Nano energetic materials offer improved performance in energy release, ignition, and mechanical properties compared to their
bulk or micro counterparts. In this study, the authors propose an approach to synthesize an Al/NiO based nano energetic material
which is fully compatible with a microsystem. A two-dimensional NiO nano honeycomb is first realized by thermal oxidation
of a Ni thin film deposited onto a silicon substrate by thermal evaporation. Then the NiO nano honeycomb is integrated with
an Al that is deposited by thermal evaporation to realize an Al/NiO based nano energetic material. This approach has several
advantages over previous investigations, such as lower ignition temperature, enhanced interfacial contact area, reduced impurities
and Al oxidation, tailored dimensions, and easier integration into a microsystem to realize functional devices. The synthesized
Al/NiO based nano energetic material is characterized by scanning electron microscopy, X-ray diffraction, differential thermal
analysis, and differential scanning calorimetry.