A Fault-tolerant Algorithm with Cycled Resetting Discount Factor in Semiconductor Manufacturing Industry

Abstract

The threaded-EWMA run-to-run control is an important stable control scheme. However, the process outputs will deviate largely in the first few runs of each cycle if the disturbance follows an IMA(1,1) series with deterministic linear drift/fault and the thread has a long break length. In this paper, we analyzed the output of the threaded-EWMA run-to-run control. Based on the analysis of system performance, cycled resetting (CR) algorithm for discount factor is proposed to reduce the large deviations as well as a step fault to achieve the minimum asymptotic variance control. By analysis the influence of the fault, discount factor resetting and fault tolerant (RFT) approach is presented. Simulation study showed that the proposed approach is effective.

Full text

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2009 IEEE International Conference on Control and Automation
Christchurch, New Zealand, December 9-11, 2009 WeMT6.6
978-1-4244-4707-7/09/$25.00 ©2009 IEEE 483

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)LJLW¶VFOHDU WKDWWKHRXWSXWRIERWKWKUHDGVRVFLOODWHDWWKH
EHJLQQLQJUXQVRIHDFKF\FOHEXWWKHWKUHDGVZLWK&5GLVFRXQW
IDFWRUV SHUIRUP EHWWHU WKDQ WKH WKUHDGV ZLWK IL[HG GLVFRXQW
IDFWRUV'HWDLOFRPSDULVRQVRIWKHSHUIRUPDQFHVDUHVKRZQLQ
7DEOH
0100 200 300 400 500 600 700 800
−10
−5
0
5
10
15
20
25
Run
Output of product1 and product2 in cycle 0−3
product1 with fixed λ
1
product1 with CR λ
1
product2 with fixed λ
2
product2 with CR λ
2

)LJ2XWSXWRISURGXFWDQGLQF\FOHZLWKIL[HGDQG&5GLVFRXQW
IDFWRUIRUWKHSURFHVVZLWKRVFLOODWLRQ
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7$%/(,
3(5)250$1&()25352'8&7$1',1&<&/( )257+(352&(66:,7+
26&,//$7,21
F\FOH    
IL[HG06(    
&506(    
IL[HG06(    
&506(    
IL[HGYDULDQFH    
&5YDULDQFH    
IL[HGYDULDQFH    
&5YDULDQFH    
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DUHLOOXVWUDWHGLQ)LJ)LJDVKRZVWKHSURFHVVGLVWXUEDQFH
ZKLFK IROORZV DQ ,0$ VHULHV ZLWK GHWHUPLQLVWLF OLQHDU
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PDJQLWXGH RI  7KH RXWSXWV RI RYHUGDPSHG V\VWHP ZLWK
IL[HG DQG 5)7 GLVFRXQW IDFWRU DSSURDFKHV DUH JLYHQ LQ
)LJE )LJF LV WKH VLPXODWHG RXWSXW RI XQGHUGDPSHG
V\VWHPZLWKIL[HGDQG5)7GLVFRXQWIDFWRU)RUERWKILJXUHVLW
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WKUHDGLVIL[HGZKLOHIRUWKHWKUHDGZLWK5)7GLVFRXQWIDFWRU
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487



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0100 200 300 400 500 600
0
10
20
30
40
50
60
70
80
90
Run
(a)
IMA(1,1) with drift and step fault

0100 200 300 400 500 600
−5
0
5
10
15
20
25
30
35
40
45
Run
(b)
Output of product1 and product2 in cycle 0−2
product1 with fixed λ
1
product1 with RFT λ
1
product2 with fixed λ
2
product2 with RFT λ
2

0100 200 300 400 500 600
−30
−20
−10
0
10
20
30
40
50
Run
(c)
Output of product1 and product2 in cycle 0−3
product1 with fixed λ
1
product1 with RFT λ
1
product2 with fixed λ
2
product2 with RFT λ
2

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IDFWRUZKHQDVWHSIDXOWKDSSHQVDWWKHWKUXQ
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WKUHDGHG(:0$FRQWUROOHUWKHSURFHVVRXWSXWVDWHDFKUXQ
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488