Article

Antenna and Package Design for 61- and 122-GHz Radar Sensors in Embedded Wafer-Level Ball Grid Array Technology

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  • Infineon Technologies
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Abstract

This paper suggests the usage of an optimized structure of the embedded wafer-level ball grid array technology for millimeter-wave antennas-in-package. Multiple antenna arrays in a second redistribution layer have been designed, evaluated, and integrated with different transceivers to form very compact sensor packages for 61- and 122-GHz radar applications. The resulting packages contain a complete radar front end while featuring dimensions of $8 mmx 8$ mm. The packages are easy to assemble and replaceable. Theoretical considerations, numerical results, and measurements have been carried out for the single components. For the verification of the sensor packages, a system demonstrator was developed, and measurements have been performed in continuous-wave mode. At both frequencies, promising system performance regarding range and distance errors could be confirmed without the usage of complex processing and calibration algorithms.

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... The final version of record is available at https://ieeexplore.ieee.org/document/9411122 using a standard eWLB process, whereas the 122 GHz eWLB antennas shown in [8] have been realized using a modified and hence costlier manufacturing process. Fourth, the realized gain achieved for a single radiating element is expected to be higher than the 122 GHz eWLB antenna shown in [7]. ...
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A 77-GHz transmit-array on dual-layer printed circuit board (PCB) is proposed for automotive radar applications. Coplanar patch unit-cells are etched on opposite sides of the PCB and connected by through-via. The unit-cells are arranged in concentric rings to form the transmit-array for 1-bit in-phase transmission. When combined with four-substrate-integrated waveguide (SIW) slot antennas as the primary feeds, the transmit-array is able to generate four beams with a specific coverage of $pm 15^{circ}$. The simulated and measured results of the antenna prototype at 76.5 GHz agree well, with gain greater than 18.5 dBi. The coplanar structure significantly simplifies the transmit-array design and eases the fabrication, in particular, at millimeter-wave frequencies.
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Two separate transmitarrays that operate at 77 GHz are designed and fabricated. The first transmitarray acts as a quarter-wave plate that transforms a linearly polarized incident wave into a circularly polarized transmitted wave. The second transmitarray acts as both a quarter-wave plate and a beam refracting surface to provide polarization and wavefront control. When the second transmittarray is illuminated with a normally incident, linearly polarized beam, the transmitted field is efficiently refracted to 45 °, and the polarization is converted to circular. The half-power bandwidth was measured to be 17%, and the axial ratio of the transmitted field remained below 2.5 dB over the entire bandwidth. Both designs have a subwavelength thickness of 0.4 mm (λ°/9.7). The developed structures are fabricated with low-cost printed-circuit-board processes on flexible substrates. The transmitarrays are realized by cascading three patterned metallic surfaces (sheet admittances) to achieve complete phase control, while maintaining high transmission. Polarization conversion is accomplished with anisotropic sheets that independently control the field polarized along the two orthogonal axes. The structures are analyzed with both circuit- and fields-based approaches.
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A broadband coplanar waveguide (CPW) to coplanar strip (CPS) transmission line transition directly integrated with an RF microelectromechanical systems reconfigurable multiband antenna is presented in this paper. This transition design exhibits very good performance up to 55 GHz, and uses a minimum number of dissimilar transmission line sections and wire bonds, achieving a low-loss and low-cost balancing solution to feed planar antenna designs. The transition design methodology that was followed is described and measurement results are presented.
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The coplanar waveguide (CPW)-to-coplanar stripline (CPS) transition is analyzed theoretically and experimentally in this paper. To characterize this transition in the lower frequency band, a simple equivalent-circuit model that consists of uniform and nonuniform transmission lines is established. The elements of this model can all be obtained by the closed-form formulas; hence, this model is suitable for computer-aided-design application. This model is then applied to design and analyze the CPW-to-CPS transitions with various structure parameters. In the higher frequency band, the partially prism-gridded finite-difference time-domain (FDTD) method is employed to take into account the bond-wire effect as well as the surface-wave leakage and space-wave radiation associated with the transition. In this study, results based on equivalent-circuit model, FDTD simulation, and measurement are compared. Good agreement among these results supports the usefulness of the proposed equivalent-circuit model and also validates the FDTD method. By using the equivalent-circuit model to optimize the transition configuration, the CPW-to-CPS transition with broad bandwidth and low insertion loss may be achieved
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In this paper, a high-range 60-GHz monostatic transceiver system suitable for frequency-modulated continuous-wave (FMCW) applications is presented. The RF integrated circuit is fabricated using a 0.13-μm SiGe BiCMOS technology with fT/fmax of 250/340 GHz and occupies a very compact area of 1.42 x 0.72 mm². All of the internal blocks are designed fully differential with an in-phase/quadrature receiver (RX) conversion gain of 14.8 dB and -18.2 dBm of input-referred 1-dB compression point and a transmitter (TX) with 6.4 dBm of output power. The 60-GHz voltage-controlled oscillator is of a push-push type Colpitts oscillator integrated into a frequency divider with an output frequency between 910 MHz and 1 GHz with the help of 3-bit frequency tuning mechanism for external phase-locked loop operations. Between the TX and RX channels, a tunable coupler is placed to guarantee a high isolation between channels which could withstand any fabrication failures and provide a single differential antenna output. On the TX side, two power detectors are placed in order to monitor the transmitted and reflected powers on the TX channel by passing through a branch-line coupler for built-in-self-test purposes. The total current consumption of this transceiver is 156 mA at 3.3 V of single supply. Considering the successful real-time radar measurements, which the radar is able to detect the objects in more than 90-m range, it proves the suitability of this monostatic chip in high-range FMCW radar systems.
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A 170 GHz fully integrated single-chip heterodyne frequency modulated continuous-wave (FMCW) imaging radar using a 130 nm SiGe BiCMOS technology (fT/fmax = 220/280 GHz) is reported. This system demonstrates a wide bandwidth of 27.5 GHz (16.3%) at a center frequency of 168 GHz. A design methodology to maximize the tuning range of the voltage-controlled oscillator (VCO) is presented. A co-design of the VCO, coupler, and antenna is performed to minimize the chip area and the dc power consumption. The transmitter radiates a peak power of -1 dBm with a dc-to-RF efficiency of 1.42%. At the receiver side, a subharmonic mixer is used for signal down-conversion. The system achieves a measured sensitivity of 87 fW with a total dc power consumption of 67 mW. The prototype is capable of forming 2-D and 3-D images with a range resolution of 7 mm. To the best of our knowledge, this fully integrated imaging radar demonstrates the highest sensitivity and radiation efficiency among all imaging systems around 200 GHz. Moreover, the system is capable of practical 2-D and 3-D imaging with significantly lower dc power consumption compared to the state-of-the-art FMCW radars.
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This paper describes a multi-purpose radar system suitable for applications with different requirements on dynamic range, resolution, and miniaturization degree. It utilizes a scalable sensor platform that includes a wideband 30.5-GHz voltage-controlled oscillator (VCO) as well as 61- and 122-GHz transceivers (TRXs) in a silicon-germanium BiCMOS technology. The proposed architecture enables the cascading of multiple TRXs and allows the implementation of MIMO radar systems in two different frequency bands by using a single VCO. The higher transmit output power of 11.5 dBm as well as receive gain of 24 dB make the 61-GHz TRX suitable for applications requiring a high dynamic range. The lower wavelength allows the integration of on-chip antennas in the 122-GHz TRX and enables, thus, a high miniaturization degree. The higher LO scaling factor makes the 122-GHz TRX also more attractive for high-resolution applications. A sweep bandwidth of 2.5 GHz generated by the VCO is scaled up to 10 GHz and results in a range resolution of 3 cm. The proposed TRXs are equipped with binary phase shift keying modulators as well as an I/Q receiver and can be utilized to build a flexible software-defined radar platform for range and distant-selective vibration sensors utilizing frequency-modulated continuous wave as well as pseudo-random noise radar techniques.
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In this paper, a CMOS multichannel transceiver (TRX) is proposed for angular identification in automotive car radar applications. Two transmitters (TXs) and six receivers (RXs) are placed on the same die using 65-nm CMOS technology with chip size 3.5 × 3 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . To generate a millimeter-wave (MMW) frequency-modulated continuous-wave signal, an injection-lock frequency sextupler cascaded a 1-to-8 Wilkinson power dividing network with wideband isolation is designed as the LO-chain to convert external source from 12.5-13.7 to 75-82.2 GHz for both the TXs and RXs. Each TX achieves above 11-dBm output power and the RXs achieve 30-dB conversion gain from 75 to 82 GHz, and the total power dissipation of whole chip is 1.43 W. Compared with other published multichannel TRXs in silicon germanium (SiGe) process, this paper demonstrates compatible performances and the potential of multichannel TRX using CMOS for MMW automotive car radar application.
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We present highly integrated 60-GHz radar transceivers for industrial sensor applications. The bistatic and monostatic transceivers are implemented in the SiGe bipolar technology and packaged using the embedded wafer-level ball grid array technology that allows for direct embedding of the antennas in the package redistribution layer. In this way, very compact and efficient radar frontends comprising all millimeterwave components can be implemented in an 8 × 8 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> package. These frontends were soldered on a standard low-cost printed circuit board based on FR4 material. For verification of the proposed frontends, an frequency-modulated continuous wave (FMCW) radar system was developed and set up within this paper. Theoretical considerations and simulations as well as corresponding measurements were carried out for the evaluation of the designed system. The demonstrator results of these embedded radar sensors show an excellent system performance at a high integration level.
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This paper presents a 60-GHz CMOS direct-conversion Doppler radar RF sensor with a clutter canceller for single-antenna noncontact human vital-signs detection. A high isolation quasi-circulator (QC) is designed to reduce the transmitting (Tx) power leakage (to the receiver). The clutter canceller performs cancellation for the Tx leakage power (from the QC) and the stationary background reflection clutter to enhance the detection sensitivity of weak vital signals. The integration of the 60-GHz RF sensor consists of the voltage-controlled oscillator, divided-by-2 frequency divider, power amplifier, QC, clutter canceller (consisting of variable-gain amplifier and 360 phase shifter), low-noise amplifier, in-phase/quadrature-phase sub-harmonic mixer, and three couplers. In the human vital-signs detection experimental measurement, at a distance of 75 cm, the detected heartbeat (1-1.3 Hz) and respiratory (0.35-0.45 Hz) signals can be clearly observed with a 60-GHz 17-dBi patch-array antenna. The RF sensor is fabricated in 90-nm CMOS technology with a chip size of 2 mm 2 mm and a consuming power of 217 mW.
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This paper presents a 77-GHz radar system using a transmitter (Tx) and receiver (Rx) integrated with on-chip waveguide feeders in 65-nm CMOS. The newly proposed on-chip waveguide feeder shows the insertion loss of about 2 dB and more than 30% bandwidth. Additionally, both the Tx and Rx are integrated with internal ×10 frequency multipliers. Therefore, a radar system can be easily implemented without sensitive millimeter-wave packaging technology by mounting the Tx and Rx chips on the waveguide aperture. The interconnections for the low-frequency reference and baseband signals can be realized on the low-cost FR-4 printed circuit board. The radar system shows 9-dBm output power and 13-dB down-conversion gain from the waveguide port.
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A 16-element phased-array receiver has been developed for advanced W-band automotive radars. The phased-array receiver is based on a single SiGe chip with RF beamforming capabilities, which is packaged using low-cost bond-wire techniques and attached to a 16-element linear microstrip array. The antenna results in a directivity of 29.3 dB and a gain of 28.0 dB at 77-81 GHz, and can be scanned to ±50° in the azimuth plane in ~ 1° steps. The packaging details are presented together with the steps taken to ensure a wideband impedance match and low coupling between the phased-array channels. Gain measurements done at 79 GHz agree well with simulations. The 16-element phased array receiver was used with a 2-element frequency-modulated continuous-wave transmitter at 76.5-77 GHz and high-resolution millimeter-wave images were obtained. The work shows that complex millimeter-wave phased arrays can be packaged using traditional bond-wire techniques, and can be a powerful solution for advanced automotive radars.
Conference Paper
Six-port interferometers are of great interest for displacement and vibration measurements in industrial as well as medical applications. However, they show offsets as well as amplitude and phase imbalances in their differential in-phase and quadrature signals, leading to inaccuracies of the measured displacement. If a very slow moving or vibrating target has to be monitored, an additional phase shifter for calibration is needed, so that the system's errors can be compensated. A method for calculation and compensation of errors is presented and a compact and cost-efficient implementation of a phase shifter for 24 GHz Six-port interferometers is shown.
Conference Paper
In this article, we present a study about the impact of embedded wafer level ball grid array (eWLB) on characteristics of antenna. The antenna in package is a promising solution for integration of antennas and eWLB technology enables integration of passive components and antennas into the redistribution layer (RDL). The antenna radiates perpendicular to the package in broadside into the package. There are different parameters such as size, shape, and thickness of the eWLB package which affect the radiation pattern significantly. Moreover, the materials properties of package like relative permittivity (εr) and loss tangent (tanδ) impact the impedance bandwidth, gain and efficiency of antenna and have to be taken into account. The other important parameter to design the antenna in package is the distance of antenna to the reflector. We present the feasibility of an antenna with backside metallization as an integrated reflector in an 8 mm × 8 mm eWLB package. The measurement and simulation results show that eWLB is an attractive candidate for mm-wave applications.
Conference Paper
In this paper, we present simulation and measurement results of single-ended and differential vertical interconnections realized using the thin-film redistribution layer (RDL) and through encapsulant vias (TEVs) of the embedded wafer level ball grid array (eWLB) package. We demonstrate that the fan-out area of the eWLB can be used advantageous for the design of passive devices using TEV structures. We show simulation and measurement results of inductors and transformers built up by RDL and TEV structures. Thus, these structures are designed in the fan-out volume of the eWLB mold compound. We discuss the electrical performance of the 3D interconnections and embedded passives realized using TEVs. The presented examples demonstrate that the eWLB technology is an attractive candidate for system integration because this technology enables the design of 2D passives in RDL and 3D passives using RDL and TEV.
Conference Paper
In this article we present an antenna array concept in embedded wafer level ball grid array (eWLB) package for mm-wave applications. The eWLB package has a excellent performance for high frequency and the additional fan-out area around the silicon chip enables the realization of passives and antennas. Moreover, integration of the antenna in package increases the efficiency and reduces cost. For some applications a single antenna in package is unable to achieve the required gain and directivity. Combining several antenna elements as an array in a package can be a possible solution. A two elements differential dipole antenna array in an 8 mm × 8 mm eWLB package at IMS (Industrial, Medical and Scientific) band about 61 GHz is analyzed and successfully implemented. A 100 Ω differential feeding system is designed for the array. The measured reflection coefficient is -25 dB and the designed antenna array has a gain of 11 dB and radiates in broadside.
Conference Paper
This paper presents an on-chip double-dipole antenna by applying micromachining techniques based on a standard SiGe BiCMOS process. It enables the fully integration of millimeter-wave transceiver and antenna into a single chip. A parametric study has been made in simulation which reveals the influence of the key design parameters over the radiation efficiency and directivity. A prototype has been fabricated and measured to verify the design. The measured peak gain is 8.4 dBi at 130 GHz with a simulated efficiency of 60 %. The 3-dB gain bandwidth is 122 – 140 GHz.
Conference Paper
In this article, we present the feasibility of an antenna concept at the ISM (Industrial, Scientific and Medical) band for a two-channel 61 GHz transceiver in embedded wafer level ball grid array (eWLB) technology. The eWLB is an innovative package solution for high-frequency and high-performance applications. We present both simulation and measurement results of antennas which are integrated in the thin-film redistribution layer (RDL) of an eWLB package. Two λ/2-dipole antennas are used for transmitter (TX) and receiver (RX). The package including the antennas is soldered on a RF board in order to measure radiation pattern and scattering parameters (S-parameters). The measured isolation between two antennas is -25 dB and they have a return loss of -26 dB. The observed gain of a single antenna is about 8 dBi and the antenna input impedance bandwidth is 5 GHz. We investigate the impact of package size on the antenna radiation pattern. We present the analysis of the antenna-package interactions and determine the optimum distance of the antennas in package to the reflector on board.
Article
In this paper, a 3-D integrated 77-GHz automotive radar front-end is presented. Embedded wafer level packaging (EMWLP) technology is proposed to eliminate the use of wire bonding, which not only introduces significant radio frequency loss, but also occupies large footprint for high-pin count die. The transceiver bare die is embedded in a reconfigured molded wafer with compression molding process. Double-sided multiple redistribution layers are formed to fan-out the transceiver input/output signals and through mold via is employed to realize the vertical interconnection. With these promising features, the EMWLP technology can be extended to a 3-D integration. A substrate integrated waveguide slot antenna is integrated on top of the EMWLP module and a lens is used to enhance the antenna directivity. The performance of the fully integrated radar front-end is tested and the measurement results show good package performance with RF loss around 5 dB for most of the samples. Temperature cycling reliability test was also performed by letting the fully integrated prototype goes through 1000 temperature cycles with JEDEC standard. The measured package loss spread across samples after 1000 cycles of TC test is about 13 dB, which is mainly due to the antenna warpage affecting the RF path's signal integrity.
Article
This paper presents an antenna-in-package (AiP) solution with embedded wafer Level ball grid array (eWLB) packaging technology. The primary antenna is realized in the redistribution layer of the eWLB package. It is composed of two patches driven by differential signals and supports seamless connection with differential output monolithic microwave integrated circuits in a compact package. A dielectric rod lens was designed to optimize the radiation performance of the whole package. The final lens has the dimensions 10 mm × 10 mm × 10.5 mm. Our measurements show that the whole package (chip+AiP) including the lens reaches 16-dBm effective isotropic radiated power for the frequency range from 71.4 to 81.7 GHz. The radiation beam is relatively symmetric for both the E- and H-plane. The proposed AiP solution has great potential for millimeter-wave applications.
Article
This paper presents the design of a directional folded dipole antenna integrated in an embedded wafer level ball grid array (eWLB) package, the comparison of different antenna designs and the influence of the silicon die and neighboring antennas within the package to the radiation behavior. The co-integration of the antenna and the silicon-based monolithic microwave integrated circuit (MMIC) in a system in package (SiP) approach is a convenient solution to suppress lossy radio frequency (RF) transitions and to simplify the design and the manufacturing of radio frontends significantly. The proposed SiP is focused on 77-GHz automotive radar applications. The MMIC contains the 77-GHz signal source and a transceiver with amplifier and mixer. The gain of different antennas in different constellations within the package is shown.
Article
The embedded wafer level ball grid array (eWLB) is a novel packaging technology that shows excellent performance for millimeter-wave (mm-wave) applications. We present simulation and measurement results of single-ended and differential transmission lines realized using the thin-film redistribution layers (RDL) of an eWLB. We demonstrate the capabilities for the integration of passives on example of a configurable 17/18 GHz down-converter circuit realized in silicon-germanium (SiGe) technology with a fan-in eWLB differential inductor used for the LC tank. We compare the performance of differential chip-package-board transitions realized in an eWLB and in other common package types. We report an optimized compact chip-package-board transition in the eWLB. We obtain a simulated insertion loss as low as −0.65 dB and a return loss below −16 dB at 77 GHz without external matching networks. We introduce the concept of antenna integration in the eWLB and show examples of single-ended and differential antenna structures. Finally, we present for the first time a single-chip four-channel 77 GHz transceiver in SiGe integrated in the eWLB package together with four dipole antennas. The presented examples demonstrate that the eWLB technology is an attractive candidate for mm-wave applications including system-in-package (SiP).
Article
A novel 77-GHz directional folded dipole antenna integrated in an embedded wafer level ball grid array (eWLB) package is presented. For the characterization of the antenna a frequency multiplier is embedded, which scales the 4.25-GHz input signal up to 76.5 GHz and allows the use of a commercial signal source. The antenna structure is manufactured at the metallic layer, in the fan-out area of the package, and directly connected to the monolithic integrated frequency multiplier. The gain of the antenna is about 7 dBi, measured over a large bandwidth of about 8 GHz. The combination of the frequency multiplier with the on-package antenna is a promising approach to future radar modules in a single eWLB package for automotive radar applications. Such a module avoids 77-GHz transitions to the PCB and hence simplifies the design and manufacturing of the radar sensor significantly.
Conference Paper
The feasibility of an antenna-in-package (AiP) concept is demonstrated for automotive radar sensors at the 77 GHz-band. Infineon's embedded wafer level ball grid array (eWLB) is employed as packaging technology. We developed a printed dipole antenna (PDA) and a printed loop antenna (PLA) in 8×8 mm<sup>2</sup> eWLB packages that include 3×3 mm<sup>2</sup> dummy Si chips. The fabricated eWLB packages are soldered onto evaluation boards that are designed and fabricated on an RF substrate. The measurements and the simulations are in a good agreement and predict a promising solution for the realization of cost efficient antenna-in-package concepts.
Conference Paper
We report our recent investigation of a novel uniplanar transition between microstrip lines and coplanar strips (CPS) which is to be utilized in our velocity-matched distributed photodetector (VMDP). Both FDTD simulations and X-band experiments show broadband, low return loss performance of this newly proposed structure, with a measured 3 dB insertion loss bandwidth of 68 percent for the case of a balanced back-to-back microstrip-to-CPS transition
Embedded wafer level ball grid array (eWLB)
  • M Brunnbauer
  • E Furgut
  • G Beer
  • T Meyer
Pea-sized mmW transceivers: QFN-based packaging concepts for millimeter-wave transceivers
  • T Zwick
  • F Boes
  • B Göettel
  • A Bhutani
  • M Pauli
A 77-GHz antenna in package
  • fischer