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(a) QCSE from a Ge/SiGe MQW 34-µm-long planar waveguide obtained from optical transmission measurements [43], and (b) a stand-alone Ge/SiGe MQW waveguide optical modulator. (c) Scanning electron microscope (SEM) image of the stand-alone optical modulator [46]. (d) Schematic view of SOI-waveguide-integrated Ge/SiGe MQW optical modulator using a butt coupling approach [65]. (e) Schematic and SEM views of a SiGe waveguide-integrated Ge/SiGe MQW optical modulator using a linear taper coupling approach [68] (Reproduced with permission from [43] and [46] © 2011 and 2012 the Optical Society, [65] © 2011 IEEE, and [68] © 2014 Springer Nature).

(a) QCSE from a Ge/SiGe MQW 34-µm-long planar waveguide obtained from optical transmission measurements [43], and (b) a stand-alone Ge/SiGe MQW waveguide optical modulator. (c) Scanning electron microscope (SEM) image of the stand-alone optical modulator [46]. (d) Schematic view of SOI-waveguide-integrated Ge/SiGe MQW optical modulator using a butt coupling approach [65]. (e) Schematic and SEM views of a SiGe waveguide-integrated Ge/SiGe MQW optical modulator using a linear taper coupling approach [68] (Reproduced with permission from [43] and [46] © 2011 and 2012 the Optical Society, [65] © 2011 IEEE, and [68] © 2014 Springer Nature).

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Germanium/Silicon-Germanium (Ge/SiGe) multiple quantum wells receive great attention for the realization of Si-based optical modulators, photodetectors, and light emitters for short distance optical interconnects on Si chips. Ge quantum wells incorporated between SiGe barriers, allowing a strong electro-absorption mechanism of the quantum-confined...

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... the high-speed performance of vertical-incidence modulators, moderate values of 3-dB modulation bandwidth of 3-4 GHz obtained from [39,40,42] was expected to be due to the large diameter of the tested device, and expected to be circumvented by decreasing the device dimensions. In 2011, as in Figure 2a, Chaisakul et al. investigated Ge/SiGe MQW modulators in a planar waveguide structure from 34-µm-long and 64-µm-long planar waveguides [43]. An input fiber was used to directly couple light into the tested device. ...
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... paper showed that a large and sharp optical absorption peak at the LH1-c1 transition could be employed to improve the compactness of the modulators with competitive ER and IL values. In 2012, Chaisakul et al. [46] reported a 3-µm-wide and 90-µm-long Ge/SiGe MQW optical modulator, as shown in Figure 2b,c. The compact waveguide modulator can provide as high as 9-dB ER with a voltage swing of 1 V (~1.5 × 10 4 V/cm) between 3 and 4 V at the optical wavelength of 1435 nm. ...
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... the taper section could be long (~100-300 µm) and increase the device footprint and optical absorption loss, a two-step taper was proposed to shorten the coupling length (~40-80 µm) in [64] and [53]. In 2012, Ren et al. theoretically studied [65] and experimentally demonstrated [66] an SOIwaveguide-integrated Ge/SiGe MQW optical modulator using a butt coupling approach, as shown in Figure 2d for example. The tested device had a very compact footprint of 8 µm 2 and operated with only 1 V swing. ...
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... coupling integration with a large core Si waveguide was experimentally investigated by Claussen et al. [67], which could be adopted for significantly-lower coupling loss. In 2014, Chaisakul et al. [68] demonstrated an evanescent coupling integration between a SiGe waveguide and Ge/SiGe MQWs using a 100-μm-long linear taper, as shown in Figure 2e. An ER of 3-4 dB was simultaneously obtained with 2-3 dB IL over 20 nm spectral ranges from 1430 to 1450 nm using a bias voltage swing between 0 and 3 V. ...

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