Anis Rahman

Applied Research & Photonics · Terahertz; Lattice Imaging; Nanometrology

The semiconductor industry is currently experiencing a period of rapid growth and innovation, as evidenced by the lineup of events and conferences scheduled for 2024, particularly the Advanced Semiconductor Manufacturing Conference (ASMC) 2024. The industry is also facing several significant challenges, but companies and stakeholders are actively e...

The relentless march of miniaturization in the semiconductor industry has driven innovation in lithography, or nanolithography, to be precise. It is the process of etching intricate integrated circuit (IC) patterns onto silicon wafers. This miniaturization is crucial for packing ever-increasing transistor density onto chips, leading to faster, more...

Applied Research & Photonics’ newer model of cameraless T-ray imaging - the TNSIMS – Terahertz Nanoscanning 3D Imager & Spectrometer, is a system for volume imaging with layer-by-layer analysis capability. Utilizing its proprietary Dendrimer Dipole Excitation technology, the TNSIMS delivers the most advanced analytical, and imaging, capability, via...

A mundane lava lamp can serve as a useful educational tool for young minds. Construction of a lava lamp involves some basic physics principles that can be easily extended to a deeper science such as nanotechnology, ferrofluids, cryptography, encription, and even to the concept of a startup business. These topics are briefly discussed in this articl...

While artificial intelligence (AI) or digital intelligence has spared a wave in modern society, especially in the computing community for its interactive applications; however, AI is still not capable of creating new knowledge or new concepts. AI only finds results from what is already known, but its ability for massive search and algorithm crunchi...

Artificial intelligence (AI) and nanotechnology are two of the most transformative technologies of our time. Indeed, nanotechnology and artificial intelligence (AI, or digital intelligence), both are revolutionary fields, however, it must be recognized that AI cannot exist without computers, but thanks to AI, computers can accomplish many more task...

All kinds of developments of modern society are at the crossroads of nanotechnology-based enhancement of yesterday's technology and products to tomorrow's improved versions. Nanotechnology is an umbrella that touches each and every technology to make them more efficient, cost-effective, with increased features and scope. Such improvement has a sign...

All kinds of developments of modern society are at the crossroads of nanotechnology-based enhancement of yesterday's technology and products to tomorrow's improved versions. Nanotechnology is an umbrella that touches each and every technology to make them more efficient, cost-effective, with increased features and scope. Such improvement has a sign...

Nanotechnology is increasingly being included in undergraduate curricula to prepare students for the interdisciplinary nature of modern scientific and engineering challenges, but the speed of adoptation is slow. The coming decades will be shaped in many ways by the enormous advent offered by nanotechnology. Therefore, workforce development in this...

The results reported herein exemplify a T-ray imaging based approach for the visual and quantitative investigations of a complex, hierarchically structured emissive QD−Ploy(IL) composite that was reported previously [1]. Quantitative comparison of a single QD size measured via TEM and T-ray checks out well. The T-ray isosurface image provides a vis...

The coming decades will be shaped in many ways by the enormous advent offered by nanotechnology. Therefore, workforce development in this emerging area is a national priority. However, teaching any nanotechnology course requires measurements of some nanomaterial in the practical sense. How to do that? Established techniques require the use of eithe...

Cameraless λ-decoupled Imaging details have been described elsewhere [1]. The main objective for avoiding the camera route is twofold. (1) overcoming the Abbe diffraction limit, and (2), achieving sub-Angstrom scale resolution with bigger wavelengths like terahertz radiation (T-ray). The camera route depends on a charged coupled device (CCD) or a s...

Terahertz Cameraless Imaging Tool: An effective and affordable solution for teaching nanotechnology

This paper describes a terahertz (T-ray) cameraless imaging and profile mapping technique for accomplishing the imaging and/or mapping of a whole wafer with fabricated dies for devising a criterion to sort out good dies. A stratagem for decoupling the wavelength's dependence on image formation is described, whereby the Abbe diffraction limit is ove...

Dendrimer dipole excitation-based T-ray source is used with a nanoscanner for profiling dies on a patterned wafer. The proposed sorting criterion via profile mapping improves the yield significantly.

This paper outlines the basic technology and economic model of the core silicon technology. Silicon is the second most abundant element on the earth’s crust but there is no specific deposit or mine for silicon. The only source for silicon is “sand” that the earth has an abundant supply. Here we outline the basic steps of manufacturing silicon ingot...

A novel and complex technology competing against established standards, even with new and critical useful capabilities, will always find itself very difficult to gain traction. However, as the history of technology-progress overwhelmingly stipulates, when bigger risks meet with success, it not only solves the outstanding problem but also brings a b...

This paper presents a dendrimer dipole excitation-based Terahertz Radiation (T-ray) generation technique. Here an ordinary dendrimer is converted to electro-optic dendrimer by engineering three of the possible six Critical Nano Scale Design Parameters (CNDPs). A time-domain spectrometer circuit was designed and used for measuring the Tray power gen...

It is now clearly evident that sooner or later each and every technology of today will be influenced by nanotechnology for better. Many new technologies will also be created from this new world of nanotechnology. This review is targeted to introduce the main aspects of the present-day status of nanotechnology. In particular, several modern topics h...

Semiconductor chips, also known as integrated circuit (IC), are the key for everything in today’s world that does not need any introduction. Although these chips are very small, ~2 mm × 2mm, it actually houses a few billions of electronic components such as transistors, diodes, resistors, and capacitors, which all work together to perform logic ope...

Interfaces play critical roles in all semiconductor fabrication processes and on the electronic properties of semiconductors. Especially, devices involving plurality of interfaces is now of paramount importance. As such the interfaces have been a subject of intensive studies. However, effective characterization of interfaces is complicated because...

The Applied Research & Photonics model TNS3DI – Terahertz Nanoscanning Spectrometer and 3-D Imaging system, utilizing its proprietary Dendrimer Dipole Excitation technology to deliver what we have demonstrated is unsurpassed analytical, and imaging capability to enable the revolution in advanced materials and structures. The system has demonstrated...

Abstract Probing deeper via non-destructive means is important for proper characterization of semiconductors and nanomaterials. It is also important for post processed inspection, interface properties, and failure analysis. However, the current state of the art can only see one surface at a time. While X-ray can penetrate into many materials, it ca...

An isosurface is a surface of constant value of a physical property, such as the dielectric constant, in a three-dimensional volume. The isosurface separates regions less than a given “isovalue” from regions greater than the same isovalue. All points on the isosurface have the same value (the isovalue). This is a convenient way to visualize the dis...

Terahertz camera-less imaging was conducted on deep trench etched on Si, and whole SiC wafers. It is demonstrated that terahertz 3D approach can see more and deeper features on both samples. OCIS code: (130.5990) Semiconductors; (170.6795) Terahertz Imaging; (120.0120) Instrumentation, measurement, and metrology; (120.4290) Nondestructive testing

Deposition involves transforming a solid material in to vapor/liquid phase and then back in to solid by the deposition process. The deposited materials’ lattice will/may suffer from defects such as stacking fault, dislocations, delamination, inclusions, nanovoids, etc. Quantification of such interfaces at the lattice scale is a huge challenge; espe...

Interfaces play important roles in all semiconductor fabrication processes. However, effective characterization of interfaces is complicated because of inherent unknowns involved. For example, consider the case outlined in Figure 1 where two layers of materials have been deposited on a silicon substrate. Here, the silicon wafer is well characterize...

Nanotechnology in action-graphene helps making concrete 250% stronger than regular concrete Harrisburg, PA, November 25-Applied Research & Photonics (ARP) reports testing of a Nano enabled concrete that is ~250% stronger than ordinary concrete. Researchers at ARP was been working on solving the problem of large-scale production of graphene. Their s...

The nanotechnology industry faces a few critical hurdles for commercialization of nanomaterials. A major hurdle is the lack of characterization techniques for the interaction of two or more nanomaterials leading to new applications. As such, new and effective nanometrolgy is important. Metrology for nanotechnology, or nanometrology, is a growth are...

Terahertz spectroscopy and imaging adds a new frontier for very high sensitivity spectroscopy and camera-less, lattice resolution imaging, overcoming the Abbe's diffraction limit. The Dendrimer Dipole Excitation (DDE) based terahertz time-domain spectroscopy offers the advent of very high sensitivity spectral analysis of the zero-dimensional to 3D...

Hierarchically structured emissive quantum dot (CdS/CdSe) poly(ionic liquid) composites are synthesized through colloidal polymerization within a lyotropic liquid crystal, yielding a solvent-responsive nanoparticle (NP) composite possessing four ordered structural motifs. The composite is prepared by coassembling an amphiphilic ionic liquid (IL) mo...

Terahertz time-domain scanning technology provides camera-less, lattice-resolution, layer-by-layer imaging and identification of the internal structures of simple and complex nanomaterials. https://digital.laserfocusworld.com/laserfocusworld/202004/MobilePagedReplica.action?pm=1&folio=23#pg25

ARP's TNS3DI can analyze and quantify surface topography, texture, step heights, and more, over a wide range of surfaces and materials. The proprietary non-contact terahertz technology captures the whole surface or a fraction of it for a variety of substrates with resolution ranging from millimeters down to Angstroms. There are no limits on the sam...

TNS3DI is a camera-less, lattice resolution, imager and spectrometer in a single instrument. Overcoming the Abbe-diffraction limit of CCD-based imaging platform, TNS3DI gives higher performance characterization and efficient measurements. Materials (0D, 1D, 2D) are measured and quantified for – • Nanoscale to lattice scale metrology of semiconducto...

Lattice dilation of metallic nickel film deposited by plasma-spraying on a ceramic layer that is also prepared by plasma-spraying, has been investigated by high resolution terahertz imaging and sequential zooming of the images to quantify the lattice parameter by graphical analysis. A metallic nickel sample was first imaged, and its measured lattic...

The Applied Research & Photonics model TNS3DI – utilizing its proprietary Dendrimer Dipole Excitation (DDE) technology to deliver what we have demonstrated is unsurpassed analytical, and imaging capability to enable the revolution in advanced materials and structures that are changing the world today. The system has demonstrated the ability to pinp...

Nanomaterials play a key role in the next generation of electronics including high-density packaging and interconnects. Progress in commercial utilization requires deeper understanding of these materials and their interactions with other materials. The most critical knowledge gaps and challenges include measurements and standards, characterization,...

The multiwalled carbon nanotubes has a myriad of applications due to its unique electrical and mechanical properties. The biomedical application of multiwalled carbon nanotubes that have been reported include drug delivery, medical imaging, gene delivery, tissue regeneration, and diagnostics. Proper characterization is required to enhance the poten...

Terahertz reconstructive imaging technique has been used for measuring patterns on silicon chips that are hidden under top layer. The terahertz nanometrology described herein is a non-destructive, camera-less route of imaging both the surface and sub-surface features on a semiconductor chip and/or on other substrates. Two different chips (Sample-A...

Terahertz multispectral imaging for sub-nanoscale investigation is utilized to determine the thicknesses of single-walled carbon nanotube films on silicon wafer. The measured thicknesses vary systematically as a function of alignment, as expected.

High purity alumina sample has been characterized via terahertz reconstructive lattice imaging technique. The camera-less technique uses a nanoscanner to create a digital three-dimensional representation of the sample via modified Beer-Lambert's law, where, the reflected terahertz intensity is captured as a function of real coordinates on the sampl...

Modern integrated circuit (IC) packaging faces challenges for higher speed in a smaller dimension achieved due to the 10 nm or smaller process node. While ICs are being packaged in 3D format, it is often not possible to measure features and/or defects in a non-destructive route. This paper reports a technique for nanometrology using bigger waveleng...

Modern integrated circuit (IC) packaging faces challenges for higher speed in a smaller dimension achieved due to the 10 nm or smaller process node. While ICs are being packaged in 3D format, it is often not possible to measure features and/or defects in a non-destructive route, especially, those hidden below the surface. Herein, a technique for na...

Many patients with chronic skin disease develop hemostatic abnormalities. The blood coagulation factor XII is a multifunctional protease, which is involved in thrombosis, fibrinolysis, and inflammatory processes. The aim of this investigation was to assess the autoactivation of FXII that leads to the generation of FXII fragments and their subsequen...

Terahertz 3D reconstructive imaging is a novel medical imaging modality that can be used to differentiate of healthy and diseased skin, both ex-vivo and in-vivo. Here, we imaged 21 ex-vivo skin samples using a continuous wave terahertz reflectance reconstructive imaging technique in which the images were rendered by a computer algorithm. The obtain...

The Applied Research & Photonics ("ARP") model TNS3DI-Terahertz Nanoscanning Spectrometer and 3-D Imaging system, utilizing its proprietary Dendrimer Dipole Excitation technology to deliver what we have demonstrated is unsurpassed analytical, and imaging capability to enable the revolution in advanced materials and structures revolutionizing the wo...

Silica nanoparticles suspended in an organic solvent (nanosuspension) have been imaged and characterized via terahertz nanoscanning reconstructive three-dimension (3D) imaging technique. The size of individual silica nanoparticles in the suspension was quantified. In addition, the presence of nanoclusters along with their distribution in the suspen...

This paper demonstrates overcoming of the Abbe diffraction limit (ADL) on image resolution. Here, terahertz multispectral reconstructive imaging has been described and used for analyzing nanometer size metal lines fabricated on a silicon wafer. It has also been demonstrated that while overcoming the ADL is a required condition, it is not sufficient...

In this work, we investigate the use of a Terahertz multispectral reconstructive imaging technique to measure the size of individual gold nanoparticles and accordingly the number of unit cells in a given gold nanoparticle. The gold nanoparticles were synthesized by the Frens-Turkevich citrate method and characterized by UV-Vis absorption spectrosco...

Terahertz sub-surface imaging and spectroscopy offer an attractive solution for 1D and 2D materials for their size, defects and chemical nature. Terahertz 3D imaging with minimal sample preparation requirements and its ability to " see " below the surface with a resolution of <1 nm enables lattice level analysis. Another important property is the a...

GaN is a wide band-gap semiconductor, important for high power and high temperature device applications. In this note, we report on a large-domain-size polycrystalline gallium nitride grown on silicon substrate (Fig. 1) that was investigated by ARP’s terahertz nano-imager and spectrometer. The sample, as received, was subjected to a high voltage st...

Epitaxially grown SiGe and Ge layers on Si <100> substrate have been analyzed by terahertz multispectral reconstructive 3D imaging technique. In particular, 3D images of both samples were generated via a non-contact and no-destructive route and were analyzed by utilizing the terahertz reconstructive imaging algorithm. It was found that the algorith...

Two critical nanoscale design parameters (CNDPs); namely, surface chemistry and interior compositions of poly(amidoamine) (PAMAM) dendrimers were systematically engineered to produce unique hyperpolarizable, electro-optical substrates. These electro-optically active dendritic films were demonstrated to produce high quality, continuous wave terahert...

A terahertz diagnosis tool has been developed to identify early stage skin cancer at the cellular level. Here, three different techniques are used where each technique independently identifies a given disease condition compared to healthy skin specimen; thus, collectively forms a diagnostic procedure with minimal falls alarm. Namely, terahertz sub-...

So a hypothesis may be erected that “the thinly placed trees appear to be on a grid that disappears when they grow denser.” This actually leads to a bigger picture (hypothesis), “The Nature likes short-range order and long-range disorder.”

Terahertz spectral analysis has been conducted on epitaxially grown semiconductor structures. Epitaxially grown semiconductors are important for microelectronic and optoelectronic devices and also for integrated circuits fabricated using semiconductors. In this paper, we report results of terahertz time-domain spectroscopy of grown SiGe layers on G...

Terahertz sub-surface imaging offers an effective solution for surface and 3D imaging because of minimal sample preparation requirements and its ability to “see” below the surface. Another important property is the ability to inspect on a layer-by layer basis via a non-contact route, non-destructive route. Terahertz 3D imager designed at Applied Re...

Like all scientific experiments, investigations via terahertz spectroscopy and imaging would produce useful results when a set of strategy is established and planned. Because various kinds of samples may be characterized by terahertz approach, each sample needs to be strategized separately. In this tutorial, a general outline of the experimental ap...

Terahertz radiation (T-ray) is the band of energy with corresponding frequencies between 0.1 THz and 30 THz. The non-ionizing nature of T-ray is especially suitable for probing human tissues in a noninvasive and noncontact fashion without any radiation damage. ARP has invented a new mechanism, the dendrimer dipole excitation (DDE) for continuous wa...

Terahertz sub-surface imaging offers an effective solution for surface and 3D imaging because of minimal sample preparation requirements and its ability to “see” below the surface. Another important property is the ability to inspect on a layer-by layer basis via a non-contact route, non-destructive route. Terahertz 3D imager designed at Applied Re...

Nanometer resolution terahertz 3D imaging and spectroscopy for 2D and 2D nanomaterials. Also for soft tissue for disease and health monitoring.

Thinking about starting your own small chemical business or already have one and looking for opportunities? Join the ACS Division of Small Chemical Businesses (SCHB). SCHB has been one of the ACS technical divisions since 1980. In our thirtysixth year, our mission remains the same: to aid in the formation, development and growth of small chemical b...

The objective of this investigation was to shed light on the nature of interaction of different organic dyes and an inorganic dye, Ruthenium (II) polypyridine complex, with TiO2 nanoparticles. TiO2 is commonly deployed as an efficient energy transfer electrode in dye sensitized solar cells. The efficiency of dye sensitized solar cells is a function...

Time-domain terahertz (THz) spectrometry has been used to analyze a 21-mer nucleotide polymorphism (SNP) sequence in a single and double stranded DNA in a label-free manner. THz temporal signal (or interferogram) converted to frequency domain constitutes a signature of a given molecular ―event‖ (e.g., a vibrational or a conformational state). The t...

An electro-optic dendrimer (EO dendrimer) material has been designed for high power terahertz generation. An ordinary poly (amidoamine organosilicon) (PAMAMOS) dendrimer was modified via doping and poling to generate a high electro-optic coefficient nanomaterial. Measured EO coefficient varied from ~130 pm/V at 633 nm to ~90 pm/V at 1553 nm. An emi...

Sub-nanometer imaging with size measurement was achieved via terahertz route. We describe a new technique of 3D imaging with layer-by-layer inspection capability in a non-contact fashion with resolution less than a nanometer. A high power, CW terahertz energy is utilized for scanning a specimen.

This document summarizes the measurement of polymer coating thickness in real-time via a two-beam scanning technique. It is useful for quality control at the manufacturing floor.

Terahertz scanning reflectometry enables investigating both the surface and the sub-surface of biological tissues in non-invasive fashion. T-ray is non-ionizing, thus, eliminates radiation damage of sensitive tissues while still probing disease conditions in the deeper layers leading to an effective early diagnostic tool. In this study, terahertz t...

High speed acquisition of reflected terahertz energy constitutes a kinetics spectrum that is an effective tool for layered materials' deformation characterization under ballistic impact. Here we describe utilizing the kinetics spectrum for quantifying a deformation event due to impact in material used for Soldier's helmet. The same technique may be...

Terahertz scanning reflectometry offers an opportunity to investigate both the surface and the sub-surface of biological tissues (e.g., skin) in a non-invasive fashion. The non-ionizing nature of T-ray eliminates radiation damage or perturbation of sensitive tissues while able to probe disease conditions in the deeper layers leading to an effective...

Non-destructive terahertz reflection interferometry offers many advantages for sub-surface inspection such as interrogation of hidden defects and measurement of layers' thicknesses. Here, we describe a terahertz reflection interferometry (TRI) technique for non-contact measurement of paint panels where the paint is comprised of different layers of...

Investigation of cultured skin cells have have been conducted by a terahertz scanning reflectometer. In particular, the dermal fibroblasts alone and the same treated with titanium nano-particles have been examined for their thickness profile.

A terahertz reflectometer was designed and utilized for measuring paint panels comprised of layers of paint, primer and overcoat. Particle size of the paint additives were estimated by contour plot derived from 3D surface map.

This paper outlines applications of terahertz spectrometry, terahertz reflectometry and sub-surface imaging for effective characterization of various aspects of semiconductor wafer testing. Exemplary results of scanning a wafer have been analyzed for defect determination. Additionally, terahertz reflectometry for controlling wafer polishing for pla...

Terahertz dynamic scanning reflectometry (TDSR) was used for measuring layered materials' deformation kinetics spectra. Multi-layered materials are used for protective devices such as helmet and body armor. An in-situ measurement of deformation profile and other dynamic characteristics is important when such material is subjected to ballistic impac...

The Jumpstart Our Business Startups Act or "JOBS Act," is a law enacted by the Congress and signed into law by President Barack Obama on April 5, 2012 [1]. The JOBS Act is intended to encourage funding of United States small businesses by easing some securities regulations. The term JOBS Act is also sometimes used informally to refer to just Titles...

ACS Indianapolis 2013 Biopharmaceutical compounds such as recombinant viral protein antigens and saponin adjuvants are candidates for vaccination and treatment of virally induced cancers. These samples were analyzed by terahertz time domain spectroscopy on a standard polyethylene background. Approximately 100 µL solution of each was dispensed on th...

This is an interview with the ACS press. See transcript at http://www.ustream.tv/recorded/38602333

A terahertz sub-surface scanner is introduced that utilizes reflection mode non-contact interrogation of surfaces and interior layers of composite substrates with resolution of ~1 nm. Quantitative measurements are done by implementing a modified Beer-Lambert’s law.

A terahertz sub-surface scanner is introduced that utilizes reflection mode non-contact interrogation of surfaces and interior layers of composite substrates with resolution of ~1 nm. Quantitative measurements are done by implementing a modified Beer-Lambert’s law.

A wide broadband terahertz spectrometer was used to illustrate unique applications of terahertz spectroscopy as an analytical tool. Following a brief discussion on spectrometer calibration, illustrative examples are outlined for a chemical compound from the Department of Homeland Security, nanoparticles with ligand, and contamination in gasoline. I...

Detection of explosives from residual traces is the key for preventing unintended use of these materials. We have reported terahertz spectra of common explosives: TNT, PETN and RDX. The temporal signals are found distinctively different in both magnitude and shape, exhibiting unique features for identifying the compounds. In this report, we have st...

Public murals are one of the most visible art forms in the USA, but their extreme visibility is the cause of their greatest vulnerability. The protective coatings play an important role in preservation by providing a barrier between the surface and the environment. Current techniques can analyze only the external surface. A recent development at th...

We have applied Terahertz Spectroscopy (THz) for monitoring the size and stability of concentrated nanoparticle suspensions, and have demonstrated that not only is it possible to identify the particle size of a slurry using THz time­domain spectroscopy but also that real­ time monitoring of the THz signal attenuation as a simple route for monitorin...

Terahertz spectroscopy is a modern and sensitive technology used for identifying biological molecules for diagnostics applications. Also, terahertz time domain spectroscopy is used for studying the conformational changes in biomolecules. This work describes the terahertz spectra of 21­mer nucleobases for each of Adenine, Thymine, Guanine, and Cytos...

Calibration of a spectrometer involves reproducing known absorption peaks of standard materials to ensure measurement accuracies in a given spectral region. A terahertz spectrometer deploys time­domain measurement where the sample response resulting from the molecular interaction is recorded in time; the spectrum is then obtained by means of conver...

Direct measurement of quantities governing the permeation of analytes into substrates has been made possible by a recent development at Applied Research & Photonics (ARP). Terahertz scanning reflectometry (TSR) is capable of quantifying the rate of diffusion of an analyte into a substrate and generating the concentration profile of the same along t...

Section 906(e) of the Family Smoking Prevention and Tobacco Control Act (P.Law. 111­31, " TCA ") requires the FDA to establish good manufacturing practice (" GMP ") requirements. The FDA is likely to propose the initial GMP requirements in 2012 /2013. The GMP requirements will likely call for analyses verifying that the tobaccos have been manufactu...