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Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution...
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Citations
... Zhou et al. used a multi-objective optimization method to design the resonator structure parameters [26]. As for the resonator sensitivity, the influence of the structure parameters on resonator sensitivity was studied by Shi et al. [27]. Xu et al. designed a new structure with a suspended piezoresistive beam (SPB) to improve sensitivity without sacrificing the resonant frequency [28]. ...
This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts: beam I, beam II, and beam III. Using Hamilton’s principle, the undamped dynamic control equation and the ordinary differential dynamic equation of the resonant beam are obtained. Moreover, the structural parameters of the accelerometer are designed and optimized by using resonator mode and frequency analysis, then using finite element simulation to verify it. Finally, 1 g acceleration tumbling experiments are built to verify the feasibility of the proposed design and optimization method. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 98 Hz/g, a resolution of 0.917 mg, and a bias stability of 1.323 mg/h. The research findings suggest that according to the resonator mode and frequency analysis, the values of the resonator structural parameters are determined so that the working mode of the resonator is far away from the interference mode and avoids resonance points effectively. The research results are expected to be beneficial for a practical resonant sensor design.
... In 2012, Peng et al. developed the sample-based stochastic model to analyze the influence of the uncertainty of parameters on the solid-liquid-vapor phase change of metal particles and identified the laser fluence had dominant effects [27]. Since then, more applications of the stochastic model have been found in the design optimization of resonators [28], thermal damage of living biological tissues by laser irradiation [29], and fluctuation parameters on flow stability [30]. Therefore, the uncertainty method will be a mighty tool to study the nonlinear dynamics of the MEMS resonant accelerometer. ...
... According to the finite element analysis method [28], we assume the nominal mean values of L, B, H and m c are 500 µm, 40 µm, 4 µm, 4.66 × 10 −12 kg and the other relevant properties of the resonant beam in this paper are shown in Table 1. ...
This paper aims to develop a resonant accelerometer for high-sensitivity detection and to investigate the nonlinear vibration of the MEMS resonant accelerometer driven by electrostatic comb fingers. First, a nonlinear vibration model of the resonator with comb fingers in a MEMS resonant accelerometer is established. Then, the nonlinear and nonlinear stiffness coefficients are calculated and analyzed with the Galérkin principle. The linear natural frequency, tracking error, and nonlinear frequency offset are obtained by multi-scale method. Finally, to further analyze the nonlinear vibration, a sample-based stochastic model is established, and the uncertainty analysis method is applied. It is concluded from the results that nonlinear vibration can be reduced by reducing the resonant beam length and increasing the resonant beam width and thickness. In addition, the resonant beam length and thickness have more significant effects, while the resonant beam width and the single concentrated mass of comb fingers have little effect, which are verified by experiments. The results of this research have proved that uncertainty analysis is an effective approach in nonlinear vibration analysis and instructional in practical resonant accelerometer design.
Micro-resonators are used intensively in various sensors and actuators. An important consideration for resonator-based structures is to have a great level of balance and stability in the vibrational mode opted for resonator operation. In this paper, the object of study is a double-ended-tuning-fork (DETF) resonator which has the inherent advantages of high sensitivity and improved performance. A systematized evaluation of resonator performance is done through a simulative approach for the basic shapes of DETF resonators found in the literature. The boundary organization and geometric framework of the DETF resonator are extensively examined. Resonator modelling is done using the finite element model tool COMSOL and a novel design of the DETF resonator is presented. The focal point of this study is designing a flexural resonator structure suitable in high frequency design requirements along with improved stress considerations for the resonator design. This study demonstrates the outcomes of simulations like impact on stress at the fixed ends, impact on the anti-symmetric mode of operation like its position, frequency, and modal interference. Lastly, certain simplified design rules for novel micro-DETF resonator designing are also presented.
