Baoshun Zhang's research while affiliated with SiNANO and other places

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Publications (277)


Enhancement-mode Ga 2 O 3 FETs with unintentionally doped (001) β-Ga 2 O 3 channel layer grown by metal-organic chemical vapor deposition
  • Article

June 2024

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12 Reads

Japanese Journal of Applied Physics

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Baoshun Zhang

High-quality unintentionally doped (UID) (001) β-Ga2O3 homoepitaxial films were grown on native substrates through metalorganic chemical vapor deposition. The surface parallel grooves were repaired under low temperature and pressure condition, reaching the surface roughness of 2.22 nm and the high electron mobility of 74.6 cm2/Vs. Enhancement-mode metal–oxide–semiconductor field-effect transistors were fabricated on the UID β-Ga2O3 film, showing a positive turn-on threshold gate voltage of 4.2 V and a breakdown voltage of 673V. These results can serve a reference for (001) oriented lateral Ga2O3 power transistors and may contribute to the development of Ga2O3 power devices.

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High-performance GaN metal–insulator–semiconductor high electron mobility transistors (MIS-HEMTs) using Sc0.2Al0.8N/SiNX as composite gate dielectric

June 2024

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22 Reads

Applied Physics Letters

GaN metal–insulator–semiconductor high electron mobility transistors (MIS-HEMTs) with scandium aluminum nitride Sc0.2Al0.8N/SiNX composite gate dielectric were demonstrated with improved device performance in terms of current density, on-resistance, breakdown voltage, gate leakage, and current collapse. GaN MIS-HEMTs with single-layer Sc0.2Al0.8N or SiNX were also fabricated as reference. Notably, the current collapse was reduced from ∼38.8% in GaN MIS-HEMTs with single-layer SiNX dielectric to ∼4.9% in the device with composite gate dielectric. The insertion of the thin SiNX layer can mitigate the surface damage due to the ScAlN sputtering process and significantly reduce the interface state density. Furthermore, the high valence band offset of Sc0.2Al0.8N/SiNX of 0.78 eV also plays a key role in the suppression of hole injection and gate leakage current. This work shows the effectiveness of the Sc0.2Al0.8N/SiNX composite gate dielectric and can serve as an important reference for future developments of high-performance reliable GaN HEMTs for power and RF electronics.


Characterization of MoTe2/SnS2 device. (a) Schematic diagram of the MoTe2/SnS2 heterostructure. (b) SEM image of MoTe2/SnS2 device. (c) Height profile of MoTe2 and SnS2 flakes corresponding to the B part marked in figure (b). (d) Raman spectra of pristine MoTe2, SnS2, and overlapped region corresponding to the A, B, C part marked in figure (b). (e) HRTEM image. (f) EDS image of the corresponding elements of the MoTe2/SnS2 device.
(a) Output characteristic curve of the MoTe2/SnS2 device. (b) Transfer characteristics of MoTe2/SnS2 device with varying V g-max (the maximum value of the sweeping range of gate voltage). The drain voltage is set as 1 V. The black arrows show the sweeping directions of V g. (c) The threshold voltage drift varies with V g-max. (d) Transfer characteristics of MoTe2/SnS2 device with varying V ds.
(a) Schematic illustration of a biological synapse. (b) Schematic illustration of the artificial synapse and a schematic diagram of the device. (c) EPSC generated by single V g spikes with different duration times from 10 to 200 ms while keeping the amplitude at −40 V. (d) EPSC generated by single V g spikes with voltage from −30 to −80 V while keeping duration time at 10 ms. The V ds is set as 1 V during all reading processes. (e) The change ratio of the excitatory post-synaptic current at different measuring moments, as a function of various durations (ranging from 10 to 400 ms, a fixed amplitude of −60 V) and amplitudes (ranging from −30 to −80 V, a fixed duration of 10 ms). (f) EPSC generated by single V g spikes with different duration times from 10 to 200 ms while keeping the amplitude at −70 V, (V ds = 0.1 V). The inset shows the transfer characteristics of MoTe2/SnS2 device when V g-max is set as −70 V and drain voltage is set as 0.1 V. (g) Extracted PPF index ((A 2–A 1)/A 1) versus spike time interval Δt, where A 1 and A 2 are the current values of the first and second EPSC peaks, illustrated in the inset. The red line is the fitting curve based on the double exponential function shown. τ 1 and τ 2 are two relaxation time constants, respectively. (h) SRDP. EPSC of the artificial synapse in response to 10 presynaptic pulses, the amplitude is −60 V, and the time interval is 250 ms, as illustrated in the inset.
Controllability of LTP/LTD characteristics in MoTe2/SnS2 synaptic device. (a) LTP/LTD characteristic curves under various pulse amplitude. (b) The nonlinearity values of LTP/LTD under different gate voltage amplitudes. (c) The NSeff values of LTP/LTD under different gate voltage amplitudes. (d) The dynamic range and symmetricity of LTP/LTD under different gate voltage amplitudes.
(a) LTP/LTD characteristic curves of the vertical synaptic device under different number of potentiation/depression pulses, ranging from 30/30 to 100/100. The gate voltage amplitude is 70 V. (b) The normalized LTP/LTD characteristic curves under different number of potentiation/depression pulses. The pulse duration is set as 10 ms. The frequency is 4 Hz. The gate voltage amplitude is 70 V. (c) The nonlinearity values of LTP/LTD under different number of potentiation/depression pulses. (d) The dynamic range and symmetricity of LTP/LTD under different number of potentiation/depression pulses (the red line), and the symmetricity of LTP/LTD under different number of potentiation/depression pulses (the blue axis). (e) The NSeff values of LTP/LTD under different number of potentiation/depression pulses.
A synapse with low power consumption based on MoTe2/SnS2 heterostructure
  • Article
  • Publisher preview available

June 2024

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18 Reads

Nanotechnology

Nanotechnology

The use of two-dimensional materials and van der Waals heterostructures holds great potential for improving the performance of memristors Here, we present SnS2/MoTe2 heterostructure synaptic transistors. Benefiting from the ultra-low dark current of the heterojunction, the power consumption of the synapse is only 19 pJ per switching under 0.1 V bias, comparable to that of biological synapses. The synaptic device based on the SnS2/MoTe2 demonstrates various synaptic functionalities, including short-term plasticity, long-term plasticity, and paired-pulse facilitation. In particular, the synaptic weight of the excitatory postsynaptic current can reach 109.8%. In addition, the controllability of the long-term potentiation and long-term depression are discussed. The dynamic range (G max/G min) and the symmetricity values of the synaptic devices are approximately 16.22 and 6.37, and the non-linearity is 1.79. Our study provides the possibility for the application of 2D material synaptic devices in the field of low-power information storage.

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Monolithic Investigation of Hydrogen Plasma-Treated and Etched p-GaN Gate HEMTs Under OFF-State Drain Stress

June 2024

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14 Reads

IEEE Transactions on Electron Devices

In power conversion systems, the power devices often need to block high voltage levels during the OFF-state. The impact of such voltage stress can cause instability for the device. This article presents the investigation of the pulsed I – V (PIV) OFF-state drain stress test for the etch-free hydrogen plasma-treated p-GaN gate HEMT (H-treated devices). To quantitatively demonstrate the effect of the hydrogen plasma treatment process, the device with conventional p-GaN etching at the access region (etched devices) is monolithically fabricated. Remarkably, the hydrogen treatment could eliminate surface damage from the conventional etching process and provide passivation at the access region. The direct comparison of devices’ threshold voltage ( V $_{\text{TH}}$ ) shift and dynamic ON-resistance ( R $_{\text{on}}$ ) is obtained. Under a 200-V OFF-state drain stress, the H-treated device has a low V $_{\text{TH}}$ shift of 0.18 V, and the dynamic R $_{\text{on}}$ could also be efficiently suppressed by 24%. Meanwhile, the H-treated device has only a marginal 5% current reduction compared with 48% for the etched device at 200-V stress. An exploration of the origin of the superior device performances is carried out with the TCAD simulation, activation energy derivation, and capacitance measurement. For the H-treated device, the surface state improvement at the region and the reduction of the peak electric field at the gate edge become major reasons for the improved performance.


Annealing Process on MOS channel Properties for Quasi‐Vertical GaN‐on‐Sapphire Trench MOSFET

June 2024

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18 Reads

physica status solidi (RRL) - Rapid Research Letters

Quasi‐vertical GaN trench‐gate MOSFETs with different etch RF power and the impact of the order of annealing process in TMAH wet treatment have been fabricated and studied. The high‐power device has a threshold voltage of 5.3 V and a maximum saturation current density of 552 A/cm ² , whereas the low‐power device has a threshold voltage of 4.5 V and a maximum saturation current density of 650 A/cm ² . However, the low‐power device has more severe off‐state leakage due to more fixed charges and defects on the device surface. Furthermore, the annealing process serves as an additional step before wet treatment. SEM image indicates that annealing at high temperatures prior to etching can eliminate surface oxide and redistribute surface imperfections, resulting in a smoother sidewall morphology. The relationship between temperature and mobility confirms the impact of the crystal surface feature on device performance. This article is protected by copyright. All rights reserved.


Ultra low RIN, low threshold AlGaInAs/InP BH-DFB laser

Journal of the European Optical Society Rapid Publications

This study presents a comparative analysis of AlGalnAs buried heterostructure laser diodes by using dual-channel ridge-waveguides. Different shaped channels, including bowl shaped groove and vertical groove, are explored. Using a vertical groove structure, we achieved an output power of 90 mW at 25 °C with a threshold current of only 4 mA. This represents a 3.6-fold increase in output power compared to the BH-DFB structure. At a high temperature of 85 °C, the laser maintains a side-mode suppression ratio of over 45 dB at the maximum power point. The laser’s relative intensity noise in the 0–40 GHz frequency range is less than −162.8 dB/Hz when operated at 300 mA with the chip butterfly packaged. These findings underscore the robustness, reliability, and high-performance capabilities of the developed DFB laser, highlighting its potential for various practical applications.


Ultrahigh Responsivity In2O3 UVA Photodetector through Modulation of Trimethylindium Flow Rate

May 2024

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23 Reads

Crystals

Oxygen vacancies (Vo) can significantly degrade the electrical properties of indium oxide (In2O3) thin films, thus limiting their application in the field of ultraviolet detection. In this work, the Vo is effectively suppressed by adjusting the Trimethylindium (TMIn) flow rate (fTMIn). In addition, with the reduction of the fTMIn, the background carrier concentration and the roughness of the film decrease gradually. And a smooth In2O3 thin film with roughness of 0.44 nm is obtained when the fTMIn is 5 sccm. The MSM photodetectors (PDs) are constructed based on In2O3 thin films with different fTMIn to investigate the opto-electric characteristics of the films. The dark current of the PDs is significantly reduced by five orders from 100 mA to 0.28 μA with the reduction of the fTMIn from 50 sccm to 5 sccm. In addition, the photo response capacity of PDs is dramatically enhanced. The photo-to-dark current ratio (PDCR) increases from 0 to 2589. Finally, the PD with the fTMIn of 5 sccm possesses a record-high responsivity of 2.53 × 103 AW−1, a high detectivity of 5.43 × 107 Jones and a high EQE of 9383 × 100%. Our work provides an important reference for the fabrication of high-sensitivity UV PDs.


Figure 3. Zero field skyrmionic state. a, Magnetoresistance data measured as a function of a the field protocol (a time-varying magnetic field) necessary to achieve a zero field skyrmionic state at θ = 0°. The inset shows the qualitative time-dependence of the magnetic field. b, Zero field ST-FMR measurements as a function of the microwave frequency (θ = 0° and Prf = 5 W). The inset shows the maximum value of the positive peak of the rectified voltage as a function of the input rf power.
Figure 4. Micromagnetic simulations results. a, Frequency of the excited modes as a function of the applied field H for θ = 30°. Solid symbols represent the results of the micromagnetic simulations, dashed lines correspond to the experimental results extracted from Figure 2c. b, Cross-section of the simulated MTJ with the SkyL, where the initial state is a tubular Néel skyrmion (the color bar indicates the OOP component of the magnetization, the arrows indicate the direction of the magnetization in the x-z plane). The magenta dashed line divides region A where the skyrmion breathing mode occurs, from region B, where the uniform precession of both FL and RL is excited. c, Example of the frequency response for the FL and RL in the uniform AP state for H=900 Oe. d, Example of the frequency response for the FL and RL in the skyrmionic state for H=300 Oe.
Topological spin-torque diode effect in skyrmion-based magnetic tunnel junctions

May 2024

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102 Reads

The growing market and massive use of Internet of Things nodes is placing unprecedented demands of energy efficient hardware for edge computing and microwave devices. In particular, magnetic tunnel junctions (MTJs), as main building blocks of spintronic microwave technology, can offer a path for the development of compact and high-performance microwave detectors. On the other hand, the fascinating field of skyrmionics is bridging together concepts from topology and spintronics. Here, we show the proof of concept of a topological spin-torque diode realized with an MTJ on top of a skyrmionic material at room temperature and for a wide region of applied fields, including the zero-field case. Our spin torque diode electrical measurements show the electrical excitation of a skyrmion resonant mode with frequencies near 4 GHz and a selectivity one order of magnitude smaller than the uniform modes excited in the same device. Micromagnetic simulations identify these dynamics with the excitation of the breathing mode and point out the role of thickness dependent magnetic parameters (magnetic anisotropy field and Dzyaloshinkii Moriya interaction) in both stabilizing and exciting the magnetic skyrmions. This work marks a milestone for the development of topological spin-torque diodes.


Level assessment of 87 Rb in rubidium-filled MEMS vapor cells by X-ray imaging for atomic magnetometers

April 2024

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16 Reads

Japanese Journal of Applied Physics

Quantitative assessments of the level and lifetime of alkali metal in the atomic vapor cells are essential for improving the stability of atomic magnetometers. In this paper, a fast and non-destructive approach is proposed to directly characterize the level of ⁸⁷ Rb in a hermetic MEMS vapor cell. The MEMS-compatible ⁸⁷ Rb evaporation technique is developed to dispense ⁸⁷ Rb in the vapor cells with high efficiency. The morphology of the metallic ⁸⁷ Rb in the MEMS vapor cell is visualized by the non-destructive X-ray technique, and the measured contact angle is 43° ± 2°. Combined with the image recognition, the quantitative characterization of the ⁸⁷ Rb is achieved, and the consumption rates of ⁸⁷ Rb in MEMS cells are experimentally investigated. The presented approach is beneficial for the fabrication and performance enhancement of vapor cells for atomic magnetometers.


Ultra-low RIN, low threshold AlGaInAs/InP BH-DFB laser

April 2024

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1 Read

This work conducted a comparative study on DFB lasers based on AlGaInAs/InP heterostructures, and comparatively studied the effects of different trench shapes and different cavity lengths on the laser output characteristics. Based on the vertical trench structure, we obtained a laser output of 90mW at 25°C, Compared with the trenchless laser, the output power was increased to 3.6 times the original, and the threshold current was only 4mA. It allows 8.5nm wavelength tunability within the temperature range of 5-85℃, and still has an edge mode suppression ratio of >45dB at 85℃. After the chip is packaged in a butterfly shape, the relative intensity noise in the 0-40 GHz frequency range is lower than -162.8dB/Hz at the working current of 300mA.


Citations (40)


... Thus, through the passivation of the 10-nm Al 2 O 3 layer, the energy consumption and noised level of β-Ga 2 O 3 PD can both be reduced through the nearly an order of magnitude suppression of dark current, and the other key performance remains nearly unchanged. Fig. 2(c) illustrates the performance comparison between sample-3 nm and other reported film-type β-Ga 2 O 3 PDs [13], [14], [18], [19], [23], [30], [31], [32], [33], [34], [35], [36], [37], [38], [39], [40], [41], [42], [43]. Obviously, our proposed device exhibits a highly competitive photodetection sensitivity while maintaining a relatively low dark current. ...

Reference:

Comprehensively Enhanced Performance of MISIM $\beta$-Ga$_{\text{2}}$O$_{\text{3}}$ Solar-Blind Photodetector Inserted With an Ultrathin Al$_{\text{2}}$OTEXPRESERVE4 Passivation Layer
High-Speed and Ultrasensitive Solar-Blind Ultraviolet Photodetectors Based on In Situ Grown β-Ga2O3 Single-Crystal Films
  • Citing Article
  • January 2024

ACS Applied Materials & Interfaces

... In addition, it has been reported that by stacking multiple GaN/AlGaN heterojunctions, a multi-channel p-FET can be constructed with largely increased hole concentration (n h+ ) and remarkable hole current [25,26]. However, when the GaNbased p-FETs are constructed as the E-mode devices, their current density would be reduced to ∼5 mA mm −1 [27][28][29][30]. Therefore, it is crucial to tackle the trade-off between current density and threshold voltage by carefully optimizing structural designs of GaN-based E-mode p-channel devices. ...

Study of enhancement-mode GaN pFET with H plasma treated gate recess
  • Citing Article
  • November 2023

Journal of Semiconductors

... Dyakonov and Shur proposed that under asymmetric boundary conditions, incident detecting THz waves will induce an ac voltage at the source side [5]. After that, researchers began to study photoresponse in single-gate GaAs FET [6] and grating-gate GaN HEMT structures [7][8][9]. It is shown that an array of FET units can excite higher-order plasmon modes far more efficiently than a FET array with a large-area grating gate [10]. ...

Polarization Properties in GaN Double-Channel HEMTs at Mid-Infrared Frequencies

Plasmonics

... FVCs, in particular those implemented using MEMS technology, can enable a high level of integration and wafer-scale manufacturing. To date, however, these technologies have only been used sparsely in applications that require low noise, because noise generated by alkali-metal condensation, cell-body conductivity 34 and other functional elements of the cell can be significant [35][36][37] . ...

Characterization of 87Rb MEMS vapor cells for miniature atomic magnetometers
  • Citing Article
  • August 2023

Applied Physics Letters

... Dyakonov and Shur proposed that under asymmetric boundary conditions, incident detecting THz waves will induce an ac voltage at the source side [5]. After that, researchers began to study photoresponse in single-gate GaAs FET [6] and grating-gate GaN HEMT structures [7][8][9]. It is shown that an array of FET units can excite higher-order plasmon modes far more efficiently than a FET array with a large-area grating gate [10]. ...

Investigation of temperature-dependent polarization properties in grating-gate AlGaN/GaN heterostructures by Drude conductivity at THz frequency

Optical Engineering

... It is a known fact that depletion mode operation (i.e. normally ONoperation) is less preferred for various reasons, such as the requirement of dual supply voltages, high power dissipation, and increased circuit complexity [16]. To address this issue, various design approaches are being explored, including the unintentional doped channel method [17], fluorine treatment technique [18], and a recessed gate design [19]. ...

A comprehensive review of recent progress on enhancement-mode β-Ga 2 O 3 FETs: Growth, devices and properties

Journal of Semiconductors

... In contrast, full GaN single-chip power integration technology [8] can minimize the parasitic effect and realize power system miniaturization, which is beneficial for pushing the operation frequency and power density of GaN power modules even further. Therefore, GaN-based single-chip power integration has attracted great attention recently [9][10][11][12]. ...

Demonstration of the Hydrogen Passivated GaN HEMTs IC Platform
  • Citing Conference Paper
  • May 2023

... 52 By performing the Fourier transform of the dark current in the time domain, the noise power spectrum was obtained. 53,54 The spectral density of the noise power can be fitted with the Hooge-type equation i k j j j j j y ...

Ultrahigh Responsivity β-Ga 2 O 3 /BP Junction Field Effect Phototransistors for UV/IR Dual-band Detection
  • Citing Article
  • July 2023

IEEE Sensors Journal

... The binding energy of C 1s peak plus the work function of In2O3 is a constant value of 289.58 eV, which can be used for the alignment of XPS spectra [36]. The work function of In2O3 is 5.0 eV, and the C 1s peak of In2O3 can be set at 284.58 eV [37,38]. As shown in Figure 3a, peaks of C 1s, O 1s, In 3d, In 3d3/2, In 3p, In 3p1/2 and In 4p signals are observed in the general scan range of 0 to 1200 eV. ...

High-performance ε-Ga2O3 solar-blind ultraviolet photodetectors on Si (100) substrate with molybdenum buffer layer
  • Citing Article
  • May 2023

Vacuum

... Various emerging applications, including reconfigurable spin-wave logic circuits [10,11], unconventional computing [12], and Ising machines [13], rely on these advances. Multiple novel mechanisms have been explored to generate and amplify PSWs [14,15], such as current induced spin-transfer torque (STT) [16][17][18] and spin-orbit torque (SOT) [19][20][21][22][23]. Nano-constriction spin Hall nano-oscillators (SHNOs) with perpendicular magnetic anisotropy (PMA) [24,25] are a particularly promising approach, as they are easy to fabricate [26,27], CMOS compatible [28], strongly voltage tunable [29][30][31][32], and known for their superior mutual synchronization at various length scales and dimensions [33][34][35]. ...

Nonlinear amplification of microwave signals in spin-torque oscillators

Nature Communications