The work carried out in this thesis was part of three National Institute of Nuclear Physics (INFN) projects called: Modeling and Verification for Ion beam Treatment planning (MoVe-IT), Superconducting Ion Gantry (SIG), and Flash Radiotherapy with hIgh Dose-rate particle beAms (FRIDA). Within the MoVe-IT project, two prototypes of silicon sensors were developed. The first one is a proton counter to be used as an online monitor of the fluence rate of clinical proton beams (Vignati et al., 2017; Sacchi et al., 2020; Fausti et al., 2021) and the second is a device able to measure the beam energy using Time-of-Flight technique (Marti Villarreal et al., 2021; Vignati et al., 2020a). The sensors used in these two prototypes represent an evolution of the n-on-p planar silicon sensor where a thin (1 micrometer) p+ gain layer is implanted under the n++ cathode. As a result of the doping profile, characterized by a large doping concentration at the n++/p+ junction, a local increase of the electric field up to 300 kV/cm in this region creates a controlled moderate electron/hole avalanche multiplication without a complete breakdown. This effect leads to a proportional signal enhancement with a noise level similar to that of a traditional silicon sensor of the same geometry. In 2020, we designed several sensors with diverse characteristics tailored to the needs of the two devices developed. The production is called MoVe-IT-2020. They are segmented into strips to reduce the particle rate per channel and minimize the signal pile-up. Chapter 2 describes the laboratory characterization of all the sensors used in this thesis. Additionally, the signals obtained in a preliminary test with proton beams at the National Centre for
Oncological Hadrontherapy (CNAO, Pavia, Italy) are presented, using a sensor with a large area from the MoVe-IT-2020 production. In chapter 3, the results of the telescope system proposed by the University of Turin and the National Institute of Nuclear Physics (Turin Section) in two Italian particle therapy centers are presented and discussed. Developments similar to the MoVe-IT project for clinical carbon ion beams are in progress within the SIG project. Chapter 4 reports the measurements
of individual carbon ions in the CNAO clinical beam with 60 μm thick silicon sensors.
Within the FRIDA project, the University and INFN of Turin are studying thin silicon sensors, recently designed and produced for single particle tracking in proton therapy, for electron beam monitoring in high dose-rate regimes. Chapter 5 describes the results of testing thin silicon sensors at Ultra-High dose rate (UHDR). In addition, the partial results of the first attempt to upgrade the LINAC (Elekta SL 25 MV) installed in the Physics Department of the University of Turin, dedicated entirely to research, is presented, which will allow in the near future experiments to study the FLASH effect. During my PhD, I wrote the following papers: Marti Villarreal et al., 2021; Villarreal et al., 2023; Villarreal et al., 2022, which reported the same results
presented in this thesis. The content of chapter 2 has been described in Villarreal et al., 2023; Villarreal et al., 2022 and a summary of the content of chapter 3 has been published in Marti Villarreal et al., 2021. Additionally, my work along my PhD contributed also to the following papers: Vignati et al., 2020c; Vignati et al., 2020a; Vignati et al., 2022b; Croci et al., 2023; Mohammadian-Behbahani et al., 2022; Giordanengo et al., 2022; Pennazio et al., 2022; Vignati et al., 2022a; Vignati et al., 2020b.