Fig 1 - available via license: Creative Commons Attribution-NonCommercial 4.0 International
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(color online). (a) Schematic drawing of M3C1 on the two-dimensional plane. (b) Top view of cylindrical permanent magnets. Copyright : Reprinted from T. Motomura, and T. Tabaru, AIP Adv. 7, 125225 (2017) ; licensed under a Creative Commons Attribution (CC BY) license.
Source publication
This paper describes the newly developed two magnetron sputtering cathodes with a magnetic mirror configuration for a low gas and power operation and an inward enlargement of the doughnut-shaped plasma discharge area. These cathodes were named Magnetic Mirror-type Magnetron Cathode (M3C). Those magnetic field profiles have a simple structure using...
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Magnetron sputtering discharges feature complex magnetic field configurations to confine the electrons close to the cathode surface. This magnetic field configuration gives rise to a strong electron drift in azimuthal direction, with typical drift velocities on the order of \SI{100}{\kilo\meter\per\second}. In high power impulse magnetron sputterin...
