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Publications (118)
The lack of service lifetime of bearings has become a bottleneck that restricts the performance of aero engines. How to solve or improve this problem is the focus of most surface engineering researchers at present. In this study, plasma immersion ion implantation was conducted; in order to enhance the ion implantation efficiency and improve the wea...
This research presents a comprehensive analysis of deep neural network models (DNNs) for the precise prediction of Vickers hardness (HV) in nitrided and carburized M50NiL steel samples, with hardness values spanning from 400 to 1000 HV. By conducting rigorous experimentation and obtaining corresponding nanoindentation data, we evaluated the perform...
In this study, the effect of microstructure under various dose rates of plasma immersion ion implantation on 8Cr4Mo4V steel has been investigated for crystallite size, lattice strain and dislocation density. The phase composition and structure parameters including crystallite size, dislocation density and lattice strain have been investigated by X-...
Nitrogen ion implantation with different dose rates was conducted on 8Cr4Mo4V-bearing steel in the present study. The effects of high-dose-rate nitrogen plasma immersion ion implantation (N-PIII) on the microstructure and nanohardness of the 8Cr4Mo4V-bearing steel were studied. The surface morphology, phase microstructure, lattice parameters and na...
MAX phase family has been extended by the addition of late transition metals at the A-site with the expectation of diverse functional properties. Here, we present our systematic density functional investigation on the thermodynamic and phonon stabilities, elastic properties, including elastic constants, elastic moduli and elastic anisotropy of newl...
MAX phase family has been extended by the addition of late transition metals at the A-site with the expectation of diverse functional properties, such as magnetism and catalysis. Here, we present our systematic density functional investigation on the phase stability and physical properties of newly synthesized Ti2ZnX (X = C, N) phasesin comparison...
Magnetic MAX phases including their surfaces exhibit promising functional properties for magneto-electronic devices and self-monitoring smart coatings. By employing an integrated ab-initio approach, here we investigate a new member of the MAX phase, Mn2AuN. This compound satisfies the chemical, mechanical and dynamical stability criteria, leading t...
Using first-principles density functional theory (DFT), the ground state physical properties of the newly synthesized noble-metal-containing Ti3AuC2 MAX phase have been investigated. The effect of transition-element Ti replacement (V and Cr) on physical properties, including structural, elastic, electronic, thermal, and optical are presented. The o...
Here, we report MAX phases' surface properties, which are essential for thin-film technology due to their excellent resistance to high-temperature oxidation, corrosion, and wear. The surface stability, electronic, and optical properties of 0001-surfaces in M2AC (M = Zr, Hf, Cr; A = Al, Ga) are investigated and compared with their bulk counterparts....
MAX phase borides are the new additions to the MAX phases, which refreshes the research interests among the scientific community due to their enhanced thermo-mechanical properties. We report a detailed study of the recently predicted thermodynamically stable Zr3CdB4 MAX phase boride. The electronic structure, mechanical and dynamical stability, ela...
In this paper, the effects of temperature and pH value of the conversion solution on the morphology and corrosion resistance of the titanium-containing conversion coating prepared on AZ91 magnesium alloy were studied. The morphology and composition of the coatings were studied by a scanning electron microscope, an energy dispersive spectrometer and...
The high-power impulse magnetron sputtering (HiPIMS) technique is widely used owing to the high degree of ionization and the ability to synthesize high-quality coatings with a dense structure and smooth morphology. However, limited efforts have been made in the deposition of MAX phase coatings through HiPIMS compared with direct current magnetron s...
The electronic structure, structural stability, mechanical, phonon, and optical properties of Zr2GaC and Hf2GaC MAX phases have been investigated under high pressure using first-principles calculations.
Formation enthalpy of competing phases, elastic constants, and phonon calculations revealed that both compounds are thermodynamically, mechanically...
In this paper, a two-dimensional semi-analytical method is developed for the mechanical behavior analysis of multilayered solids subjected to surface contact loading, which is indispensable for realizing an optimized tribological performance from the mechanical behavior point of view. Firstly, the explicit analytical frequency response functions of...
Cr coatings are deposited on M50 steel by electrospark deposition with different parameters (100 V-60 μF, 100 V-90 μF, 100 V-120 μF, 150 V-60 μF, 150 V-90 μF and 150 V-120 μF). Influences of the depositing parameters on the microstructure and the corrosion behavior of the coatings were experimentally investigated. There is a linear trend of growth...
Case-hardening 14Cr14Co13Mo4 martensitic stainless steel needs to be carburized to improve surface performance. Low-pressure carburization has the benefit of having oxidation-free production and being ecofriendly. However, compared with the low-pressure carburization of the low-alloy steel, low-pressure carburization of the 14Cr14Co13Mo4 steel cons...
The thermal-induced surface damage of M50 steel at rolling-sliding contacts under heavy load and high speed is investigated. A two-disk test rig is used for testing the surface damage of M50 steel at scuffing. The thermal response and near-surface deformation of M50 steel at rolling-sliding contacts are analyzed based on its high-temperature proper...
In this paper, a three-dimensional thermoelastic contact model of coated solids with the frictional heat partition considered is developed by introducing a frictional heat partition model. The influence coefficients of the temperature rise, normal displacement and stress components in the three-dimensional thermoelastic contact model are converted...
Multilayer coatings are often reported in the papers on surface engineering and have been proved to be able to enhance the toughness, anti-wear and bonding strength, while an understanding of their mechanical behavior is essential to their optimal design and tribological application. In this paper, a two-dimensional contact model of a multilayered...
The case-hardened 14Cr14Co13Mo4 martensitic stainless steel is carburized by low-pressure carburizing method. Plenty of second phase particles appear in the case layer. C concentration is measured by Carbon and Sulphur analyzer. Precipitation of second phase induces the improvement of C concentration in case layer. XRD results indicate that the sec...
The damage evolution induced by three types of carbides in M50 bearing steel is studied in this paper. Stress distribution in the micro-domain is initially obtained to calculate the damage accumulation of the elements. Subsequently, the process of the butterfly generation is simulated. It can be seen that the butterfly wings are generated at the si...
Novel quenching-partitioning-tempering (Q-P-T) and traditional quenching-tempering (Q-T) processes are conducted for M50 ultra-high strength steel. An excellent combination of strength and toughness is obtained via the Q-P-T process. The highest impact absorption energy of the Q-P-T specimen increases by 93% compared to the Q-T specimen. However, t...
Quenching–partitioning–tempering (Q–P–T) process was applied to treat high-speed steel. Microstructural development and properties were studied using high-resolution transmission electron microscopy (HRTEM), scanning electron microscopy, X-ray diffraction and a drop hammer impact toughness tester. The results of impact toughness test showed that th...
This paper focuses on the crack nucleation and crack propagation induced by a cluster of carbides. The morphology of the carbides is extracted from scanning electron microscope images of M50 bearing steel. Subsequently, a continuum damage accumulation model is incorporated into the Voronoi finite element model to investigate the damage evolution in...
The Cr alloying layer was introduced on the steel substrate subjected to surface alloying treatment by combination of magnetron sputtering and high current pulsed electron beam. The microstructure of the Cr alloying layer was studied using SEM, XRD and TEM. The thickness of the remelted layer was about 5 μm after surface alloying treatment. The 2 μ...
In this research, the tantalum was chosen to be an alloying element into the surface layer of M50 steel to explore the microstructure after surface alloying treatment by high current pulsed electron beam. Different thickness of Ta films were deposited onto the M50 steel by DC magnetron sputtering before irradiation and the morphology of surface and...
The crack propagation in bearing steel with a non-metallic inclusion is analyzed by Voronoi finite element method. The load applied on the Voronoi finite element model is obtained by combination of quasi-dynamic method and Hertzian contact theory. Von Mises stress distribution in the micro-domain is calculated to determine the crack initiation. The...
In this work Cu1.4Mn1.6O4 (CMO) spinel oxide is prepared and evaluated as a novel cobalt-free cathode for intermediate temperature solid oxide fuel cells (IT-SOFCs). Single phase CMO powder with cubic structure is identified using XRD. XPS results confirm that mixed Cu+/Cu2+ and Mn3+/Mn4+ couples exist in the CMO sample, and a maximum conductivity...
In this paper strontium-site-deficient Sr2Fe1.4Co0.1Mo0.5O6−δ-based perovskite oxides (SxFCM) were prepared and evaluated as the cathode materials for intermediate temperature solid oxide fuel cells (IT-SOFCs). All samples exhibited a cubic phase structure and the lattice shrinked with increasing the Sr-deficiency as shown in XRD patterns. XPS resu...
In the present work, the effect of implantation sequence on tribological behavior of GCr15 steel treated by plasma-based ion implantation of carbon and nitrogen has been investigated. The treated GCr15 steels were characterized for microstructure and abrasive wear performance through combination of Raman spectroscopy, nano-indentation, and wear tes...
In this work NiO/3 mol% Y2O3–ZrO2 (3YSZ) and NiO/8 mol% Y2O3–ZrO2 (8YSZ) hollow fibers were prepared by phase-inversion. The effect of different kinds of YSZ (3YSZ and 8YSZ) on the porosity, electrical conductivity, shrinkage and flexural strength of the hollow fibers were systematically evaluated. When compared with Ni–8YSZ the porosity and shrink...
The La0.7Sr0.3MnO3-δ thin films were deposited on Si(100) by DC magnetron sputtering followed by annealing at 973K for 0.5∼2h in air/oxygen. The microstructure, room temperature reflectance and magnetoresistance (MR) of the annealed films were investigated using Glancing-angle X-ray diffraction (GXRD), scanning electron microscopy (SEM), Fourier tr...
Boron-carbon-nitride (BCN) films have been fabricated by direct current unbalanced magnetron sputtering. Boron carbide/graphite compound and a mixture of nitrogen and argon are used as target and carrier gas, respectively, during BCN synthesis. The obtained BCN films are annealed at different temperatures under vacuum condition. The effect of annea...
Perovskite manganese oxide La1-x Sr x MnO3 (LSMO) is a metal-insulator ceramic compound for which the metal-insulator transition temperature (T MI) depends on the Sr doping value. Traditional LSMO fabrication processes achieve the metal-insulator behavior only over a limited doping level range of Sr (x = 0.175 to 0.25). To improve its metal-insulat...
(TaNbTiW)N films with thickness of ˜1000 nm are prepared on
titanium alloy substrate by combined magnetron sputtering deposition and
nitrogen plasma based ion implantation (N-PBII). Chemical state of the
elements and phase structure of the films are investigated using X-ray
photoelectron spectroscopy (XPS) and X-ray diffraction (XRD),
respectively....
The structure and properties of Ti6Al4V alloy irradiated by high current pulsed electron beam (HCPEB) with various pulse number were studied in this paper. Optical Microscopy (OM) and X-ray Diffraction (XRD) were used to analyze the structure of irradiated layer. It is found that the phase composition transforms from α + β binary phases to single α...
We have studied the deposition of ZrNbTaTiW multi-elements alloy thin films on Si (111) substrates by multi-targets magnetron sputtering process. The chemical composition, constituent phase, grain morphology and hardness were investigated using XRF, XRD, FESEM and nano-indenter. The amorphous structure was formed in the film when the atomic percent...
The magnetron sputtered La0.7Sr0.3MnO3 − δ films were implanted with oxygen ions at a dose of 1 × 1016 ions/cm2 and various negative pulsed voltages (10–50 kV) by plasma immersion ion implantation (PIII), and followed by air annealing at 973 K for 1 h. The structure, metal–insulator transition and room temperature emittance property of the treated...
Ti6Al4V and Ti were implanted by oxygen plasma based ion implantation at the pulsed negative voltages of 30 and 50 kV with a constant fluency of 4 × 1017 O/cm2. In order to tune phase formation in the oxygen-implanted layer, the implanted samples were treated by subsequent annealing in atmosphere or vacuum for 1 h at the temperatures from 500 to 70...
Multi-element (ZrTaNbTiW)N films are prepared by multi-target magnetron sputtering deposition and nitrogen plasma based ion implantation (PBII). The composition, structure and mechanical properties of the films are investigated. X-ray photoelectron spectroscopy (XPS) confirms the formation of a mixture of ZrN, TiN, TaN, Nb–N, ZrO2, Ta, Nb and W in...
1 μm Ni films were deposited on both single crystal and polycrystalline Cu disks by magnetron sputtering. Diusion at 420 ± 3 °C was performed on the Ni/Cu couples with Ar ion irradiation at the Cu side of samples. Diffusion of samples without irradiation were performed for comparison. The Ni concentration distribution profiles analyzed by glow disc...
Composite SiOx/polymer films have been prepared on polyethylene terephthalate (PET) substrates by radio frequency (RF) reactive magnetron co-sputtering, from which two balanced magnetrons are equipped with silica and dicyclopentadiene dioxide cured with maleic anhydride (DCPD/MA) targets. Morphology and composition of the deposited composite films...
In this study, flexible polymer chains are incorporated into silicon oxide films by magnetron co-sputtering two targets, namely, silica and dicyclopentadiene dioxide cured with maleic anhydride (DCPD/MA), to solve the brittle problems of these passive barrier packaging materials. Composite SiOx/polymer films are prepared on polyethylene terephthala...
In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stres...
In the present paper, surface melting of the M50 steel was carried out by high current pulsed electron beam (HCPEB). The microstructure evolution in the melted layer was observed using TEM. It is confirmed that the dissolution of the carbides and the diffusion of alloy elements play a determining role on the microstructure evolution. After one puls...
MoS(x)/Au films about 1 mu m in thickness were deposited on 9Cr18 steel substrate discs by magnetron sputtering method. The chemical composition and chemical states of the as-deposited films were determined by X-ray photoelectron spectroscopy (XPS). The effect of high loads (15 similar to 50N) on tribological behaviors of the MoS(x)/Au films in vac...
Ti6Al4V alloy was implanted with nitrogen–oxygen mixture by using plasma based ion implantation (PBII) at pulsed voltage −10, −30 and −50kV. The implantation was up to 6×1017ions/cm2 fluence. The changes in chemical composition, structure and hardness of the modified surfaces were studied by XPS and nanoindentation measurements. According to XPS, i...
Ni films were deposited on one side of single crystal Cu substrate discs of 1.0 and 1.5 mm thickness. These discs were irradiated on the Cu side with argon ions. Evidence for enhanced Cu segregation at the Ni surface was found for both thicknesses. This effect decreased with increasing distance between the diffusion zone and the irradiated surface....
The La0.7Sr0.3MnO3 (LSMO) films were prepared at various substrate temperatures on si(100) by DC magnetron sputtering method. The microstructure and nano-scratch behaviors of the films were investigated. The results indicate that the films are single phase with perovskite distorted cubic structure and the texture orientation changes obviously with...
Tantalum nitride and tantalum carbide films were fabricated using magnetron sputtering of tantalum followed by nitrogen and
carbon plasma-based ion implantation (N-PBII and C-PBII). The phase evolution and morphology of the films were studied using
glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM). It was found that...
In this work, Cr4Mo4V steel was irradiated by high energy current pulsed electron beam (HCPEB) with energy density of 6J/cm2. Morphology and phase composition of the surface layer were analyzed using scanning electron microscopy (SEM) and glancing angle X-ray diffraction (GXRD). The crater-like morphology was observed on surface after HCPEB treatme...
Boron carbonitride films were deposited by d.c. unbalanced magnetron sputtering at different target powers. The effect of the target power on the deposition rate, structures, nano-mechanical properties and nano-scratch behaviors of BCN films was studied in the paper. The nano-mechanical properties and nano-scratch behavior of the films were determi...
a-C:H films were prepared by middle frequency plasma chemical vapor deposition (MF-PCVD) on silicon substrates from two hydrocarbon source gases, CH4 and a mixture of C2H2 + H2, at varying bias voltage amplitudes. Raman spectroscopy shows that the structure of the a-C:H films deposited from these two precursors is different. For the films deposited...
X-ray diffraction (XRD) and X-ray photoelectron spectroscopy were used to study the structure and the element chemical states of plasma-based ion implantation (PBII) nitriding M50 steel. An ~70-nm-thick oxygen-rich layer was formed in the surface after PBII treatment, where C and V elements were absent, Cr and Mo elements were in the manner of oxid...
The influence of high current pulsed electron beam (HCPEB) irradiation numbers on the microstructure, wear and corrosion resistance properties of M50 steel was studied. The crystallize phase, surface morphology, hardness, oxidation wear and corrosion resistance of samples were analyzed using XRD, SEM, nanoindenter, wear tester and electrochemical c...
Argon ion irradiation enhanced diffusion between Cu and Ni was found beyond the radiation effect zone in classical theory. The enhanced diffusion effect attenuates along with the distance between the diffusion zone and the radiated surface. An interpretation based on irradiation induced discrete breathers was employed as a possible mechanism.
Nitrogen doped TiO(2)/Ti photoelectrodes were prepared by a sequence of anodization and plasma based ion implantation (PBII). The properties of this photoelectrode were characterized by scanning electronic microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), X-ray photoelectron spectrometry (XPS), Ultra violet/visible light dif...
MoS 2 films about 1μm in thickness have been deposited on 9Cr18 steel substrate disc with dimension of Φ70mm×10mm by magnetron sputtering method. The effect of high loads (15~50N) on tribological behaviors of the magnetron sputtered MoS 2 films in vacuum was studied by pin-disc wear tests. The pins made with 2Cr13 steel were Φ9mm×20mm and the leadi...
In this paper, macropores TiO2 layer was fabricated on titanium substrates based on plasma based ion implantation (PBII). In order to increase the photodegradation efficiency of fabricated TiO2 layer, two approaches are used: (1) preparation of macropores on TiO2 layer to increase the total photodegradation area and (2) nitrogen doping (N-doping) t...
The micro-pores with size of 0.2 to 1.8 µm, which randomly distribute in a 316L stainless steel substrate, were fabricated by the transfer of the porous structure of anodic porous alumina. The mask anodic porous alumina was directly prepared by anodizing of aluminum film, which was deposited on 316L substrate by DC magnetron sputtering. The transfe...
Ti–B–C–N films were deposited by unbalanced DC magnetron sputtering with Ti/B4C compound target. The sputtering zone in the surface of the target was adjusted by a magnetic coil. X-ray photoelectron spectrum, X-ray diffraction, nano-indentation and scratch tests were used to analyze the film composition, phase structure, hardness, modulus and scrat...
In order to seek an effective way for preventing restenosis after coronary stent implantation, a proposal of increasing the amount of loaded drug without changing the size of struts was given. Thereafter, a process of fabricating in-situ formed sub-micro-pores on 316L stainless steel (316L SS) was demonstrated. An aluminum thin film was deposited b...
The present paper concentrates on structure and micro-mechanical properties of the helium-implanted layer on titanium treated by plasma-based ion implantation with a pulsed voltage of −30 kV and doses of 3, 6, 9 and 12 × 1017 ions/cm2, respectively. X-ray photoelectron spectroscopy and transmission electron microscopy are employed to characterize t...
By applying a negative high pulsed voltage to Si (111) substrates, ultra-thin fluorine carbon films of about 3 nm thick are deposited and completely covered on the samples by RF magnetron sputtering with PTFE target. Angle resolved X-ray photoelectron spectroscopy analysis indicates that the surface of the deposited films is rich in fluorine, and C...
a-C:F films were prepared by RF unbalanced magnetron sputter deposition on Si substrates. The modulus and hardness of the films and their relationship with chemical groups in the films were investigated. The results show that the modulus and hardness of the deposited films are not only determined by the nature of cross-link C–C network, but also af...
A pulsed dc zirconium arc discharge is generated in an argon diluted oxygen gas by separating a pin electrode as an anode from the cathode. The arc is transiently generated, and its life time is approximately 3 ms for a series resistance of 1 Ω and a dc output of 33 V. The life is prolonged and the plasma becomes stable with increasing the arc curr...
Copper oxide films were deposited by plasma based ion implantation and deposition using a copper antenna as rf sputtering ion source. A gas mixture of Ar + O2 was used as working gas. During the process, copper that was sputtered from the rf antenna reacted with oxygen and was deposited on a silicon substrate. The composition and the chemical state...
Plasma-based ion implantation and deposition (PBII&D) is a promising technique used to modify the surface of a three-dimensional substrate, where metallic plasma sources have been used to form alloys and compounds. In this research, a positively biased electrode was placed near a metallic plasma source to mix the metallic species with the gaseous s...
AISI 302 steel was modified using elevated temperature nitrogen plasma immersion ion implantation. The thickness of the modified layers is improved significantly compared with that of the layer implanted at room temperature. The surface nanohardness of the treated sample is much higher. Both the friction coefficient and wear rate are dramatically r...
Ti6Al4V alloy was implanted with oxygen by using plasma based ion implantation (PBII) at pulsed voltage ranging from −10 to −50kV. In order to maintain a lower implantation temperature, an oil cooling working table was employed. The thicknesses of modified layer of samples implanted at −30 and −50kV are about 117 and 182nm, respectively. There is c...
M50 steel was implanted with nitrogen at elevated temperatures ranging from 260 degC to 420 degC using plasma-based ion implantation. The effect of implantation temperature on surface microstructure, hardness, and wear resistance was investigated. It is observed that nitrogen penetrates very deeply from the surface as a result of implantation and t...
Ti6Al4V alloy was implanted with oxygen by using plasma based ion implantation (PBII) at pulsed voltage ranging from −10 to −50 kV with a frequency of 100 Hz. In order to maintain a lower implantation temperature, an oil cooling working table was employed. The structure of the modified layers was characterized by X-ray photoelectron spectroscopy (X...
Boron carbonitride (BCN) films were deposited by d.c. unbalanced magnetron sputter deposition where a substrate bias ranging from -50 V to -300 V was applied to the sample. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy were used to confirm the composition and bonding structure of the BCN films. Surface morphology and...
Zirconium oxide films were prepared by plasma-based ion implantation and deposition (PBII&D), where a zirconium pulse arc discharge was generated in O-2/Ar gas mixture. The plasma was maintained for approximately 3 ins, and the ion current at the substrate was detected in a time range from 1 to 10 ins after the arc initiation. At O-2/Ar pressures o...
Steel M50 was modified by plasma-based ion implantation (PBII) at different temperatures. The results of scanning electron microscope (SEM) indicate that PBII at elevated temperature can reduce both grain size of substrate and precipitates in the implanted layer and remove the network microstructure of carbides in the substrate. Glancing angle X-ra...
Zirconium oxide films were prepared using a zirconium arc discharge in a gas mixture of argon‐diluted with oxygen, where the gas flow rate was varied from 100 sccm to 600 sccm, which corresponded to a gas pressure of 1.9 to 4.6 Pa. The voltage applied to the target was, unless otherwise specified, set to a value of −5 kV, with a pulse width of 20 µ...
Fluorocarbon films were deposited on silicon substrate by R.F. magnetron sputtering using a polytetrafluoroethylene (PTFE) target. Structure of the deposited films was studied by X-ray photoelectron spectroscopy (XPS). Hardness, elastic modulus and scratch resistance were measured using a nanoindenter with scratch capability. –CFx (x=1,2,3) and C–C...
The corrosion behavior of AISI302 steel implanted with nitrogen at elevated temperature was investigated by electrochemical impedance spectroscopy. Equivalent circuits for explaining the impedance characteristics are proposed. The thick passive layer containing Cr2O3 and the expanded austenite layer in the sub-surface worked together, resulting in...
Titanium nitride (TiN) film was deposited on the trench surface by plasma-based ion implantation and deposition (PBII&D) technique using a titanium cathodic arc discharge at a nitrogen pressure of 8 Pa at a process time of 2 h. The trench size was 100 mm in length and 50 mm in depth for two widths of 10 and 30 mm. During the process, a train of neg...
Titanium nitride (TiN) films are prepared on a trench by plasma-based ion implantation and deposition (PBII & D). The distributions of film thickness and implanted dose are studied, considering the current distribution inside the trench and the ion sheath evolution. The trench as a target is immersed in a titanium cathodic arc discharge with a curr...
The ion current at each position of a trench-shaped target was observed in plasma-based ion implantation and deposition (PBII&D), where a titanium cathodic arc at a nitrogen pressure of 8 Pa was used as a plasma source. The width and height of the trench were varied. The arc current and voltage are 80 A dc and 20 V. The ion current distribution ins...
Evolution of an ion sheath and the ion current generated by a pulse voltage application are discussed for a trench-shaped target immersed in a titanium cathodic arc discharge plasma with a current of 80 A DC at a nitrogen pressure of 8 Pa. The ion sheath evolution inside the trench with a width of 30 mm and a depth of 20 mm is experimentally observ...
Titanium nitride (TiN) film was deposited on a 200-mm-diameter disk target using a titanium cathodic arc discharge with a current of 80 A dc at a nitrogen pressure of 10 Pa in a plasma-based ion implantation and deposition system. The target position was 150 and 400 mm from the exit of the arc source. The distribution of ion current on the disk tar...
A prismoid-shaped target was treated by plasma based ion implantation (PBII) with nitrogen plasma, in order to study the lateral homogeneity in the near region of square corner after treatment. Auger electron spectroscopy was used to execute sputter depth profiling to obtain nitrogen depth distribution and retained dose on the silicon wafer. It sho...
Titanium nitride (TiN) films were prepared on the inner surface of a pipe with a diameter of 80 mm and a length of 150 mm using plasma-based ion implantation and deposition (PBII-D). A titanium cathodic arc discharge was generated at a nitrogen pressure of 8 Pa. Gold-colored TiN films were prepared. The film thickness decreases with increasing the...
This article describes particles formed on a substrate when a cathodic arc is generated in nitrogen at pressure of 0.27 Pa for plasma-based ion implantation and deposition (PBII-D). After a titanium nitride (TiN) film was deposited and titanium and nitrogen ions were simultaneously implanted into the silicon substrate, macroparticles of TiN were ob...
The influence of the applied voltage on the microstructure of nitrogen implanted iron by plasma immersion ion implantation at 360 °C was studied. Glancing X-ray diffraction shows that the amount of nitride decreases with increase of the applied voltage. In the surface layer of the iron samples, ε and Fe2N nitrides are formed at the surface, and γ′...
By combining plasma-based ion implantation with unbalanced magnetron sputtering deposition, ion implantation mixed films were prepared on steel 45 substrate. X-ray photoelectron spectroscopy analysis shows that the concentrations of carbon and titanium have a periodical distribution in the prepared films. It comes from the periodical deposition and...
Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load Á/displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp 3 structure and the D peak observed in the Raman spectra is inv...
The shunting arc discharge is an alternating capacitor discharge through a rod of metal or semi-metal. An optimization of the discharge condition has realized the self-ignition of the arc discharge at a low input power to the rod, leading to a much longer lifetime of the rod compared with the conventional shunting arc and the peripheral arc. The sh...
