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Typical four types of semiconductor images and defect regions. (First and third images have permission from IOP Science and IEEE, respectively)

Typical four types of semiconductor images and defect regions. (First and third images have permission from IOP Science and IEEE, respectively)

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C-step in the FAST-MCD method.
Lattice points generation.
Typical four types of semiconductor images and defect regions. (First...
The flow chart of our algorithm
+9 Cosine similarities and repeated regions for four types of images....
Defect inspection in semiconductor images using FAST-MCD method and neural network
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  • Oct 2023
Most defect inspection methods used in semiconductor manufacturing require design layout or golden die images. Unlike methods that require such additional information, this paper presents a method for automatic inspection of defects in semiconductor images with a single image. First, we devise a method to classify images into four types: flat, line...
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... In the field of semiconductor manufacturing, Yu et al. [13] proposed a method for automatic inspection of defects in semiconductor images using the FAST-MCD method and neural networks. The method classified images into different types and detected defects by estimating the parameters of the inlier distribution. ...
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