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Roll-to-Roll Sputter Deposition on Flexible Glass Substrates
Abstract
Flexible glass is very thin glass below 100 μm, and flexible enough to be wound in a roll. Flexible glass is a very attractive substrate when we consider the roll-to-roll production of flexible displays, because it has thermal stability up to the temperature range for the display fabrication, excellent barrier properties, a very smooth surface and high transparency. However, the roll-to-roll deposition on the flexible glass is still not easy because of the fragility of the glass and the number of the reports is limited.
In this paper, we demonstrated successful roll-to-roll depositions of ITO on flexible glass 50 μm and 100 μm thick, 300 mm wide and up to 50 m long, using a compact sputter roll-coater with some modifications for the flexible glass handling. A 190 nm ITO coating deposited on the 50 μm thick flexible glass showed the sheet resistance to be as low as 7.5 Ω/sq when heating the substrate to about 250 °C. We also demonstrated continuous roll-to-roll deposition of 24 nm ITO on 100 μm thick and 50 m long flexible glass substrate. The properties of this coating were revealed to have 102 Ω/sq sheet resistance and 90% light transmission. Through these experiments, we demonstrated the feasibility to use flexible glass as the substrate for the roll-to-roll vacuum deposition process.
... The novel fabrication technologies include R2R sputtering technologies and R2R patterning technologies with no photolithography. While R2R sputtering of ITO on ultra-thin glass has been reported [9], this study investigated the influence of the deposition temperature and sputtering parameters on not only resistivity and transmittance but also distribution of resistivity, surface smoothness and curl of sub-Copyright c 2017 The Institute of Electronics, Information and Communication Engineers strate. While the most common patterning method of ITO is photolithography, this study investigated novel R2R patterning using an etching paste printed by R2R screen printing method. ...
... ITO layers are deposited on the ultra-thin glass by using a R2R sputtering equipment of Kobe Steel [9]. The target is SnO 2 (10 wt%)-doped ITO. ...
Novel roll-to-roll (R2R) deposition and patterning of ITO on ultra-thin glass were developed with no photolithography and applied to flexible organic light emitting diodes (OLEDs). The developed deposition consists of low temperature sputtering and annealing. The developed patterning utilizes an etching paste printed by novel R2R screen printing.
... Recently, thanks to the commercialization of ultrathin glass sheets to serve as possible substrates [16][17][18], the idea of an all-glass flexible photonics has recently taken hold. Ultrathin glasses are expected to perform under a variety of deformation conditions (bending, rolling, twisting, etc.) [19][20][21], representing potential components for emerging technologies including flexible photonics and integrated optoelectronics. ...
Thin films have a crucial role in integrated optics. The development of passive and active devices such as splitters, waveguides, multiplexers and optical amplifiers is by now established on rigid substrates. Therefore, an important further step to improve this kind of technologies and open the route to new applications is to extend these functionalities to mechanically flexible devices. One fundamental brick to obtain this features extension is the fabrication of low loss inorganic active planar waveguides on flexible glass substrate. Here, we present the preliminary results of a novel top-down fabrication of an active SiO2–HfO2:Er3+ all-glass flexible planar waveguide, via radio frequency sputtering. The waveguiding system, deposited on ultrathin flexible glass substrate, showed an attenuation coefficient lower than 0.2 dB/cm at 1.53 μm and exhibits emission in the NIR region.
... FTS can control plasma confinement by controlling the cathode installed inside the magnetic-field arrangement of the system to ensure that the quality of the film can be improved under a lower-temperature environment. Jeong et al. [30] reported that Al-doped ZnO (AZO) films with a sheet resistance of 39 ohm/sq (film thickness~330 nm) and average transmittance of 84.86% were deposited on a polyethylene terephthalate (PET) substrate using FTS. (c) Spin Coating ...
Over the past few decades, silicon-based solar cells have been used in the photovoltaic (PV) industry because of the abundance of silicon material and the mature fabrication process. However, as more electrical devices with wearable and portable functions are required, silicon-based PV solar cells have been developed to create solar cells that are flexible, lightweight, and thin. Unlike flexible PV systems (inorganic and organic), the drawbacks of silicon-based solar cells are that they are difficult to fabricate as flexible solar cells. However, new technologies have emerged for flexible solar cells with silicon. In this paper, we describe the basic energy-conversion mechanism from light and introduce various silicon-based manufacturing technologies for flexible solar cells. In addition, for high energy-conversion efficiency, we deal with various technologies (process, structure, and materials).
... An emerging challenge, in the development of flexible electronic and photonic circuits, is how to deposit organic or inorganic, dielectric or conductive, layers on top of very thin glasses, also with the aim of improving the management of loads on the glass, always guaranteeing a very good adhesion; a special requirement may be the compatibility with R2R fabrication processes. Various articles have discussed these topics [48][49][50][51]. ...
The development of the information technology and, very recently, of new application scenarios like Internet of Things (IoT) and Industry 4.0 has pushed the research towards new technological platforms. In this frame, the spatial freedom permitted by flexible short-range connections and flexible devices has become as important as “classical” parameters such as low weight, low power consumption, and electromagnetic immunity. Accordingly, first the flexible electronics and later the flexible photonics have produced innovative components and devices. The present paper aims at presenting a brief overview of this broad area, underlining the achievements and the remaining challenges in the different routes to the manufacturing of flexible photonic devices. Material platforms remain at the core of such developments, and it is interesting to note that glassy materials still constitute a fundamental piece in the present and future scenario.
... Flexible optoelectronics have the advantages of light weight, superior flexibility, design variability, and low cost, so they are being investigated as next-generation optoelectronic devices for uses such as flexible displays, thin-film transistors, and thin-film solar cells [5]. To fabricate inexpensive, high-performance flexible optoelectronic devices, it is necessary to prepare TCOs with low resistance (≈300 Ω/ or less for flexible liquid-crystal displays (LCDs), ≈100 Ω/ for flexible organic light-emitting diodes) and a high transmittance ratio (>80%). ...
In this study, a radio frequency magnetron sputtering process was used to deposit F-doped ZnO (FZO) films on polyimide (PI) substrates. The thermal expansion effect of PI substrates induces distortion and bending, causing FZO films to peel and their electrical properties and crystallinity to deteriorate. To address these shortcomings, oxygen (O2) plasma was used to pretreat the surface of PI substrates using a plasma-enhanced chemical vapor deposition system before the FZO films were deposited. The effects of O2 plasma pretreatment time on the surface water contact angle, surface morphologies, and optical properties of the PI substrates were investigated. As the pretreatment time increased, so did the roughness of the PI substrates. After the FZO films had been deposited on the PI substrates, variations in the surface morphologies, crystalline structure, composition, electrical properties, and optical properties were investigated as a function of the O2 plasma pretreatment time. When this was 30 s, the FZO films had optimal optical and electrical properties. The resistivity was 3.153 × 10−3 Ω-cm, and the transmittance ratios of all films were greater than 90%. The X-ray photoelectron spectroscopy spectra of the FZO films, particularly the peaks for O1s, Zn 2p1/2, and Zn 2p3/2, were determined for films with O2 plasma pretreatment times of 0 and 30 s. Finally, a HCl solution was used to etch the surfaces of the deposited FZO films, and silicon-based thin-film solar cells were fabricated on the FZO/PI substrates. The effect of O2-plasma pretreatment time on the properties of the fabricated solar cells is thoroughly discussed.
... For example, some process steps might be best performed on flexible substrates using rollto-roll (R2R) handling methods instead of sheet-based processes. The compatibility of flexible glass in R2R processes [12,13] and the ability to fabricate flexible glass devices completely using R2R methods [7,14] have recently been demonstrated. This invited paper provides an overview of the benefits of glass substrates for flexible electronic applications in general, as well as the compatibility of flexible glass in roll-to-roll device fabrication. ...
As displays and electronics evolve to become lighter, thinner, and more flexible, the choice of substrate continues to be critical to their overall optimization. The substrate directly affects improvements in the designs, materials, fabrication processes, and performance of advanced electronics. With their inherent benefits such as surface quality, optical transmission, hermeticity, and thermal and dimensional stability, glass substrates enable high-quality and long-life devices. As substrate thicknesses are reduced below 200 μm, ultra-slim flexible glass continues to provide these inherent benefits to high-performance flexible electronics such as displays, touch sensors, photovoltaics, and lighting. In addition, the reduction in glass thickness also allows for new device designs and high-throughput, continuous manufacturing enabled by R2R processes. This paper provides an overview of ultra-slim flexible glass substrates and how they enable flexible electronic device optimization. Specific focus is put on flexible glass’ mechanical reliability. For this, a combination of substrate design and process optimizations has been demonstrated that enables R2R device fabrication on flexible glass. Demonstrations of R2R flexible glass processes such as vacuum deposition, photolithography, laser patterning, screen printing, slot die coating, and lamination have been made. Compatibility with these key process steps has resulted in the first demonstration of a fully functional flexible glass device fabricated completely using R2R processes.
Flexible glass with high bending strength is a remarkable component of flexible electronic displays. However, as a brittle material, its bending properties often do not meet requirements of application. To address this challenge, the application of chemical strengthening stands out as a viable approach to significantly bolster scratch resistance and bending strength in flexible glass. This study focuses on a conventional one‐step chemical strengthening method, employing molten potassium nitrate, to reinforce ultrathin aluminosilicate glass produced through the secondary down‐drawing thermoforming process. Effects of ion‐exchange temperature and time on mechanical properties of strengthened 110 µm flexible glass were investigated, and moreover, properties of strengthened ultrathin flexible glass with various thicknesses were compared. The results indicate that, after chemical strengthening at 380°C for 1 h, the compressive stress (CS) of 110 µm glass reaches 864.60 MPa, and the depth of layer is 15.86 µm, at which time the glass has the best bending performance and scratch resistance, and half of the faceplate spacing during glass breakage can be enhanced from 38.02 ± 2.7 to 8.40 ± 0.62 mm. For ultrathin flexible glass from 40 to 110 µm, after treatment at 380°C for 1 h, the CS of thick glass is higher than that of thin glass, and the enhancement of bending performance is better.
Solid-state batteries (SSBs) possess the advantages of high safety, high energy density and long cycle life, which hold great promise for future energy storage systems. The advent of printed electronics has transformed the paradigm of battery manufacturing as it offers a range of accessible, versatile, cost-effective, time-saving and ecoefficiency manufacturing techniques for batteries with outstanding microscopic size and aesthetic diversity. In this review, the state-of-the-art technologies and structural characteristics of printed SSBs have been comprehensively summarized and discussed, with a focus on the cutting-edge printing processes. Representative materials for fabricating printed electrodes and solid-state electrolytes (SSEs) have been systematically outlined, and performance optimization methods of printed SSBs through material modification have been discussed. Furthermore, this article highlights the design principles and adjustment strategies of printing processes of advanced SSB devices to realize high performance. Finally, the persistent challenges and potential opportunities are also highlighted and discussed, aiming to enlighten the future research for mass production of printed SSBs.
Graphical Abstract
Recently, interest in transparent electrodes has been increasing in biomedical engineering applications for such as electro-optical hybrid neuro-technologies. However, conventional photolithography-based electrode fabrication methods have limited design customization and large-area applicability. For biomedical engineering applications, it is crucial that we can easily customize the electrode design for different patients over a large body area. In this paper, we propose a novel method to fabricate customization-friendly, transparent, ultrathin, gold microelectrodes using inkjet printing technology. Unlike with typical direct printing of conductive inks, we inkjet-printed a polymer nucleation-inducing seed layer, followed by mask-less vacuum deposition of ultrathin gold (<6 nm) to produce selectively, high-transparency electrodes in the predefined shapes of the inkjet-printed polymer. Owing to the design flexibility of inkjet printing, the transparent ultrathin gold electrodes can be highly efficient in design customization over a large area. Simultaneously, a layer of nonconductive gold islands is formed in the nonprinted region, and this nanostructured layer can implement a photothermal effect that offers versatility for novel biomedical applications. As a demonstration of the effectiveness of these transparent electrodes, and the facile implementation of the photothermal effect for biomedical applications, we successfully fabricated transparent resistive temperature detectors. We used these to directly sense the photothermal effect and to demonstrate their bioimaging capabilities.
The forming process of the flexible ultrathin glasses (UTG) prepared by the redrawing method was numerically simulated using ANSYS Polyflow software. In the forming process by the redrawing method, temperature, viscosity, transverse and longitudinal velocity distribution of the glasses with different compositions were studied. Furthermore, the influence of these factors on the width and thickness of the flexible glass plate was investigated. It is found that the internal and external heat exchange of glass has a dominant influence on the viscosity variation during the UTG forming process, which is inconsistent with the general viscosity-temperature dependence. The glass that first reaches the lower limit of forming viscosity can significantly resist the shrinking effect caused by surface tension, making the glass wider during the forming. If the original glass width remains unchanged, the glass thickness or feeding speed is reduced, wider and thinner flexible glasses can be produced.
It came as a big surprise to the electronic community once it turned out that organic materials, small molecules as well as polymers, could be used for active electronic materials. Indeed, conductivity can be given to polymers by a special type of “doping”. More important, however, is the approach to supply free charge carriers into insulators by injection. In this way, “electron conducting materials” and “hole conducting materials”, corresponding to n-type and p-type materials in inorganic electronics, can be obtained. On this basis, pn-junction devices like light-emitting diodes (OLEDs) and solar cells are being developed and have reached or approached market maturity. A very promising aspect of organic electronic materials is the one of the “printing technology” for electronic devices and circuits.
With the growing interest in suppressing greenhouse gas emissions from fossil fuel combustion, the implementation of electrical energy storage devices for efficiently utilizing renewable energy is expanding worldwide. Zn-ion batteries are attractive for energy storage because of their safety, eco-friendliness, high energy density, and low cost. However, their commercialization is hindered by the poor rechargeability of the zinc anode because of Zn dendrite growth and hydrogen evolution. Herein, we present the application of an artificial layer composed of bimodal BaTiO3 particles on Zn metal to boost the dielectric properties and thus enhance the reversibility of Zn anodes during long-term cycling. The BaTiO3 layer induces electric polarization under external electric fields, causing the Zn ions to move sequentially toward the Zn anode. Moreover, its mechanical characteristics alleviate the volume changes between the BaTiO3 layer and Zn metal. Consequently, Zn dendrite growth is effectively inhibited, and the electrochemical performance is significantly improved in Zn|Zn symmetric cells, resulting in a low overvoltage (39 mV) and stable cycling (800 h) at 1 mA cm-2. Moreover, the Zn-ion full cell using an α-MnO2 cathode exhibits consistent capacity retention up to 380 cycles. This study demonstrates a new strategy to economically and readily suppress dendrite formation by using bimodal dielectric particles as artificial layers to stabilize metal-based batteries.
Current common transparent electrodes for OLED devices are ITO (indium tin oxide) and IZO (indium zinc oxide) which are usually fabricated by sheet-to-sheet sputtering and photolithography. However, these electrodes have issues in cost and the compatibility with flexible devices. Based on such background, this chapter describes several non-ITO electrodes, which are transparent conducting polymer, silver nanowire (AgNW) and implanted metal-mesh electrodes, and roll-to-roll (R2R) fabrications of ITO and IZO.KeywordsNon-ITO electrodeConducting polymerSilver nanowireMetal meshRoll to roll
Flexible substrate is one of the important key components for flexible OLED devise. Sect. 4.1 describes requirements for flexible substrates in flexible OLED devices because flexible substrates need to possess not only flexibility but also various features such as gas barrier property, temperature stability, chemical stability, size stability, surface smoothness, etc. Later, Sects. 4.2, 4.3, 4.4, and 4.5 review three actual flexible substrates for flexible OLED devices, describing ultra-thin glass, stainless steel foil, and barrier film, accompanied by novel research and development on these technologies in our research group (Research Group for Flexible Technologies) of Yamagata University (Japan). These sections describe not only features about these flexible substrates but also applications to flexible OLED devices.KeywordsFlexible substrateUltra-thin glassStainless steel foilBarrier filmGas barrier
Gas barrier technologies are key technologies in flexile OLED devices, being essentially related with the storage reliability. Indeed, if a gas barrier technology applied to flexible OLED device is poor, the storage lifetime of the device is extremely short by penetration of gases such as H2O. In flexible OLED devices, gas barrier technologies are applied to flexible substrates and encapsulations. This chapter describes evaluation methods for gas barrier properties and various gas barrier technologies that are applied to flexible substrates and encapsulations, while the encapsulating technologies are also described in Chap. 6 in more detail. Novel gas barrier technologies developed by our research group (Research Group for Flexible Technologies) in Yamagata University (Japan) are also described.KeywordsGas barrierCa corrosion methodWVTRMulti-gas barrier layerRoll to rollALD
The numerical simulation for temperature distribution of Pt-Rh alloy bushing was carried out using a thermal-electric module in ANSYS Workbench finite element analysis software. The effects of side wall thickness, plug thickness, the angle of two side walls and electrode structure on the uniformity of temperature distribution were investigated. Meanwhile, the contrastive analysis results of bushing with and without glass melt were discussed. The simulation results show that, when the homogeneous glass melt flows through bushing, the temperature difference between the center and both ends of bushing is decreased significantly, but the temperature distribution at both ends of bushing is still affected by heating non-uniformity of bushing. Compared with side wall thickness, plug thickness and the angle of two side walls, electrode structure plays a greater role in adjusting heating uniformity of bushing.
A thermoresistive strain sensor composed of a meandering resistor and a substrate, and based on Joule heating and infrared (IR) inspection was realized by roll-to-roll (R2R) manufacturing-compatible procedures in this study. Consecutive operations of sensor patterning by inkjet printing, material stabilization by flashlight sintering, thermal generation by Joule heating, and strain evaluation by IR inspection not only successfully demonstrated an in-line strain detection method but also precisely indicated strains distributed in an arbitrary area of a transparent substrate. In this work, a first demonstration proved that the proposed thermoresistive strain sensor and its detection method support evaluations of both symmetric tension and compression to various extents, regardless of the form of power; and a second demonstration proved the effectiveness of the detection method on off-axis or asymmetric substrate deformation that could appear in a R2R system. Besides its tunable sensitivity and gauge factor for operational flexibility, the demonstrated highest sensitivity and the largest gauge factor were 34.49°C per unit strain and 1.25 in the proposed sensor, respectively.
Transparent conduction oxide (TCO) thin films are one of the key material in optoelectronic applications. These materials are usually produced by vacuum-based methods such as magnetron sputtering, both for laboratory work and for commercial purposes. Alternative methods for producing large-scale TCO films are needed. In this work, a non-vacuum coating technique for preparation of TCO thin films on large area glass substrates was presented. Tin doped indium oxide (ITO) thin films were successively coated on glass substrates by non-vacuum based roll coating method. A low electrical resistivity of ~1.3 × 10 ⁻³ Ωcm and high optical transmittance of 84% in the visible region were obtained for ITO thin film samples. Furthermore, an ITO/PEDOT PSS/P3HT:PCBM/LiF/Al structured organic photovoltaic cell was also prepared on non-vacuum roll coated ITO thin films. The device with the roll coated ITO thin film exhibits a power conversion efficiency of 1.83%, average short-circuit current density (J sc ) of 7.4 mA/cm ² , open-circuit voltage (V oc ) of 0.590 V, and fill factor (FF) of 0.42.
This review highlights the development of energy saving transparent heat regulating (THR) materials and coating for energy saving window applications. Current state-of-the-art technologies including transparent heat reflecting mirror (THM), thermo-chromic (TC), transparent solar cells (TSC), and luminescent based materials have been discussed. The coating performance primarily depends on the selection of materials, surface and structural morphology, dielectric passivation growth process and architecture of the multi-layered structure. The micro-structural properties of thin metal/metal oxide layer, and its impact on the heat reflecting coating have been studied extensively. Growth of high quality continuous thin film with fewer defects is an essential part of the infrared reflecting and/or heat regulating coatings. Henceforth, in this review, detailed analysis of growth of continuous and thin metal layer influence of the seed layer (germanium and nickel) and doping on the growth mechanism of thin metal have been discussed. Surface morphology and electronic properties of metal layer/multi-layered coatings have been studied in detail for THR applications. A wide range of metal oxides and their physical properties have been considered for use as passivation layer in the THR coating structure. Among several THR structures, the architecture comprising of dielectric-metal-dielectric (DMD) stack is known to exhibit the best heat reflecting performances. While the metal component typically comprises of silver (Ag), copper (Cu), and nitride based materials, dielectrics are made from metal oxides such as BaSnO3, TiO2, SnO2, ZnO, HfO2, Cu2O, and ZrO2. Selection of passivation layer and tuning of micro-structural properties are very crucial to enhance the visible transmittance without sacrificing infrared reflectance. Optical properties of the dielectric layer can be controlled with growth mechanism and varying content of impurity dopant. Metal doped dielectrics play a key role to enhance the visible light transmission while maintaining infra-red reflection. Through in-situ materials engineering, crystal quality of the dielectric improves which has significant role on the THR performance. Furthermore, impact of rapid thermal annealing (RTA) technique to improve crystal quality of metal oxides without oxidizing the thin metal layer is also emphasized. In the subsequent sections, synthesis of thin films by using sputtering methods, thermal evaporation and e-beam evaporation methods using inexpensive materials for large scale deployment of coating have been discussed. Neutral colored Cu-based THR smart windows is developed through tuning the structural property of TiO2. The simulated Cu-based THR window shows ≥10 °C temperature reduction when compared to conventional glass based windows. Thermal stability of copper and silver based multilayer enhanced through ultra-thin metal and dielectric interface engineering. Transparent conducting oxides (TCOs) are also an essential candidate for the wide band gap semiconductor based THR application. Recent progress in TCOs material has been briefly discussed in one of the section of the review. Hetero-epitaxy of metal oxides (ITO/ZnO) shows promising characteristics as heat insulating materials. Impact of growth process and surface morphology of the TCO have been studied to evaluate the performance of the TCO as heat insulating materials. In addition, advanced hybrid composite based heat reflector coatings for energy efficient building applications is also highlighted in the later section of the review. The industrial utilization and efficacy of heat reflector metal oxides, when incorporated into polymeric/pigments/fibers and heat reflecting durable paints as advanced hybrid composites coatings has been discussed. The progression of solution based metal nanowire (MNW) and optical properties for the heat regulating applications have been included. Dielectric/metal-NW/dielectric multilayer can be a potential candidate for the development of low cost THR film. The solution based THR methods has potential to be mass customized in economic ways and can be viable at industrial scale. Thermo-chromic materials are also considered as prospective candidate for the transparent coating applications. Recent development of VO2 bilayer, trilayer, micro-pattern and nano-plate films have been discusses to enhance the luminous transmittance and solar modulation ability. Transparent solar cells, based on the infra-red absorption through up-conversion nanoparticles are viable candidates for the development of environmental friendly heat regulating systems. Recent advancement of inorganic, polymer, perovskite, and luminescent based transparent solar cell (TSCs) with heat reflecting mirror have been evaluated for smart windows applications. For the deployment of large scale THR film, low cost materials, roll-to-roll (R2R) sputter and atmospheric pressure chemical vapour deposition (APCVD) have been assessed for the industrial applicability. The progression of THR materials with thermo-chromics, self-cleaning and TSCs materials can enhance the overall performance of the smart/transparent coatings for thermal management and heat regulating functionalities.
We report the effect of the outgassed moisture depending on main roll temperature from polymer substrate on the electrical and optical properties of indium tin oxide (ITO) films prepared with roll-to-roll sputtering for use as transparent electrodes. The ITO films deposited with a high main roll temperature of 80 °C were found to exhibit an amorphous structure and the post-annealing process did not improve their electrical conductivity or optical transmittance. After the outgassing process was performed 6 times in the roll-to-roll sputtering chamber, the optimized sheet resistance of the ITO thin film was improved from 95 Ω/□ to 78 Ω/□. We found that the structural and electrical properties of the ITO films are strongly dependent on the outgassed moisture during deposition.
To enable polymer films to be used in manufacturing flexible systems, additive fabrication methods need to be adapted to the polymer material and to the roll-to-roll mass production process. In this regard, coating processes, such as sputter deposition, thermal evaporation, vapor deposition, and so on, are discarded because of the complex patterning processes and vacuum requirements on both coating material and deposition substrate. Other additive fabrication methods, such as screen printing, inkjet printing, microcontact printing, and so on, do not require vacuum environments. Yet, pure metals cannot be added without the addition of organic binders, which affect electrical properties and the surface finish of the end product. Laser-assisted techniques, such as selective laser sintering and laser-induced forward transfer, have been achieved at polymer-compatible temperatures (150 degrees C), but involve a complex design of the transfer of laser energy. Most of the aforementioned techniques deliver a purely mechanical adhesion between polymer film and coating. Inspired by flip-chip bonding, we developed an additive no-post-clean fabrication method, denominated by flip & fuse (F & F), based solely on thermocompression to enable a diffusive assembly between a stack of pure metals and a low-transition-temperature polymer at ambient conditions with a surface finish at industrial standards. F & F can be applied to the fabrication of electrical interconnects, soldering masks, high reflective coatings, and diffraction gratings, just to name a few.
Ultra-thin 100µm thick flexible glasses with a maximum dimension of 250×300 mm2 were deposited with transparent conductive ITO and IZO using in-line magnetron sputtering under pilot scale conditions. The flexible glass was coated at room temperature with ITO and IZO and further refined by dynamic flash lamp annealing (FLA) in the millisecond range. After flashing the films, we achieved an improved transmittance and a reduced sheet resistance of the films.
Ultra-fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium-tin-oxide films on rigid and ultra-thin flexible glass and improves their conductivity and transmittance.Blitzschnelles Tempern von ITO-Dünnschichten auf ultra-dünnem GlasDie ultra-schnelle Nachbehandlung von Dünnschichten mit Behandlungszeiten von einigen Millisekunden ist bedeutend schneller und energieeffizienter als konventionelle Ofen-Temperverfahren. Bei der Behandlung mit Blitzlampen wird nur die Oberfläche erhitzt, das Substrat hingegen bleibt kalt. Auf diese Weise können Indium-Zinn-Oxid Schichten auf Glas und ultra-dünnem Glas konfektioniert und deren Leitfähigkeit und Transmission verbessert werden.
In this review, we survey several recent developments in printing of nanomaterials for contacts, transistors, sensors of various kinds, light-emitting diodes, solar cells, memory devices, and bone and organ implants. Commonly used nanomaterials are classified according to whether they are conductive, semiconducting/insulating or biological in nature. While many printing processes are covered, special attention is paid to inkjet printing and roll-to-roll printing in light of their complexity and popularity. In conclusion, we present our view of the future development of this field.
Flexible glass, such as ultra-slim Corning® Willow® Glass, produced at thicknesses lower than 200 micron has the ability to bend, while maintaining perfect barrier properties, superior surface quality, greater transparency, and high temperature processing, outperforming polymers. At the same time it has the potential to be used in roll-to-roll large area processing. These qualities make flexible glass an outstanding material for displays, touch panels, thinfilm batteries and photovoltaic (PV) products.Herausforderungen in der Herstellung von dünnen Schichten auf flexiblem GlasFlexibles Glass, wie das ultradünne Corning® Willow® Glas, hergestellt mit Dicken kleiner als 200 μm ist biegsam und besitzt im Vergleich zu Polymeren perfekte Barriereeigenschaften, eine exzellente Oberflächenqualität, ist hoch transparent und kann auch bei hohen Temperaturen verarbeitet werden. Zugleich hat flexibles Glas das Potenzial großflächig in Rolle-zu-Rolle-Verfahren verwendet zu werden. Diese Qualitäten machen flexibles Glas zu einem hervorragenden Material für Displays, Touch Panels, Dünnschicht-Batterien und Photovoltaik-Produkte.
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