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X ray Diffraction of the Si/Ge superlattice structure.

X ray Diffraction of the Si/Ge superlattice structure.

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Fig.2: Schematic of the plane of incidence for the layered structure.
Fig 3: Schematic of dynamical X-ray diffraction 
Fig 4: X-ray reflectivity of the Si/Ge superlattice.
Fig. 5: X ray Diffraction of the Si/Ge superlattice structure.
Application of X-Ray scattering techniques for semiconductor-based quantum structures
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  • Jan 2009
Si-Ge superlattice structures have been prepared by Molecular Beam Epitaxy (MBE) and investigated using X-Ray scattering techniques. The satellite peaks occurring in X-Ray reflectivity and X-Ray diffraction give information about the periodicity of the superlattice. Calculations of the dynamical diffraction reveal that the Ge layer is under compres...
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... oscillations arise due to the multiple interference of waves reflected from the top surface and the interfaces of the superlattice structure. The satellite maxima appear because of the superlattice structure and the small oscillations in between the two satellite maxima are the Kiessig fringes whose period depends on the total multilayer thickness t= ND. Figure 5 shows the X ray Diffraction of the superlattice structure. The highest intensity peak corresponds to Si substrate. ...