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Abstract
Due to the challenging nature of the silicon process requiring large amounts of energy
combined with high temperature – water cooling is an integrated and necessary part of
the process equipment. The combination of possible water leakages and large amounts
of energy may lead to severe explosions or eruptions.
In 2006, there was a severe ac...
Contexts in source publication
Context 1
... the furnace has a closed water cooling system the total water use may be monitored. If not measurement equipment may be installed on every water course as shown in Figure 8. ...
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