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Smart Sensors, Actuators, and MEMS V

May 2011
Proceedings of SPIE - The International Society for Optical Engineering

May 2011

Authors:

Ulrich Schmid

TU Wien

J.L. Sanchez-Rojas

University of Castilla-La Mancha

Monika Leester-Schädel

Technische Universität Braunschweig

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PROCEEDINGS OF SPIE

Volume 8066

Proceedings of SPIE, 0277-786X, v. 8066

SPIE is an international society advancing an interdisciplinary approach to the science and application of light.

Smart Sensors, Actuators,

and MEMS V

Ulrich Schmid

José Luis Sánchez-Rojas

Monika Leester-Schaedel

Editors

18–20 April 2011

Prague, Czech Republic

Sponsored and Published by

SPIE

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The papers included in this volume were part of the technical conference cited on the cover and

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Contents

xiii Conference Committee

xvii Introduction

SESSION 1 HIGH TEMPERATURE SENSORS

8066 02 Wireless SAW sensor for high temperature applications: material point of view (Invited

Paper) [8066-01]

O. Elmazria, T. Aubert, CNRS, Institut Jean Lamour, Nancy Univ. (France)

8066 03 Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature

applications [8066-02]

J. Kähler, Technische Univ. Braunschweig (Germany); L. Döring, Physikalisch-Technische

Bundesanstalt (Germany); S. Merzsch, A. Stranz, A. Waag, E. Peiner, Technische Univ.

Braunschweig (Germany)

8066 04 Microthruster with integrated platinum thin film resistance temperature detector (RTD),

heater, and thermal insulation [8066-03]

N. Miyakawa, W. Legner, T. Ziemann, EADS Innovation Works (Germany); D. Telitschkin,

Astrium GmbH Space Transportation (Germany); H.-J. Fecht, Univ. Ulm (Germany);

A. Friedberger, EADS Innovation Works (Germany)

8066 05 Miniaturized piezoelectric structures for application temperatures up to 1000 °C [8066-04]

S. Schmidtchen, J. Sauerwald, D. Richter, H. Fritze, Clausthal Univ. of Technology (Germany)

8066 06 Thin film electrodes and passivation coatings for harsh environment microwave acoustic

sensors [8066-05]

S. C. Moulzolf, D. J. Frankel, G. P. Bernhardt, B. Nugent, R. J. Lad, Univ. of Maine (United

States)

SESSION 2 MATERIALS

8066 07 Smart ultrasonic sensors systems: investigations on aluminum nitride thin films for the

excitation of high frequency ultrasound [8066-06]

S. Walter, T. Herzog, H. Heuer, Fraunhofer Institute for Non-Destructive Testing (Germany);

H. Bartzsch, D. Gloess, Fraunhofer Institute for Electron Beam and Plasma Technology

(Germany)

8066 08 Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high

temperature applications [8066-07]

O. Pabst, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany) and

Friedrich Schiller Univ. Jena (Germany); M. Schiffer, TDK-EPCOS Corp. (Germany);

E. Obermeier, T. Tekin, K. D. Lang, H.-D. Ngo, Technical Univ. of Berlin (Germany)

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8066 09 Mechanical properties of 1 µm-thick metallic freestanding coatings measured by in-plane

uniaxial stress [8066-08]

T. Fourcade, NOVA MEMS (France), CNES (France), and Univ. de Toulouse (France);

C. Seguineau, NOVA MEMS (France); J. M. Desmarres, CNES (France); T. Masri, J. Alexis,

O. Dalverny, Univ. de Toulouse (France); J. Martegoutte, CNES (France), Univ. de Toulouse

(France), and INL, CNRS, INSA de Lyon (France); X. Lafontan, NOVA MEMS (France)

8066 0A Fabrication process and characterization of micromechanical sensors based on SU-8 resist

[8066-09]

A. Jordan, S. Büttgenbach, Technische Univ. Braunschweig (Germany)

8066 0B On-device extraction of thermal thin-film properties in calorimetric flow sensors [8066-10]

R. Beigelbeck, A. Talic, Institute for Integrated Sensor Systems (Austria); S. Cerimovic, Institute

for Integrated Sensor Systems (Austria) and Vienna Univ. of Technology (Austria); F. Kohl,

Institute for Integrated Sensor Systems (Austria); F. Keplinger, Vienna Univ. of Technology

(Austria)

8066 0C Thin catalyst layers based on carbon nanotubes for PEM-fuel cell applications [8066-11]

T. Bohnenberger, J. Matovic, U. Schmid, Vienna Univ. of Technology (Austria)

SESSION 3 BIO-MEMS

8066 0D Poly(dimethylsiloxane) photonic microbioreactors and multiple internal reflection systems

for real time cell screening (Invited Paper) [8066-12]

P. Ortiz, Ctr. Nacional de Microelectrónica (Spain); S. Demming, Univ. Autònoma de

Barcelona (Spain); E. Fernández-Rosas, Technische Univ. Braunschweig (Germany);

B. Ibarlucea, J. Vila-Planas, Ctr. Nacional de Microelectrónica (Spain); S. Büttgenbach, Univ.

Autònoma de Barcelona (Spain); A. Llobera, Ctr. Nacional de Microelectrónica (Spain) and

Univ. Autònoma de Barcelona (Spain)

8066 0E Mid-infrared CH

-stretch ratio sensor for suspended mammalian cells [8066-13]

S. van den Driesche, C. Haiden, Vienna Univ. of Technology (Austria); W. Witarski, Institute of

Virology (Slovakia); M. J. Vellekoop, Vienna Univ. of Technology (Austria)

8066 0F Optimization of an impedance sensor for droplet-based microfluidic systems [8066-76]

B. P. Cahill, Institute for Bioprocessing and Analytical Measurement Techniques (Germany)

8066 0G Microfluidic cartridges for DNA purification and genotyping processed in standard

laboratory instruments [8066-15]

M. Focke, Univ. of Freiburg (Germany); D. Mark, F. Stumpf, Institut für Mikrotechnik und

Informationstechnik (HSG-IMIT) (Germany); M. Müller, G. Roth, Univ. of Freiburg (Germany);

R. Zengerle, Univ. of Freiburg (Germany) and Institut für Mikrotechnik und

Informationstechnik (HSG-IMIT) (Germany); F. von Stetten, Institut für Mikrotechnik und

Informationstechnik (HSG-IMIT) (Germany)

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SESSION 4 GAS SENSORS

8066 0I New method for selectivity enhancement of SiC field effect gas sensors for quantification of

[8066-17]

C. Bur, P. Reimann, Saarland Univ. (Germany); M. Andersson, A. Lloyd Spetz, Linköping Univ.

(Sweden); A. Schütze, Saarland Univ. (Germany)

8066 0J Fabrication of a miniaturized ionization gas sensor with polyimide spacer [8066-18]

T. Walewyns, G. Scheen, E. Tooten, L. El Fissi, P. Dupuis, L. A. Francis, Univ. Catholique de

Louvain (Belgium)

8066 0K Fabry-Pérot-based thin film structure used as IR-emitter of an NDIR gas sensor: ray tracing

simulations and measurements [8066-19]

J. Mayrwöger, Johannes Kepler Univ. Linz (Austria); C. Mitterer, Univ. of Leoben (Austria);

W. Reichl, E+E Elektronik (Austria); C. Krutzler, Integrated Microsystems Austria (Austria);

B. Jakoby, Johannes Kepler Univ. Linz (Austria)

8066 0L Metallo-porphyrins as gas sensing material for colorimetric gas sensors on planar optical

waveguides [8066-20]

C. Peter, K. Schmitt, M. Schiel, Fraunhofer Institute for Physical Measurement Techniques

(Germany); J. Wöllenstein, Fraunhofer Institute for Physical Measurement Techniques

(Germany) and Univ. of Freiburg (Germany)

8066 0N Gas sensors based on MEMS structures made of ceramic ZrO

material [8066-22]

A. A. Vasiliev, Kurchatov Institute (Russian Federation); A. S. Lipilin, Institute of Electrophysics

(Russian Federation); A. M. Mozalev, Belarus State Univ. of Radioelectronics and Informatics

(Russian Federation); A. S. Lagutin, A. V. Pisliakov, N. P. Zaretskiy, N. N. Samotaev,

A. V. Sokolov, Kurchatov Institute (Russian Federation)

SESSION 5 OPTICAL DEVICES AND SYSTEMS

8066 0O Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes [8066-23]

A. Tortschanoff, A. Frank, M. Lenzhofer, Carinthian Tech Research AG (Austria);

M. Wildenhain, T. Sandner, Fraunhofer Institute for Photonic Microsystems (Germany);

A. Kenda, Carinthian Tech Research AG (Austria)

8066 0P Design of linear and nonlinear hybrid optical MEMS displacement sensors [8066-24]

W. Hortschitz, F. Kohl, H. Steiner, M. Sachse, M. Stifter, Institute for Integrated Sensor Systems

(Austria); J. Schalko, Institute for Integrated Sensor Systems (Austria) and Vienna Univ. of

Technology (Austria); A. Jachimowicz, F. Keplinger, Vienna Univ. of Technology (Austria)

8066 0Q Miniaturized multi channel infrared optical gas sensor system [8066-25]

J. Wöllenstein, Fraunhofer Institute for Physical Measurement Techniques (Germany) and

Univ. of Freiburg (Germany); A. Eberhardt, S. Rademacher, K. Schmitt, Fraunhofer Institute for

Physical Measurement Techniques (Germany)

8066 0R A polyvinylidene fluoride (PVDF) based bimorph actuator for high speed laser beam

manipulation [8066-26]

R. Pérez, M. Král, H. Bleuler, R. Clavel, Ecole Polytechnique Fédérale de Lausanne

(Switzerland)

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8066 0S A systems engineering approach to structural health monitoring of composites using

embedded optical fibre Bragg sensors for aeronautical applications [8066-27]

A. J. van Wyk, C. V. Roberson, Univ. of Johannesburg (South Africa)

8066 0T Impact damage detection of composite materials by fiber Bragg gratings [8066-28]

Z. Djinovic, Integrated Microsystems Austria (Austria); M. Scheerer, Aerospace & Advanced

Composites (Austria); M. Tomic, Univ. of Belgrade (Serbia)

SESSION 6 HIGH-FREQUENCY MEMS

8066 0U Electro-acoustic sensors based on AlN thin film: possibilities and limitations (Invited Paper)

[8066-29]

G. Wingqvist, Linköping Univ. (Sweden)

8066 0V Development of capacitive RF MEMS switches with TaN and Ta

thin films [8066-30]

A. Persano, F. Quaranta, A. Cola, G. De Angelis, R. Marcelli, P. Siciliano, IMM-CNR, Institute

for Microelectronics and Microsystems (Italy)

8066 0W Effect of electro-thermo-mechanical coupling on the short-circuit in RF microswitch

operation [8066-31]

E. Brusa, Politecnico di Torino (Italy); M. G. Munteanu, Univ. of Udine (Italy)

8066 0X A reconfigurable impedance matching network entirely manufactured in RF-MEMS

technology [8066-32]

J. Iannacci, Fondazione Bruno Kessler (Italy); D. Masotti, Univ. of Bologna (Italy); T. Kuenzig,

M. Niessner, Munich Univ. of Technology (Germany)

8066 0Y Mechanical contact in system-level models of electrostatically actuated RF-MEMS

switches: experimental analysis and modeling [8066-33]

M. Niessner, Munich Univ. of Technology (Germany); J. Iannacci, Fondazione Bruno Kessler

(Italy); G. Schrag, Munich Univ. of Technology (Germany)

SESSION 7 MODELLING

8066 0Z Modeling of gold microbeams for characterizing MEMS packages [8066-34]

A. Faes, A. Repchankova, F. Solazzi, B. Margesin, Fondazione Bruno Kessler (Italy)

8066 10 Hardware implementation of an electrostatic MEMS-actuator linearization [8066-35]

F. Mair, M. Egretzberger, A. Kugi, Vienna Univ. of Technology (Austria)

8066 11 Vibration energy harvester optimization using artificial intelligence [8066-63]

Z. Hadas, C. Ondrusek, J. Kurfurst, V. Singule, Brno Univ. of Technology (Czech Republic)

8066 12 Modeling and analysis of a micromachined piezoelectric energy harvester stimulated by

ambient random vibrations [8066-38]

A. B. Alamin Dow, H. A. Al-Rubaye, D. Koo, Univ. of Toronto (Canada); M. Schneider,

A. Bittner, U. Schmid, Vienna Univ. of Technology (Austria); N. P. Kherani, Univ. of Toronto

(Canada)

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SESSION 8 ENERGY SCAVENGERS

8066 14 Modeling and characterization of a circular-shaped energy scavenger in MEMS surface

micromachining technology [8066-40]

F. Solazzi, J. Iannacci, A. Faes, F. Giacomozzi, B. Margesin, Fondazione Bruno Kessler (Italy);

A. Tazzoli, Univ. of Padova (Italy), IUNET (Italy), and Univ. of Pennsylvania (United States);

G. Meneghesso, Univ. of Padova (Italy) and IUNET (Italy)

8066 15 Issues in validation of performances of piezoelectric vibration-based energy harvesters

[8066-41]

S. Zelenika, D. Blažević, Univ. of Rijeka (Croatia)

8066 16 Plucked piezoelectric bimorphs for energy harvesting applications [8066-42]

M. Pozzi, M. Zhu, Cranfield Univ. (United Kingdom)

8066 17 A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion

[8066-43]

I. Kuehne, M. Schreiter, Siemens AG (Germany); J. Seidel, Munich Univ. of Applied Sciences

(Germany); H. Seidel, Saarland Univ. (Germany); A. Frey, Siemens AG (Germany)

8066 18 Piezoelectric power generation for sensor applications: design of a battery-less wireless tire

pressure sensor [8066-44]

N. Makki, R. Pop-Iliev, Univ. of Ontario Institute of Technology (Canada)

8066 19 Smart energy management and low-power design of sensor and actuator nodes on

algorithmic level for self-powered sensorial materials and robotics [8066-45]

S. Bosse, T. Behrmann, Univ. of Bremen (Germany)

POSTER SESSION

8066 1A Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody

interactions [8066-14]

M. J. Oliver, J. Hernando-García, Univ. de Castilla-La Mancha (Spain); A. Ababneh,

Yarmouk Univ. (Jordan); H. Seidel, Saarland Univ. (Germany); U. Schmid, Technische Univ.

Wien (Austria); J. Olivares, E. Iborra, Univ. Politécnica de Madrid (Spain); P. Pobedinskas,

K. Haenen, Univ. Hasselt (Belgium); J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)

8066 1B Energy harvesting circuit for sensor system power supply [8066-46]

P. Fiala, P. Drexler, Brno Univ. of Technology (Czech Republic)

8066 1D Gold-based thin multilayers for ohmic contacts in RF-MEMS switches [8066-48]

V. Mulloni, J. Iannacci, R. Bartali, V. Micheli, S. Colpo, N. Laidani, B. Margesin, Fondazione

Bruno Kessler (Italy)

8066 1E AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant

excitation [8066-50]

S. Hampl, Ilmenau Univ. of Technology (Germany); V. Cimalla, Fraunhofer Institute for

Applied Solid State Physics (Germany); T. Polster, M. Hoffmann, Ilmenau Univ. of Technology

(Germany)

vii

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8066 1F Airborne particle generation for optical tweezers by thermo-mechanical membrane

actuators [8066-51]

T. Polster, S. Leopold, M. Hoffmann, Ilmenau Univ. of Technology (Germany)

8066 1G Characterization of the first in-plane mode of AlN-actuated microcantilevers [8066-52]

V. Ruiz, J. Hernando-García, Univ. de Castilla-La Mancha (Spain); A. Ababneh, Yarmouk

Univ. (Jordan); H. Seidel, Univ. des Saarlandes (Germany); U. Schmid, Vienna Univ. of

Technology (Austria); J. K. Gimzewski, Univ. of California, Los Angeles (United States);

J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)

8066 1H Growth and characterization of uniform ZnO films as piezoelectric materials using a

hydrothermal growth technique [8066-53]

E. Makarona, C. Fritz, G. Niarchos, T. Speliotis, National Ctr. for Scientific Research

Demokritos (Greece); A. Arapoyanni, National and Kapodistrian Univ. of Athens (Greece);

C. Tsamis, National Ctr. for Scientific Research Demokritos (Greece)

8066 1I Piezoelectric AlN-actuated micro-tuning forks for sensing applications [8066-54]

M. Gil, T. Manzaneque, J. Hernando-García, Univ. de Castilla-La Mancha (Spain);

A. Ababneh, Yarmouk Univ. (Jordan); H. Seidel, Saarland Univ. (Germany);

J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)

8066 1J Improved load-deflection method for the extraction of elastomechanical properties of

circularly shaped thin-film diaphragms [8066-55]

J. Schalko, R. Beigelbeck, M. Stifter, Institute for Integrated Sensor Systems (Austria);

M. Schneider, A. Bittner, U. Schmid, Vienna Univ. of Technology (Austria)

8066 1K The impact of substrate properties on the electromigration resistance of sputter-deposited

Cu thin films [8066-56]

A. Bittner, N. Pagel, H. Seidel, Saarland Univ. (Germany); U. Schmid, Vienna Univ. of

Technology (Austria)

8066 1L Microfabricated self-resonant structure as a passive wireless chemical sensor [8066-57]

S. Zhang, P. Pasupathy, D. P. Neikirk, The Univ. of Texas at Austin (United States)

8066 1M In incubator live cell imaging platform [8066-58]

N. Moscelli, Vienna Univ. of Technology (Austria); W. Witarski, Institute of Virology (Slovakia);

S. van den Driesche, M. J. Vellekoop, Vienna Univ. of Technology (Austria)

8066 1N Analytical investigation of the pull-in voltage in capacitive mechanical sensors [8066-59]

J. Lardiès, M. Berthillier, F. M. L. Bellaredj, Univ. of Franche-Comté (France)

8066 1O Biomimetic MEMS to assist, enhance, and expand human sensory perceptions: a survey on

state-of-the-art developments [8066-60]

T. Makarczuk, Vienna Univ. of Technology (Austria); T. R. Matin, Univ. Kebangsaan Malaysia

(Malaysia); S. B. Karman, Univ. Kebangsaan Malaysia (Malaysia) and Univ. of Malaya

(Malaysia); S. Z. M. Diah, B. Davaji, Univ. Kebangsaan Malaysia (Malaysia); M. O. Macqueen,

Aramis Technologies (Malaysia); J. Mueller, trustroom (Austria); U. Schmid, Vienna Univ. of

Technology (Austria); I. C. Gebeshuber, Vienna Univ. of Technology (Austria) and Univ. of

Kebangsaan Malaya (Malaysia)

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8066 1P System modeling of a piezoelectric energy harvesting module for environments with high

dynamic forces [8066-61]

A. Frey, Siemens AG (Germany); J. Seidel, Munich Univ. of Applied Sciences (Germany);

M. Schreiter, I. Kuehne, Siemens AG (Germany)

8066 1Q 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on

vertical sidewalls [8066-62]

A. Nimo, U. Mescheder, B. Müller, A. Saad Abou Elkeir, Hochschule Furtwangen Univ.

(Germany)

8066 1R THz detection by modified thermopile [8066-64]

B. Szentpáli, Research Institute for Technical Physics and Materials Science (Hungary);

G. Matyi, EnerSys Advanced Systems (Hungary); P. Fürjes, E. László, G. Battistig, I. Bársony,

Research Institute for Technical Physics and Materials Science (Hungary); G. Károlyi,

T. Berceli, Budapest Univ. of Technology and Economics (Hungary)

8066 1S Microfabricated ultrashort cantilever probes for high speed AFM [8066-65]

C. Richter, P. Weinzierl, O. Krause, W. Engl, Nanoworld Services GmbH (Germany);

C. Penzkofer, B. Irmer, nanotools GmbH (Germany); T. Sulzbach, Nanoworld Services GmbH

(Germany)

8066 1T Tactile refreshable screen based on magneto-rheological fluids for map exploration and

navigation tasks [8066-66]

C. Bolzmacher, G. Changeon, V. Plaud, S. Roselier, J. Lozada, M. Hafez, CEA LIST (France)

8066 1U Robust pressure sensor for measurements in boundary layers of liquid fluids with medium

total pressures [8066-67]

T. Beutel, N. Ferreira, M. Leester-Schädel, S. Büttgenbach, Technische Univ. Braunschweig

(Germany)

8066 1V Non-electrical-power temperature-time integrating sensor for RFID based on micro fluidics

[8066-68]

M. Schneider, M. Hoffmann, Ilmenau Univ. of Technology (Germany)

8066 1W Investigation on micromachining technologies for the realization of LTCC devices and

systems [8066-69]

T. Haas, C. Zeilmann, Micro Systems Engineering GmbH (Germany); A. Bittner, U. Schmid,

Vienna Univ. of Technology (Austria)

8066 1X IR thermocycler for centrifugal microfluidic platform with direct on-disk wireless temperature

measurement system [8066-70]

J. Burger, A. Gross, Univ. of Freiburg (Germany); D. Mark, HSG-IMIT (Germany); G. Roth, Univ.

of Freiburg (Germany); F. von Stetten, R. Zengerle, Univ. of Freiburg (Germany) and HSG-IMIT

(Germany)

8066 1Y Optical fiber waveguide sensor for the colorimetric detection of ammonia [8066-72]

K. Schmitt, J. Rist, C. Peter, Fraunhofer Institute for Physical Measurement Techniques

(Germany); J. Wöllenstein, Fraunhofer Institute for Physical Measurement Techniques

(Germany) and Univ. of Freiburg (Germany)

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Introduction

The Smart Sensors, Actuators, and MEMS conference took place in Prague,

Czech Republic 18–20 April 2011. Almost 100 contributions from Europe,

America, and Asia were accepted and grouped into 9 sessions including a

poster session. The interdisciplinary spirit of the event was displayed by a wide

range of topics based on the latest results achieved in the research and

development areas of precision engineering and MEMS. Therefore sessions

focused on material and fabrication aspects, on micromachined sensors and

actuators for the determination of biological, physical, and chemical

quantities, as well as on reliability issues. Moreover, optical and RF MEMS were

presented and more application-oriented topics such as energy scavengers,

microfluidic systems, and low power management systems were discussed.

This broad range of topics, plus researchers coming from academia and

industry with their specific backgrounds, created a very stimulating

atmosphere for the exchange of new ideas.

Besides the high quality of the oral and poster presentations, I would like to

highlight the three invited talks: Omar Elmazria from CNRS-Nancy University,

France, on “Materials and device-related aspects for the high temperature

operation of SAW sensor elements” (806602); by Andreu Llobera, Centro

Nacional de Microelectrónica, Spain, on photonic microreactors and their

application in real-time cell screening (80660D); and last, but not least, by

Gunilla Wingqvist, Linköping University, Sweden, on piezoelectric sensor

elements operated in liquid media and excited by pure or modified

aluminium nitride thin films (80660U).

I would like to thank all participants for their individual contributions which

made the conference a successful event in the international conference

calendar.

Special thanks go to José Feliciano López, Gerhard Krötz, and Thomas Becker

for organising the symposium, the SPIE staff, and to my cochairs José Luis

Sánchez de Rojas Aldavero (Univ. Castilla-La Mancha, Ciudad Real, Spain)

and Monika Leester-Schaedel (Technische Universität Braunschweig,

Germany). Finally I would like to thank the programme committee for doing

the reviews and acting partly as session chairs.

Ulrich Schmid

José Luis Sánchez-Rojas

Monika Leester-Schaedel

xvii

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8066 29 A study on tunable resonators for rheological measurements [8066-85]

M. Heinisch, Johannes Kepler Univ. Linz (Austria); E. K. Reichel, Katholieke Univ. Leuven

(Belgium); B. Jakoby, Johannes Kepler Univ. Linz (Austria)

8066 2A Binary zero-power sensors: an alternative solution for power-free energy-autonomous

sensor systems [8066-86]

T. Frank, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH (Germany);

G. Gerlach, Technische Univ. Dresden (Germany); A. Steinke, CiS Forschungsinstitut für

Mikrosensorik und Photovoltaik GmbH (Germany)

8066 2B Fabrication technologies for the electrode structure of a dielectric elastomer bending tube

actuator [8066-87]

F. Wehrheim, Richard Wolf GmbH (Germany); H. F. Schlaak, Technische Univ. Darmstadt

(Germany)

8066 2C Evaluation of sensor arrays for engine oils using artificial oil alteration [8066-88]

S. Sen, AC

T Research GmbH (Austria) and Vienna Univ. of Technology (Austria);

C. Schneidhofer, N. Dörr, AC

T Research GmbH (Austria); M. J. Vellekoop, Vienna Univ. of

Technology (Austria)

8066 2E Viscosity and density measurements of glycerol-water mixtures utilizing a novel resonant

MEMS sensor [8066-90]

S. Cerimovic, Vienna Univ. of Technology (Austria); R. Beigelbeck, Institute for Integrated

Sensor Systems (Austria); H. Antlinger, Johannes Kepler Univ. Linz (Austria); J. Schalko, Vienna

Univ. of Technology (Austria) and Institute for Integrated Sensor Systems (Austria); B. Jakoby,

Johannes Kepler Univ. Linz (Austria); F. Keplinger, Vienna Univ. of Technology (Austria)

8066 2F Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS

composite [8066-91]

C. Y. Kim, Pohang Univ. of Science and Technology (Korea, Republic of); H. S. Lee, Samsung

Electronics Co., Ltd. (Korea, Republic of); Y. H. Cho, C. Joh, Agency for Defense

Development (Korea, Republic of); P. Choi, Pohang Univ. of Science and Technology

(Korea, Republic of) and Kyungpook National Univ. (Korea, Republic of); S. J. Park, Pohang

Univ. of Science and Technology (Korea, Republic of)

8066 2G Comparison among performance of strain sensors based on different semiconductor thin

films [8066-92]

M. A. Fraga, Instituto de Estudos Avançados (Brazil) and Instituto Tecnológico de

Aeronáutica (Brazil); H. Furlan, Faculdade de Tecnologia de São Paulo (Brazil); R. S. Pessoa,

Instituto Tecnológico de Aeronáutica (Brazil)

8066 2H Polyimide/PDMS flexible thermoelectric generator for ambient assisted living applications

[8066-93]

L. Francioso, C. De Pascali, I. Farella, C. Martucci, P. Cretì, P. Siciliano, CNR-IMM (Italy)

8066 2I Nanostructured silicon for thermoelectric [8066-94]

A. Stranz, J. Kähler, A. Waag, E. Peiner, Technische Univ. Braunschweig (Germany)

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8066 2J Variable isotropy Deep RIE process for through wafer via holes manufacturing [8066-95]

D. Vasilache, FBK-irst (Italy) and National Research and Development Institute in

Microtechnology (Romania); S. Colpo, F. Giacomozzi, S. Ronchin, A. Q. A. Qureshi,

B. Margesin, FBK-irst (Italy)

8066 2K Development of a new technological MEMS process for AC voltage standards [8066-96]

F. Blard, Lab. National de Métrologie et d'Essais (France), Lab. d'Analyse et d'Architecture

des Systèmes, CNRS (France), and Univ. of Toulouse (France); A. Bounouh, D. Bélières, Lab.

National de Métrologie et d'Essais (France); S. Charlot, D. Bourrier, H. Camon, Lab. d'Analyse

et d'Architecture des Systèmes, CNRS (France) and Univ. of Toulouse (France)

8066 2L Hysteresis correction of tactile sensor response with a generalized Prandtl-Ishlinskii model

[8066-97]

J. A. Sánchez-Durán, Ó. Oballe-Peinado, J. Castellanos-Ramos, F. Vidal-Verdú, Univ. of

Málaga (Spain)

Author Index

xii

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Conference Committee

Symposium Chair

Thomas Becker, EADS Innovation Works (Germany)

Symposium Cochairs

José Feliciano López, Universidad de Las Palmas de Gran Canaria

(Spain)

Gerhard Krötz, Hochschule Kempten (Germany)

Symposium Local Chair

Cestmír Ondrůšek, Technical University of Brno (Czech Republic)

Conference Chair

Ulrich Schmid, Technische Universität Wien (Austria)

Conference Cochairs

José Luis Sánchez-Rojas, Universidad de Castilla-La Mancha (Spain)

Monika Leester-Schaedel, Technische Universität Braunschweig

(Germany)

Programme Committee

Abdallah Ababneh, Yarmouk University (Jordan)

Eduard Arzt, Leibniz-Institut für Neue Materialien GmbH (Germany)

Fred Barlow, University of Idaho (United States)

Joan Bausells, Centro Nacional de Microelectrónica (Spain)

Christian H. Bolzmacher, Commissariat à l'Energie Atomique (France)

Carles Cané, Centro Nacional de Microelectrónica (Spain)

Viorel Dragoi, EV Group (Austria)

Guido Faglia, Università degli Studi di Brescia (Italy)

Georg E. Fantner, École Polytechnique Fédérale de Lausanne

(Switzerland)

Carles Ferrer Ramis, Universitat Autònoma de Barcelona (Spain)

Pavel J. Fiala, Brno University of Technology (Czech Republic)

Maximilian Fleischer, Siemens AG (Germany)

Alois Friedberger, EADS Deutschland GmbH (Germany)

Friedrich Franek, AC

T Research GmbH (Austria)

Sören Fricke, Robert Bosch AG (Switzerland)

xiii

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Katia M. Grenier, Laboratoire d’Analyse et d’Architecture des

Systèmes, CNRS (France)

Moustapha Hafez, Commissariat à l'Énergie Atomique (France)

Arno C. Hoogerwerf, Centre Suisse d'Electronique et de

Microtechnique SA (Switzerland)

Jacopo Iannacci, Fondazione Bruno Kessler (Italy)

Enrique Iborra, Universidad Politécnica de Madrid (Spain)

Bernhard Jakoby, Johannes Kepler Universität Linz (Austria)

Konrad Kapser, Infineon Technologies AG (Germany)

Tom Kazmierski, University of Southampton (United Kingdom)

Roy Knechtel, X-FAB Semiconductor Foundries AG (Germany)

Andreas Kugi, Technische Universität Wien (Austria)

Robert J. Lad, University of Maine (United States)

Jeong-Bong Lee, The University of Texas at Dallas (United States)

Dean P. Neikirk, The University of Texas at Austin (United States)

Sergio P. Pacheco, Freescale Semiconductor, Inc. (United States)

Erwin Peiner, Technische Universität Braunschweig (Germany)

Gabriele Schrag, Technische Universität München (Germany)

Andreas Schütze, Universität des Saarlandes (Germany)

Pietro Siciliano, Istituto per la Microelettronica e Microsistemi, CNR

(Italy)

Anita Lloyd Spetz, Linköping Universitet (Sweden)

Christos Tsamis, National Centre for Scientific Research Demokritos

(Greece)

Michael J. Vellekoop, Technische Universität Wien (Austria)

Jürgen Wöllenstein, Fraunhofer-Institut für Physikalische Messtechnik

(Germany)

Roland Zengerle, Albert-Ludwigs-Universität Freiburg (Germany)

Session Chairs

1 High Temperature Sensors

Ulrich Schmid, Technische Universität Wien (Austria)

Pietro Siciliano, Istituto per la Microelettronica e Microsistemi, CNR

(Italy)

2 Materials

José Luis Sánchez-Rojas, Universidad de Castilla-La Mancha (Spain)

Achim Bittner, Technische Universität Wien (Austria)

3 Bio-MEMS

Jeong-Bong Lee, The University of Texas at Dallas (United States)

Dean P. Neikirk, The University of Texas at Austin (United States)

4 Gas Sensors

Alois Friedberger, EADS Deutschland GmbH (Germany)

Robert J. Lad, University of Maine (United States)

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5 Optical Devices and Systems

Pavel J. Fiala, Brno University of Technology (Czech Republic)

Jacopo Iannacci, Fondazione Bruno Kessler (Italy)

6 High-Frequency MEMS

Monika Leester-Schaedel, Technische Universität Braunschweig

(Germany)

Bernhard Jakoby, Johannes Kepler Universität Linz (Austria)

7 Modelling

Gabriele Schrag, Technische Universität München (Germany)

Jürgen Wöllenstein, Fraunhofer-Institut für Physikalische Messtechnik

(Germany)

8 Energy Scavengers