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Insertion loss vs. signal line width at various frequencies.  

Insertion loss vs. signal line width at various frequencies.  

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Fig. 1 Back-end-of-line integration scheme (left) and SEM view of...
Fig. 10 Signal line width of the investigated RF-MEMS switch.  
Fig. 11 Insertion loss vs. signal line width at various frequencies.  
EM and Lumped-Element Model of BiCMOS Embedded Capacitive RF-MEMS Switch
Conference Paper
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  • Mar 2012
This paper presents the modeling of an integrated capacitive RF-MEMS switch. Both electromagnetic (EM) and RLC lumped-element modeling are investigated. These models are applied to an 80 GHz MEMS switch and they agree well with the measurement results up to 115 GHz. The 80 GHz RF-MEMS switch has been optimized and fabricated in a 0. 25 µm SiGe BiCM...
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