfully demonstrated using octadecyl trichlorosilane (OTS) as a photoresist. To investigate surface modification by the irradia...
Article
Full-text available
Vertically aligned carbon nanotubes (CNTs) are essential to studying high current density, low dispersion, and high brightness. Vertically aligned 14 × 14 CNT emitters are fabricated as an island by sputter coating, photolithography, and the plasma-enhanced chemical vapor deposition process. Scanning electron microscopy is used to analyze the morph...
Article
Full-text available
Laser-based plasma studies that apply photons to extreme ultraviolet (EUV) generation are actively being conducted, and studies by direct electron irradiation on Sn for EUV lighting have rarely been attempted. Here, we demonstrate a novel method of EUV generation by irradiating Sn with electrons emitted from a carbon nanotube (CNT)-based cold catho...
Article
We report on the structural effects of a carbon nanotube based cold cathode electron beam (C-beam) module on focal spot sizes (FSSs) for high resolution x-ray imaging applications without additional focusing components. A simple combination of vertically aligned carbon nanotubes and gate mesh structure achieved FSS of 252 and 410 μm for longitudina...

Citations

... In various applications, VEDs [14][15][16], including travelling wave tubes, X-ray tubes, electron microscopes, etc., all require a high current and high current density electron source to achieve optimal device performance. They also require a low energy distribution to improve electron beam control, such as focus, diffusion, laminar flow, etc. ...
... There are several ways to fabricate field emitters, such as electrochemical etching of tungsten wires, 6 metal cones deposited on a surface, 7 silicon tips etched with DRIE or wet etching processes, 8,9 and deposition of CNT emission on a surface. [10][11][12] Research on new techniques of fabrication of electron emitters as well as research on their application is still widely conducted. [13][14][15][16][17] However, research usually deals with fabrication and testing of the emitters in laboratory setup, and when the emitters are applied to a final device, the conditions change and the emission properties of the emitters are worse than before its integration. ...
... Field emitter array has important applications in field emission display [1][2][3][4][5], parallel electron-beam lithography [6][7][8][9], and X-ray source [10][11][12][13][14][15]. Until now, only CNT [16], Si nanotip [17], and ZnO nanowire [18] have been active in studies of field emitter array applications. Among them, ZnO nanowire has advantages in terms of its simple synthesis method, low cost, high uniformity, and compatibility with microfabrication techniques, which makes it outstanding in large-area gated field emitter arrays [18]. ...
... The functional groups at the SAM endpoints can anchor to the ceramic film surface and significantly affect its properties and deposition. Using this method, compact and uniform TiO 2 , SnO 2 , V 2 O 5 ·nH 2 O, and other oxides have been successfully deposited [9][10][11]. Research has also found that SAMs promote the formation of oxide films and can facilitate solid heteronucleation because they decrease surface energy relative to the bare substrate surface. ...
... The X-ray has been widely used in medical diagnosis, security checks, and drug testing since Roentgen discovered it in 1895 [1]. It has made remarkable progress in communication, material analysis, high-resolution imaging, and other fields [2][3][4][5]. X-ray sources can be roughly classified into two types: thermal cathodes and cold cathodes. Traditional thermal cathode X-ray sources exhibit limitations such as low current densities, high operating temperatures, and long response times, which render them unsuitable for miniaturization. ...
... Carbon nanotubes (CNTs) present numerous advantages as field emission cathode (FEC), such as their ultralow turn-on voltage (~0.4 V μm −1 ) 1 resulting from the low work function (~5 eV) 2 , exceptional chemical and physical stabilities 3 , as well as high electrical and thermal conductivity 4,5 attributed to the C-C covalent bond, seamless hexagonal network architecture and one-dimension carbon nanostructures 6,7 . These unique characteristics render FEC an ideal electron source for various applications, including field emission scanning electron microscopy (FESEM) 8 , field emission display (FED) 9 , electron beam (E-beam) lithography (EBL) 10 , and X-ray tube 11 . In modern space technologies 12 , FEC often serves as the cathode for electric propulsion (EP) system, providing electrons to neutralize the positive ions or positively charged droplets to avoid charging of the spacecraft 13 . ...
... The FSS is divided into two parts: horizontal FSS (H FSS ) for the beam's short axis and vertical FSS (V FSS ) for the beam's long axis. Using the EN-12543-5 standard, we measured the blurriness of tungsten (W) wire, [22][23][24][25] and we achieved an FSS H FSS of 0.58 and V FSS of 0.76 mm, respectively, as shown in Figs. 7(a) and 7(b). ...