A new strategy to design grating displacement sensor with linear CCD array was presented, which takes advantages of the high acuity and equilibrium among pixels of CCD. By using this strategy, the interval between grating lines can be directly subdivided and then measured, in this way the traditional methods of subdividing the moire fringes which need complex subsequent circuits were changed. The
... [Show full abstract] device using the new strategy can attain high resolution and precision fulfilled by the high quality of CCD with limited cost, besides, the mass of circuits can be simplified greatly because the subdividing and digitalizing function are completed with image capture by CCD simultaneously. Moreover, the subdividing multiple can reach thousands of times due to the large number of CCD pixels. Since the absolute distances between each line are added up to determine a longer displacement, the effect of grating etching quality on the measurement precision is minimized.