Article

A low cost MEMS based NDIR system for the monitoring of carbon dioxide in breath analysis at ppm levels

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Abstract

The molecules in our breath can provide a wealth of information about the health and well-being of a person. The level of carbon dioxide (CO2) is not only a sign of life but also when combined with the level of exhaled oxygen provides valuable health information in the form of our metabolic rate. We report upon the development of a MEMS-based non-dispersive infrared CO2 sensor for inclusion in a hand held portable breath analyser. Our novel sensor system comprises a thermopile detector and low power MEMS silicon on insulator (SOI) wideband infrared (IR) emitter. A lock-in amplifier design permits a CO2 concentration of 50ppm to be detected on gas bench rig. Different IR path lengths were studied with gases in dry and humid (25% and 50% RH) in order to design a sensor suitable for detecting CO2 in breath with concentrations in the range of 4-5%. A breath analyser was constructed from acetal and in part 3D printed with a side-stream sampling mechanism and tested on a range of subjects with two data-sets presented here. The performance of the novel MEMS based sensor was validated using a reference commercial breath-by-breath sensor and produced comparable results and gave a response time of 1.3s. Further work involves the detection of other compounds on breath for further metabolic analysis and reducing the overall resolution of our MEMS sensor system from ca. 250ppm to 10ppm.

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... Gas sensors utilizing NDIR technology are highly regarded on the market for their exceptional selectivity, rapid response time, precise accuracy, extended service life, and robust stability when compared to alternative sensor types [11,12]. A typical NDIR gas sensor system based on infrared absorption comprises an infrared (IR) emitter, optical gas chamber, IR detector, and signal-processing circuit, as shown in Figure 1 [13][14][15]. IR emitters include lasers, lamps, and MEMS IR-emitters, etc. [16]. ...
... To verify the repeatability of the gas sensor, the gas sensor was tested six times, and the experimental data of the measured NO2 are shown in Table 6. The repeatability was calculated using Equation (14). ...
... To verify the repeatability of the gas sensor, the gas sensor was tested six times, and the experimental data of the measured NO 2 are shown in Table 6. The repeatability was calculated using Equation (14). The long-term stability of the gas sensor was demonstrated inside the chamber. ...
Article
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Increasing concerns about air quality due to fossil fuel combustion, especially nitrogen oxides (NOx) from marine and diesel engines, necessitate advanced monitoring systems due to the significant health and environmental impacts of nitrogen dioxide (NO2). In this study, a gas detection system based on the principle of the non-dispersive infrared (NDIR) technique is proposed. Firstly, the pyroelectric detector was developed by employing an ultra-thin LiTaO3 (LT) layer as the sensitive element, integrated with nanoscale carbon material prepared by wafer-level graphics technology as the infrared absorption layer. Then, the sensor was hermetically sealed using inert gas through energy storage welding technology, exhibiting a high detectivity (D*) value of 4.19 × 108 cm·√Hz/W. Subsequently, a NO2 gas sensor was engineered based on the NDIR principle employing a Micro Electro Mechanical System (MEMS) infrared (IR) emitter, featuring a light path chamber length of 1.5 m, along with integrated signal processing and software calibration algorithms. This gas sensor was capable of detecting NO2 concentrations within the range of 0–500 ppm. Initial tests indicated that the gas sensor exhibited a full-scale relative error of less than 0.46%, a limit of 2.8 ppm, a linearity of −1.09%, a repeatability of 0.47% at a concentration of 500 ppm, and a stability of 2% at a concentration of 500 ppm. The developed gas sensor demonstrated significant potential for application in areas such as industrial monitoring and analytical instrumentation.
... In this case, the optical path length, l, is defined as the straight path from the source to the detector filled with CO 2 molecules. The sensitivity of the CO 2 measurement depends on l, an increase which results in increased exposure to CO 2 , therefore yielding a more sensitive measurement [53]. On the other hand, higher absorption due to the longer path length and increased exposure to CO 2 molecules, limits the maximum PCO 2 , which can be measured. ...
... A broad range of applications in the automotive industry [83], air quality monitoring [84], breath analysis, and capnography devices [24], [53] entail NDIR-based sensing for monitoring CO 2 levels. Recently, several research groups have proposed NDIR-based sensing for transcutaneous CO 2 monitoring [25], [26], [49], [82], [85], mainly to overcome the drawbacks of traditional electrochemical-based sensing discussed in Section.IV-A, such as the necessity of frequent calibration with a gas bottle for accurate and drift-free measurements and slow response time of the sensor. ...
... Aside from the gas bottle within the calibration unit, which hinders the miniaturization of electrochemical-based monitors, the existence of the heating element demanding power outputs in the range of several hundred milliwatts to achieve a skin temperature of 44 • C necessitates the incorporation of large, high-capacity batteries [23], [93]. NDIR-based monitors can achieve greater sensitivity by increasing the optical path between the IR source and the sensor [53]. Therefore, the sensor component of these monitors, which measure several centimeters, are typically larger than that of electrochemicalbased monitors. ...
Article
Wearable smart health applications aim to continuously monitor critical physiological parameters without disrupting patients' daily activities, such as giving a blood sample for lab analysis. For example, the partial pressure of arterial carbon dioxide, the critical indicator of ventilation efficacy reflecting the respiratory and acid-base status of the human body, is measured invasively from the arteries. Therefore, it can momentarily be monitored in a clinical setting when the arterial blood sample is taken. Although a noninvasive surrogate method for estimating the partial pressure of arterial carbon dioxide exists (i.e., transcutaneous carbon dioxide monitoring), it is primarily limited to intensive care units and comes in the form of a large bedside device. Nevertheless, recent advancements in the luminescence sensing field have enabled a promising technology that can be incorporated into a wearable device for the continuous and remote monitoring of ventilation efficacy. In this review, we examine existing and nascent techniques for sensing transcutaneous carbon dioxide and highlight novel wearable transcutaneous carbon dioxide monitors by comparing their performance with the traditional bedside counterparts. We also discuss future directions of transcutaneous carbon dioxide monitoring in next-generation smart health applications.
... Because of high sensitivity and the characteristics of small volume, optical sensor is widely adopted in the form of gas sensor. Typical applications include hand-held respiratory monitoring sensor [6] and Capone5, which is monitoring equipment of pressure of end-tidal carbon dioxide (PetCO2) applied in the hospital [7]. These systems operate on the principle of non-dispersive infrared (NDIR) absorption, guiding the detected gas to a compact gas chamber device for detection [8,9]. ...
... The working wavelength of the light source (EP2004-0-DM-DX1-FM) is 2.004 μm. The micro-nano optical fiber is placed in a Nasal cavity tube,which is set near the human nasal cavity to directly sense the exhaled carbon dioxide gas, the influence of external air disturbance on the results can be avoided at the same time.The change of the concentration of carbon dioxide in the exhaled gas is characterized by the change of the detector (Thorlabs S401C) and optical power meter (Thorlabs PM100USB) which the periodic change of CO2 concentration is transferred to the periodic 6 change of optical power. Therefore, micro-nano optical fibers can be adopted to monitor CO2 concentration and characterize the respiration cycle process. ...
... When the micro-nano fiber diameter is 1.0 μm, the optical power attenuation is more prominent, and its sensitivity is higher from the above comparative experiments. In addition, the data showed four periodic changes in the optical power within 30 seconds of the monitoring time according to the experimental results of diameters of 1, 3.5, and 6.3 μm in Figure 9. Therefore, It can be calculated that the respiratory is 10-11 times/minute, and the result is consistent with the average human respiratory rate [6,20]. ...
Preprint
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In the field of clinical medicine, the real-time monitoring of carbon dioxide gas exhaled by the human body is of great significance. At present, the detection devices in the market are mainly detected by sucking a small amount of gas in the nasal cavity to the detection device, and there are some problems such as too long sampling tubes, easy blockage or distortion, and abnormal gas dispersion. In this paper, a micro-nano optical fiber sensor that can directly detect the concentration of end-tidal carbon dioxide is proposed. The measurement is achieved by using the principle of high evanescent field absorption, and the operating band is 2.004 μm. The sensor uses micro-nano optical fiber as the sensing area, and then detects the presence of carbon dioxide gas exhaled by human body through optical power attenuation. The function of micro-nano fiber is to realize the transmission of signal light and also serve as the absorption medium of the gas to be measured. In addition, the variation of light power also reflects the respiratory cycle of the human body. The sensor can realize rapid real-time response to carbon dioxide gas detection, with small size, low cost, and easy to replace. It has great application potential in clinical scenarios such as Gastrointestinal Endoscopes that require real-time monitoring of human respiration.
... NDIR sensors detect the CO2 in a gaseous environment by its characteristic absorption and the vital components are an infrared (IR) source, a light tube, an interference filter (wavelength) and an infrared detector [24]. The exhaled CO2 could be measured non-invasively through the manipulation of Lambert-Beer's Law (LBL) [25,26]. The equation of LBL is calculated from Eq. (1). ...
... In 1860 John Tyndall inaugurally measured expired CO 2 by utilizing spectrum absorption with infrared technology [24][25][26][27][28][29][30]. This revolutionized the study of expiratory CO2. ...
Article
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Capnography is the graphical study of carbon dioxide during expiration. Capnography has evolved and is more than merely a biomedical device that is used in the emergency department and intensive care unit (ICU). There are volume based and time-based capnographs. Although end tidal CO2 (EtCO2) is the most used parameter in clinical medicine, there are an abundance of other parameters from the capnometer. The capnographic parameters could originate from specific plot points of the time-or volume-based curves, the area under the curve or other mathematical and computationally transformed data of the CO2. Although research of capnometry since its inception has focused on the respiratory aspects of the CO2 signal with EtCO2, newer parameters could be used to monitor, diagnose and prognose certain circulatory and metabolic disorders. In short, capnography is inevitably one of the important vital signs of modern medicine. As physiologically challenging conditions such as deep-sea diving and the now rampant space travel are becoming more common, there might be a need for familiarization with capnogram usage. In this narrative review, we go through the physiologic, mathematical, physics and clinical aspects of capnography.
... [2][3][4] Now-a-days pollution is increasing drastically due to various hazardous gases as output of industrialization, smoke from vehicles etc. 5 IR emitters are the ready-made choice for use in non-dispersive infrared (NDIR) gas concentration measurement instruments. [6][7][8] Spectroscopic techniques based on non-dispersive NDIR detection have high accuracy even at lower concentrations of gases. [8][9][10][11][12] Gas sensing can be carried out by different techniques 13 but sensors based on IR sensing offer high sensitivity and stability 13 and also, they have long lifetimes as well as smaller response time. ...
Article
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A thick film-based infrared (IR) source was fabricated using multilayer low-temperature co-fired ceramic (LTCC) technology. The proposed emitter was developed using screen printing of platinum material on LTCC substrates. The highly-uniform meander-shaped structure was fabricated with the size of 3.5 x 3.5 mm. Electrical, optical, and thermal characterization of the fabricated device were carried out. Device temperature reaches 600°C at 6.5 V. Optical characterization of the developed device shows that spectral range in the mid-IR region with power consumption of ~ 3 W. An in-house indigenised package was developed using glass metal seal technique for packaging of the developed IR source. Different windows viz., quartz, LiF, and CaF2 were used for packaging. The developed IR source demonstrated the potential to meet the performance, size, and cost requirements for various applications. The developed LTCC based IR source has planar and simple structure with high-temperature-stable lead-free interconnects.
... They often utilize non-dispersive infrared (NDIR) sensors for accurate CO2 measurements. Portable gas analyzers are convenient for spot measurements and can be used for quick assessments of soil CO2 efflux at specific locations (Vincent and Gardner, 2016 Complimentary Copy CO2 efflux. These systems usually consist of multiple chambers that are sequentially deployed over different soil areas. ...
Chapter
Soil respiration (Rs) plays a crucial role in the global carbon cycle and is a major contributor to the amount of carbon dioxide (CO2) released into the atmosphere. It is the process by which microorganisms in the soil break down organic matter and release carbon dioxide (CO2) into the atmosphere and it is an important factor governing climate change. The amount of carbon released from Rs is estimated to be between 60 and 80 billion tons annually, which is roughly ten times the amount of carbon released by human activities such as burning fossil fuels (coal, natural gas, and oil), solid wastes and other biological materials etc. In addition to its impact on the global carbon cycle, Rs is also important for the health and productivity of ecosystems. It is a key component of nutrient cycling, as it releases nutrients from decomposing organic matter into the soil, making them available to plants. It also influences soil pH, soil moisture, and soil structure, all of which affect plant growth and ecosystem functioning. Warmer climate can increase microbial activity and accelerate the rate of decomposition, leading to higher rates of soil respiration and greater CO2 emissions. Changes in precipitation patterns can also impact soil moisture levels, which can affect Rs rates. These rates may vary significantly depending on the type of land use. Land use changes can alter the amount and quality of organic matter inputs to the soil, which can affect the microbial activity and, in turn, Rs rates. Rs rates are typically higher in forests than in agricultural lands. This is because forests typically have a greater quantity and diversity of organic matter inputs, such as leaf litter and woody debris, which can support a larger and more diverse microbial community. In contrast, agricultural lands often have reduced organic matter inputs due to frequent soil disturbance and crop harvest, which leads to lower Rs rates. Similarly, Rs rates may also vary between different agricultural landscapes. Earlier studies showed that Rs rates are typically higher in grasslands than in croplands. This is because grasslands typically have more extensive root systems, which may support a larger microbial community and greater soil respiration rates. Vegetation types can have a significant impact on Rs rates because different plant species have varying effects on soil organic matter and microbial communities. Overall, land use changes and vegetation types can have significant impacts on Rs rates and, in turn, the amount of carbon dioxide released into the atmosphere. Understanding these variations may help management practices those promote healthy soils and mitigate the impacts of climate change. Therefore, understanding the role of Rs in climate change and its sensitivity to environmental factors is important for developing effective strategies to mitigate the impacts of climate change and maintain healthy and productive ecosystems. Management practices that promote healthy soils, such as reducing soil disturbance and increasing soil organic matter, can help in reducing the amount of CO2 released through Rs and help in soil carbon sequestration and climate change mitigation.
... NDIR technology is based on the Beer-Lambert law, which is employed to determine the concentration of chemical substances with light absorption capacity. Carbon dioxide absorbs infrared light at a wavelength of approximately 4.26 µm, resulting in the attenuation of infrared radiation passing through a gas sample containing CO 2 [289]. In a previous study [288], the authors introduced a compact prototype with the potential for use as a wearable transcutaneous CO 2 device in healthcare applications. ...
Article
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This article explores the importance of wearable and remote technologies in healthcare. The focus highlights its potential in continuous monitoring, examines the specificity of the issue, and offers a view of proactive healthcare. Our research describes a wide range of device types and scientific methodologies, starting from traditional chest belts to their modern alternatives and cutting-edge bioamplifiers that distinguish breathing from chest impedance variations. We also investigated innovative technologies such as the monitoring of thorax micromovements based on the principles of seismocardiography, ballistocardiography, remote camera recordings, deployment of integrated optical fibers, or extraction of respiration from cardiovascular variables. Our review is extended to include acoustic methods and breath and blood gas analysis, providing a comprehensive overview of different approaches to respiratory monitoring. The topic of monitoring respiration with wearable and remote electronics is currently the center of attention of researchers, which is also reflected by the growing number of publications. In our manuscript, we offer an overview of the most interesting ones.
... In 2012, Wong et al. successfully integrated a novel CO 2 sensor into optical fibers by using micro-electro-mechanical systems (MEMS) transmitters and detectors [12]. Vincent et al. introduced an NDIR CO 2 sensor designed for portable breath analyzers with an operational range spanning from 0.5 % to 4 % in 2016 [13]. Furthermore, Daniel Popa from the University of Cambridge in the UK designed an integrated infrared gas sensor with low cost and low power consumption using mid-infrared absorption spectroscopy and MEMS technology in 2019 [14]. ...
Article
We present a compact non-dispersive infrared (NDIR) gas sensor that can be adopted in high-moisture and low temperature environments. The NDIR gas sensor was formed by a Micro-Electro-Mechanical Systems (MEMS) emitter working at 400℃ with a broadband radiation spectrum, a MEMS thermopile detector that integrated with an optical filter, a compact gas-cell with high optical coupling efficiency of ~ 48 %, and an imbedded miniature thermostat. The footprint of the sensor is 24 mm × 8 mm × 8 mm (length × width × height), making it just 30 % of the size of conventional NDIR gas sensors with equivalent detection resolution, and its heat capa�bility is around 7.29 J/K that promise a cost-effective thermoregulation. The sensor is capable of accurately detecting gas, such as Carbon dioxide, within a concentration range spanning from 0.5 % to 20 % with a reading error of ± 0.1 % covering a working temperature from − 20 ℃ to 60 ℃. Because the sensor is equipped with a waterproof breathable film at the air hole, the sensor can operate in the humidity range from 0 to 100 %RH, and the maximum detection reading error is 0.1 % ± 230 ppm. It is possible to be applied for both low temperature environments (e.g. food preservation cabinet, biological cabinet, etc) and high-moisture environments (e.g. greenhouse, humidity chambers, etc.).
... [6][7][8] Providing continuous health monitoring for rehabilitated patients during this process can help doctors to develop a reasonable rehabilitation training plan to restore their body movement as soon as possible. In recent years, the rapid progress in the miniaturization of exhaled CO 2 analyzers has made it possible to transfer end-tidal CO 2 analysis from hospitals and clinics to family life, [9][10][11][12] but the disadvantages of large size and high power consumption of CO 2 sensors have limited its further development. Since COVID- 19, there has been a subtle change in the lifestyle of people who have become accustomed to using masks in various public places to ensure personal safety. ...
Article
Full-text available
Human physiological metabolic status can be obtained by monitoring exhaled CO2 concentration, but current CO2 sensors have disadvantages such as large size, high power consumption, and slow response time, which limit their application in wearable devices and portable instruments. In this article, we report a small size, good performance, and large range CO2 infrared gas sensor that integrates a high emissivity MEMS emitter chip, a high detectivity thermopile chip, and a high coupling efficiency optical chamber to achieve high efficiency optical-thermal-electrical conversion. Compared with typical commercial sensors, the size of the sensor can be reduced by approximately 80% to only 10 mm × 10 mm × 6.5 mm, with the advantages of low power consumption and fast response speed. Further, a monitoring system for end-tidal CO2 concentration installed on a mask was developed using this sensor, and good results were achieved.
... This sensor has low power consumption and heat dissipation, which makes it widely used in CO 2 soil respiration and air quality monitoring. As far, NDIR sensors have great potential for development and are widely used in gas detection and respiratory analysis because of their unique advantages (Vincent and Gardner 2016). Relevant researchers will also continue improving such sensors in many aspects, such as power consumption, cost, and structure, making them one of the most representative gas sensors. ...
Article
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The development and renewal of gas sensor technology have enabled more and more low-cost gas sensors to form a carbon monitoring network to meet the requirements of the city. In the context of China’s commitment to achieving the “double carbon” target by 2060, this paper reviews the principles of four standard gas sensors and the application of several low-cost sensors in urban carbon monitoring networks, with the aim of providing a practical reference for the future deployment of carbon monitoring networks in Chinese cities. Moreover, the types, prices, and deployment of the sensors used in each project are summarized. Based on this review, non-dispersive infrared sensors have the best performance among the sensors and are commonly used in many cities. Lots of urban climate networks in cities were summarized by many reviews in the literature, but only a few sensors were studied, and they did not consider carbon dioxide (CO2) sensors. This review focuses on the dense CO2 urban monitoring network, and some case studies are also discussed, such as Seoul and San Francisco. To address the issue of how to better ensure the balance between cost and accuracy in the deployment of sensor networks, this paper proposes a method of simultaneously deploying medium-precision and high-precision fixed sensors and mobile sensors to form an urban carbon monitoring network. Finally, the prospects and recommendations, such as different ways to mitigate CO2 and develop an entire carbon monitoring system for future urban carbon monitoring in China, are also presented. Graphical abstract
... There are a variety of detection methods for gas concentration, among which CO 2 gas sensor based on non-dispersive infrared (NDIR) technology has been used in air pollution detection, industrial processes, refined agriculture, medical diagnosis, as well as indoor and outdoor air quality monitoring due to its advantages of good selectivity and stability, high sensitivity, wide measuring range, as well as high precision. [1][2][3][4][5] The NDIR gas sensor is made up of a light source, a gas chamber, a photodetector, and a signal processing module. 6 According to the position of the light source and the photodetector, the NDIR gas sensors are divided into two types: direct and reflective. ...
Article
In order to accurately monitor CO2 concentration based on the non-dispersive infrared technique, a novel flat conical chamber CO2 gas sensor is proposed and investigated by simulation analysis and experimental verification. First, the optical design software and computational fluid dynamics method are utilized to theoretically investigate the relationship between the energy distribution, absorption efficiency of infrared radiation, and chamber size. The simulation results show that the chamber length has an optimal value of 8 cm when the cone angle is 5° and the diameter of the detection surface is 1 cm, which makes infrared absorption efficiency optimal. Then, the flat conical chamber CO2 gas sensor system is developed, calibrated, and tested. The experimental results indicate that the sensor can accurately detect CO2 gas concentrations in the range of 0-2000 ppm at 25 °C. It is found that the absolute error of calibration is within 10 ppm, and the maximum repeatability and stability errors are 5.5 and 3.5%, respectively. Finally, the genetic neural network algorithm is presented to compensate for the output concentration of the sensor to solve the problem of temperature drift. Experimental results demonstrate that the relative error of the compensated CO2 concentration is varied from -0.85 to 2.32%, which is significantly reduced. The study has reference significance for the structural optimization of the infrared CO2 gas sensor and the improvement of the measurement accuracy.
... Low-cost (300 €) chemical sensors are miniature devices that offer a real-time output reflecting the concentration of gases and chemical volatile substances in contact with the sensor. The conditioning electronics' small size, lightweight, low power requirements, and simplicity make them easy to integrate into fixed and portable measurement systems, such as those commonly used for industrial safety Rezende, Le Calvé, Brandner and Newport (2019), environmental monitoring Baron and Saffell (2017), food analysis Loutfi, Coradeschi, Mani, Shankar and Rayappan (2015), and biomedicine applications Vincent and Gardner (2016). ...
... Based on this technology, we developed an NDIR gas sensor system. NDIR gas sensors are widely used for measuring gas concentrations [28,29], IR breadth analysis [30,31] and environmental monitoring [32,33] via their molecular vibrations [34,35]. In this technology, an infrared beam passes through the sampling chamber, and each gas component in the sample absorbs infrared rays of a specific frequency, as shown in Figure 1. ...
Article
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This paper proposes to apply a newly developed Non-Dispersive Infrared Spectroscopy (NDIR) gas sensing system composed of pyroelectric infrared detectors to monitor the thermal runaway (TR) process of lithium-ion batteries in real time and achieve an early warning system for the battery TR process. The new Electrical Vehicle Safety—Global Technical Regulation (EVS-GTR) requires that a warning be provided to passengers at least five minutes before a serious incident. The experimental results indicate that carbon dioxide and methane gas were detected during the overcharge test of the automotive battery, and the target gas was detected 25 s in advance before the battery TR when the battery vent was closed. In order to further explore the battery TR mechanism, an experiment was carried out using the battery sample with the battery vent opened. The target gas was detected about 580 s before the battery temperature reached the common alarm temperature (60 °C) of the battery management system (BMS). In this study, the beneficial effects of NDIR gas sensors in the field of thermal runaway warnings for automotive batteries were demonstrated and showed great application prospects and commercial value.
... Secondly, the fast response time (dependent on flow rate) and the high amount of readings per second, with values reported up to 50 Hz, provide them with the ability to perform breath-by-breath measurements [99]. In the typical range of an exhaled breath (4-5%) NDIR CO 2 sensors exist with an accuracy of ±2.9%, which is ±145 ppm if the exhaled breath contained 50,000 ppm CO 2 [100]. Another strength lies in the extremely low power consumption, e.g., 3.5 mW at 3.3 V in the ExplorIR-M NDIR CO 2 Sensor by SST Sensing [101]. ...
Article
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Indirect calorimetry (IC) is considered the gold standard for measuring resting energy expenditure (REE). This review presents an overview of the different techniques to assess REE with special regard to the use of IC in critically ill patients on extracorporeal membrane oxygenation (ECMO), as well as to the sensors used in commercially available indirect calorimeters. The theoretical and technical aspects of IC in spontaneously breathing subjects and critically ill patients on mechanical ventilation and/or ECMO are covered and a critical review and comparison of the different techniques and sensors is provided. This review also aims to accurately present the physical quantities and mathematical concepts regarding IC to reduce errors and promote consistency in further research. By studying IC on ECMO from an engineering point of view rather than a medical point of view, new problem definitions come into play to further advance these techniques.
... Over the above, MEMS technology has been utilized widely in the development of gas and chemical sensors [28]. Moreover, MEMS devices have been used for gas detection including sulfur dioxide ( SO 2 ) [50], carbon dioxide ( CO 2 ) [51], nitrogen dioxide ( NO 2 ) [52], and a few more gases that are constantly released by industry into the environment in the industrialization era. There are various gas sensors utilized in MEMS technologies including capacitive sensing [53], piezoresistive sensing [54,55], optical sensing [56], and piezoelectric sensing methods [15]. ...
Article
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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal-organic framework, and graphene.
... At present, the major popular optical gas sensors are NDIR (nondispersive infrared) sensors based on the spectrum absorption principle, which characterize the gas concentration by detecting the attenuation of optical intensity. The traditional gas sensors frequently apply to air chambers and are disadvantaged due to taking up too much room, high cost, only being used for specified situations, and the difficulty for industrial manufacturing [4][5][6]. ...
Article
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Two optical waveguide sensors based on SOS (silicon-on-sapphire) for detecting CO2 are theoretically proposed. The operational wavelength is 4.23 μm, which is the maximum absorption line of CO2. The power confinement factor (η) value is over 40% and 50%, the propagation loss is 0.98 dB/cm and 2.99 dB/cm, respectively, in the slot waveguide and SWGS (subwavelength grating slot) waveguide. An inverted tapered structure is used for the transition from strip waveguide to slot waveguide and constitutes the sensing absorption region, with the coupling efficiency that can reach more than 90%. When the optimal absorption length of the slot waveguide and SWGS waveguide is 1.02 cm and 0.33 cm, respectively, the maximum sensitivity can reach 6.66 × 10−5 (ppm−1) and 2.60 × 10−5 (ppm−1). Furthermore, taking the slot waveguide as an example, spiral and meander structures enable the long-distance sensing path to integrate into a small area.
... However, such a large fluctuation in atmospheric pressure is not expected in ambient air testing in the field. Gas molecule diffusion within the detection chamber is affected by temperature, and the absorption peaks of water molecules overlapped with CO2, affecting detection accuracy [24,25]. Therefore, temperature and humidity are two major ambient parameters that influence CO2 gas measurement in applications [26,27]. ...
Article
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Increasing carbon dioxide (CO2) concentrations threaten human production and life. Currently the equipment used for CO2 monitoring is heavy and expensive, without a portable CO2 detector that is inexpensive and resistant to interference. Here we designed a portable CO2 detector based on no-dispersive infrared sensors to measure CO2 concentration. The detector, which has a mass of 1 kg, is powered by a lithium battery with dimensions of 200 mm (length) × 150 mm (width) × 100 mm (height). Considering the fact that field observations are susceptible to humidity, a series of experiments were carried out to reduce the humidity interference on sensor responses at a laboratory. The values of humidity and CO2 variation were used in a regression model analysis to determine a quadratic function with an R2 above 0.94. The detector was compared with a reference analyzer in ambient CO2 measurement during a 7-day field campaign in Hangzhou, China. After humidity correction, the data show better correlation with the reference data, with the R2 0.62–0.97 increasing from 0.62–0.97 compared to before the correction and the value deviation decreasing to less than 3%. Cluster analysis of sensors revealed a reduction in average relative deviation of up to 1.4% as the number of sensors increased.
... The measurement of CO 2 in the exhaled breath, the normal level of which is 4-5% [40], of endotracheally intubated patients can be used to indicate correct tracheal intubation and show a steady breathing rate [41]. Although infrared absorption spectroscopy is very good for monitoring CO 2 levels in breath, the equipment is expensive and bulky [8,37,42]. ...
Article
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Two different, commercial colourimetric CO2 indicators are made in the lab, namely one based on an indicator in solution for monitoring the level of dissolved CO2 in an aquarium, i.e., a drop check indicator, and another based on an ink, for monitoring the level of CO2 in breath (capnography), i.e., a correct tracheal placement indicator. The selected commercial indicators are limited currently in terms of the analytical information they provide (qualitative) as they are normally assessed by eye. Thus, in each case, for both the lab-made and commercial indicators, colour photography coupled with digital image analysis, i.e., digital colour analysis (DCA), is used to convert the colour data from the indicator into a quantitative measure of CO2 and so markedly improve the quality of the analytical information provided by original indicator. This is the first time either indicator has been studied as a quantitative analytical system. The CO2 sensitivity of each of the lab-made indicators is found to match well that of its commercial counterpart. A simple program is provided to help non-experts and experts alike to apply DCA in this way. The potential of DCA to enhance the performance of other commercial indicators is discussed briefly.
... The NDIR sensors can be implemented in various applications including heating, ventilation, and air conditioning (HVAC) [9], environmental diagnostics [10,11], medical diagnostics [12], breadth analysis [13,14], and trace gas sensing [15] owing to their robustness. The qualitative analysis of unknown mixtures faces certain limitations since the selectivity depends on the center wavelength and bandwidth of the OBPF. ...
Article
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This study presents a multi-gas analyzer based on tunable filter non-dispersive IR (TF-NDIR) sensors that operate with a wide dynamic range of wavelength and concentration. A pyroelectric sensor coupled with a microsized Fabry–Perot interferometer, namely a tunable filter, enables sensing within a narrowly selected wavelength band. Three detectors capable of tuning the bandpass wavelength with a range of 3.8–5.0 μm, 5.5–8.0 μm, and 8.0–10.5 μm are combined to encompass the entire mid-IR region. single-pass cell with an optical path length (OPL) of 5 cm and a multi-pass cell with an OPL of 10.5 m is selected to encompass a concentration range from ppmv to percent. The TF-NDIR sensors and gas cells can be reconfigured by manipulating the beam path. A homemade lock-in amplifier is used to enhance the signal-to-noise ratio 88 times greater than that of the bare signal. The performance of the gas analyzer is evaluated by measuring the SF6 and Novec-4710/CO2 mixture, which are the dielectric gas medium for a gas-insulated switch (GIS). The mixing ratio of the Novec-4710/CO2 mixture is measured within a range of 3–7% using premixes. The measurement precision is 0.72% for 0.5 s. Trace level measurements of Novec-4710, CO2, SF6, which are measurands for detecting gas leakage from the GIS, CO, and SO2 which are measurands for detecting product generated by the arc or thermal decomposition in the switching electrode, are conducted based on dynamic partial pressure adjustment using 1000 ppmv mother premixes in N2. The limit of detection is 54.7 ppmv for Novec-4710, 112.8 ppmv for CO, 118.1 ppmv for CO2, 69.5 ppmv for SO2, and 33.5 ppmv for SF6.
... MEMS thermopiles can convert infrared radiation into electrical signals and have been widely used in non-contact thermometers [1,2], uncooled infrared cameras [3,4], gas flow sensors [5][6][7], heat flow sensors [8][9][10], nondispersive infrared sensors [11][12][13][14][15], and vacuum gauges [16,17], etc. The performance of thermopiles can be evaluated by various parameters, including responsivity, detectivity, response time, etc. Herein, the response time is the time required by the device to detect the object and reach the stable state, which reflects the response speed of the device to external excitation [18,19]. ...
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Chapter
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Chapter
As discussed in previous chapters, carbon dioxide (CO2) gas released by human body is a notable excretory product from cellular respiration of living organism in identifying several respiratory and pulmonary illness. Among many, asthma as the primary respiratory disease is one of the key diseases that can be diagnosed with the evaluation of parameters identified from CO2 released by a patient. Regarding that, Chapters 3–5 have detailed about capnography, a noninvasive device that uses sensing technology and measures human respiration CO2 from the expired gasses and an incessant plot of exhaled CO2 over time, known as a capnogram. Capnography detects CO2 from expired gas and extracts the featured CO2 parameters such as end-tidal CO2 (EtCO2), respiratory rate slope angles, and many more, which can be used to differentiate asthmatic and nonasthmatic conditions. For an effective capnography, a high-performance CO2 sensor is necessary. There are a variety of CO2 sensors developed and a huge effort is involved in improving the technology for highly sensitive CO2 sensors. The present chapter discusses the types of CO2 sensors and its contribution for diagnosing asthma, as well as in enhancing capnography.
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During the last few years, thermopiles have come increasingly under the spotlight of commercial infrared sensing. This growing interest has motivated us to write an overview of micromachined thermopiles. The first part deals with the Seebeck effect and discusses the most important physical parameters with their interactions. We also describe the main noise sources and give a derivation of the figures of merit and their relevance for thermopile detectors. In the second part, a number of material systems, techniques and micromachined structures are discussed on the basis of different examples. We explain the motivation behind miniaturized thermopile detectors and give a functional explanation of physical interrelations. Finally, different applications are presented and discussed in terms of their future potential.
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An infrared alcohol testing system based on differential absorption is presented. The technique relies on the fact that the breath alcohol gas has a unique, well-defined absorption characteristic within the infrared region of electromagnetic spectrum. It is used to detect the present and concentration of alcohol gas. The non-dispersive infrared gas detection principle is introduced in detail. Experiments show that the testing system has high precision, good environment adaptability, and its indication error and repeatability reach the China National Standards.
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Obesity has long been recognized as having significant effects on respiratory function. The topic has been studied for at least the last half century, and some clear patterns have emerged. Obese patients tend to have higher respiratory rates and lower tidal volumes. Total respiratory system compliance is reduced for a variety of reasons, which will be discussed. Lung volumes tend to be decreased, especially expiratory reserve volume. Spirometry, gas exchange and airway resistance all tend to be relatively well preserved when adjusted for lung volumes. Patients may be mildly hypoxaemic, possibly due to ventilation-perfusion mismatching at the base of the lungs, where microatelectasis is likely to occur. Weight loss leads to a reversal of these changes. For all of these changes, the distribution of fat, that is, upper versus lower body, may be more important than body mass index.
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Acetone in the human breath is an important marker for noninvasive diagnosis of diabetes. Here, novel chemo-resistive detectors have been developed that allow rapid measurement of ultralow acetone concentrations (down to 20 ppb) with high signal-to-noise ratio in ideal (dry air) and realistic (up to 90% RH) conditions. The detector films consist of (highly sensitive) pure and Si-doped WO(3) nanoparticles (10-13 nm in diameter) made in the gas phase and directly deposited onto interdigitated electrodes. Their sensing properties (selectivity, limit of detection, response, and recovery times) have been investigated as a function of operating temperature (325-500 degrees C), relative humidity (RH), and interfering analyte (ethanol or water vapor) concentration. It was found that Si-doping increases and stabilizes the acetone-selective epsilon-WO(3) phase while increasing its thermal stability and, thus, results in superior sensing performance with an optimum at about 10 mol % Si content. Furthermore, increasing the operation temperature decreased the detector response to water vapor, and above 400 degrees C, it was (<or=0.7) always below the threshold (10.6) for fake diabetes detection in ideal conditions. At this temperature and at 90% RH, healthy humans (<or=900 ppb acetone) and diabetes patients (>or=1800 ppb) can be clearly distinguished by a remarkable gap (40%) in sensor response. As a result, these solid state detectors may offer a portable and cost-effective alternative to more bulky systems for noninvasive diabetes detection by human breath analysis.
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Triathlon is a sport consisting of sequential swimming, cycling and running. The main diversity within the sport of triathlon resides in the varying event distances, which creates specific technical, physiological and nutritional considerations for athlete and practitioner alike. The purpose of this article is to review physiological as well as nutritional aspects of triathlon and to make recommendations on ways to enhance performance. Aside from progressive conditioning and training, areas that have shown potential to improve triathlon performance include drafting when possible during both the swim and cycle phase, wearing a wetsuit, and selecting a lower cadence (60-80 rpm) in the final stages of the cycle phase. Adoption of a more even racing pace during cycling may optimise cycling performance and induce a "metabolic reserve" necessary for elevated running performance in longer distance triathlon events. In contrast, drafting in swimming and cycling may result a better tactical approach to increase overall performance in elite Olympic distance triathlons. Daily energy intake should be modified to reflect daily training demands to assist triathletes in achieving body weight and body composition targets. Carbohydrate loading strategies and within exercise carbohydrate intake should reflect the specific requirements of the triathlon event contested. Development of an individualised fluid plan based on previous fluid balance observations may assist to avoid both dehydration and hyponatremia during prolonged triathlon racing.
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Designing a high temperature resistant IR-gas sensor for CO<sub>2</sub> and water vapor one has to consider the differences in the specific absorbances, spacings between the heated parts and optics/electronics, emission spectrum of cost-saving radiators and high humidity in the measuring gas. Using HITRAN database a sensor model was developed. Water vapor can be measured selectively at 1.85 μm with a chamber length of 20 cm. So CO<sub>2</sub> has to be measured at low wavelengths too. In the range of 2.7 μm CO<sub>2</sub> absorbs sufficiently but a water absorption is to be considered. The model shows that the CO<sub>2</sub> absorption reaches a maximum in the range from 2.7 μm to 2.75 μm with a decreasing water absorption with increasing wavelengths. After finishing the sensor the model was checked with the actual filter curves. The results show a good analogy between model data and measurements and the benefit of modeling in the design of IR-gas sensors. The analyze of cross sensitivity shows strong overlapping bands and a multiplicative influence of water absorption to the CO<sub>2</sub> signal. After correction of the absorption signal of 2.7 μm-channel with the absorption signal of the 1.85 μm-channel the cross sensitivity to water vapor was limited to <3% of CO<sub>2</sub> measuring range.
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A new high-precision spectroscopic gas sensor measuring carbon dioxide (CO<sub>2</sub>) for harsh environmental conditions of automotive applications is presented. The carbon dioxide concentration is the primary parameter for sensing in cabin air quality, as well as an important safety parameter when R744 (carbon dioxide) is used as the refrigerant in the air conditioning system. The automotive environment challenges the potential sensor principles because of the wide temperature range from -40degC to +85degC, the atmospheric pressure from 700 to 1050 mbar, and relative humidity from 0% to 95%. The presented sensor system is based on the nondispersive infrared principle with new features for reaching high precision criteria and for enhancing long-term stability. A second IR source is used for internal recalibration of the primary IR source, redundancy purposes, and software plausibility checks. The CO<sub>2</sub> sensor system achieves an accuracy of better than plusmn5.5% over the whole temperature, pressure, and humidity ranges, with a resolution below 15 ppm and a response time shorter than 5 s. The operating time of the sensor system is more than 6000 h over a corresponding lifetime of more than 15 years. Experimental results show outstanding results for the intended automotive applications
  • S Ali
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S. Ali, A. De Luca, Z. Racz, P. Tremlett, T. Wotherspoon, J.W. Gardner, et al., Low power NDIR CO2 sensor based on CMOS IR emitter for boiler applications, IEEE SENSORS 2014
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Breath measurements as volatile organic compound biomarkers
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Heimann Sensor, Heimann HMS Series Datasheet, (2014). http://www.heimannsensor.com/ (accessed July 1, 2015).