The structural phases and the growth of self-assembled monolayers (SAMs) are reviewed from a surface science perspective, with emphasis on simple model systems. The concept of self-assembly is explained, and dierent self-assembling materials are brie¯y discussed. A summary of the techniques used for the study of SAMs is given. Dierent general scenarios for structures obtained by self-assembly are described. Thiols on Au(1 1 1) surfaces are used as an archetypal system to investigate in detail the structural phase diagram as a function of tem-perature and coverage, the speci®c structural features on a molecular level, and the eect of changes of the molecular backbone and the end group on the structure of the SAM. Tem-perature eects including phase transitions are discussed. Concepts for the preparation of more complex structures such as multi-component SAMs, laterally structured SAMs, and heterostructures, also with inorganic materials, are outlined. The growth and ways to control it are discussed in detail. Solution and gas phase deposition and the impact of various pa-rameters such as temperature, concentration (in solution) or partial pressure (in the gas phase) are described. The kinetics and the energetics of self-assembly are analyzed. Several more complex issues of the ®lm formation process including non-equilibrium issues are discussed. Some general conclusions are drawn concerning the impact of various molecular features on the growth behavior and concerning the relationship between growth and structural phase diagram. Finally, the potential of self-assembly as a route for the preparation of monolayers with pre-designed properties and SAMs as building blocks in heterostructures as well as ap-plication strategies are discussed.