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Thermocompression and handle release steps of the wafer bonding process. 

Thermocompression and handle release steps of the wafer bonding process. 

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We present an overview of a new monolithic fabrication technology known as three-dimensional integration. D integration refers to any process by which multiple conventional device layers may be stacked and electrically interconnected. By combining state-of-the-art single-wafer integration with a high-density inter-wafer interconnect, our D integrat...

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... is due to the fact that copper generally resists hydroxide attack, and zirconium dissolves extremely rapidly in dilute HF (much faster than does silicon dioxide). This handle wafer attachment scheme is shown below in Figure 7. ...

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