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Being currently performed on highly complex and expensive equipments, active optical alignment of single mode 10 Gb/s transmitters and receivers is proving to be the bottleneck process for high volume manufacturing. In order to alleviate this production burden, new integrated technologies are required to align micro-components like micro-lenses and...
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Citations
... Commercially flying laser bar code scanner require at least 10 o to 30 o scanning angle for capturing the laser light reflected from the barcode [26,27]. The resonant scanner is widely-used in fine tracking systems [28][29][30]. It is possible to create a two-dimensional information display with the rapid response of a resonant scanner and a laser [30,31]. ...
... Design consideration and fabrication of a scanner is the crucial process for MEMS design. The MEMS devices usually consist of a mobile compliant structure held by mechanical springs and displaced actuators [29]. One of the issues of the MEMS design considerations is the reliability and the life span [30]. ...
... A common phenomenon in torsional scanner devices are known as static friction (stiction) which is defined as a combination of one or more 'adhesion forces'. This phenomenon occurs when two surfaces are contacted due to electrostatic forces, drying process, shock loading, rapid acceleration, or inadequate stiffness [29]. There are several solutions to avoid or minimize the aforementioned adhesion forces. ...
The design parameters of torsional spring mechanism resonant scanner are the scanning angle, frequency and also power consumption. Generally, high resolution scanning is desired due to the reason of smaller devices are developed. This review covers the linear optical and rotational scanner technologies for both the MEMS and non-MEMS. The overview of scanner technology is discussed accordingly to the recent researches and development performed on the scanning technology. The review is categorized into several sub-topics according to the scanner’s components. The component includes the actuator used, the compliant structure and the control system. Furthermore, damping characteristics are also presented in this review as it affected the scanning angle for the scanner. Finally, the application of the scanner is discussed conferring to the fields. The fields include light detection and ranging systems, medical and also biomedical systems. This review serves as the reference for the mechanical design of the scanning devices. © 2016, The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg.
