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A high power (2 kW, CW) magnetron-based microwave system operating
at 2.45 GHz has been designed, tested, characterized, and used to produce plasma.
The system consists of a microwave source, an isolator, a directional coupler, a threestub
tuner, a high voltage break, a microwave vacuum window, and a microwave
launcher. These microwave components w...
Contexts in source publication
Context 1
... coupling factor is fixed based on the availability of the microwave sensor and directivity (how better input port is isolated from isolated port) should be not less than 20 dB. The schematic diagram of the directional coupler is shown in figure 2. It has waveguide as a main line, two coupling holes for power coupling, loop plate, loop holder, and power sampling connector. ...
Citations
... During the last few decades, researchers have tried to modify the performance of the ECRIS through modification in microwave injection, the ECR cavity, magnetic field distribution, and the extraction system for the reduction in beam emittance and enhancement of high beam intensities. [12][13][14][15][16][17] It has been experimentally observed that the ECRIS beam emittance and intensities mainly depend on the microwave coupling, magnetic field configuration inside the ECR cavity, and plasma electrode (PE) aperture, shape, and potential distribution on the extraction electrodes. 18,19 Different mechanical and simulated approaches are ...
... The ridge waveguide choice is due to its lower cutoff frequency and impedance, besides having a wide bandwidth. 15,20,21 All these properties make it a better option as compared to a standard waveguide WR284. Therefore, an analytical approach is made to find out the number of ridge steps (N), the ridge section's impedance (Zn), the length of the ridge section (Ln), the gap between the ridge sections (dn), and the ridge section's width (s). ...
... The electric field profile inside the cavity for the TE 111 mode becomes stronger with the increase in microwave power. 9,12,15,21,23 Therefore, the coupling results have been simulated at different microwave power levels (1, 10, 50, and 100 W). It is to be noted that the input power coupled to the cavity is proportional to the square of the amplitude of the electric field inside the cavity, as shown in Fig. 6. ...
A project on developing a 2.45 GHz microwave ion source based compact ion implanter and plasma diagnostic facility has been taken up by the Central University of Punjab, Bathinda. It consists of a double-wall ECR plasma cavity, a four-step ridge waveguide, an extraction system, and an experimental beam chamber. The mechanical design has been carried out in such a way that both types of experiments, plasma diagnosis and ion implantation, can be easily accommodated simultaneously and separately. To optimize microwave coupling to the ECR plasma cavity, a four-step ridge waveguide is designed. Microwave coupling simulation for the ECR plasma cavity has been performed at different power inputs using COMSOL Multiphysics. An enhanced electric field profile has been obtained at the center of the ECR plasma cavity with the help of a four-step ridge waveguide compared to the WR284 waveguide. The magnetic field distribution for two magnetic rings and the extraction system’s focusing properties have been simulated using the computer simulation technique. A tunable axial magnetic field profile has been obtained with a two permanent magnetic ring arrangement. The dependency of the beam emittance and beam current on accelerating voltages up to 50 kV has been simulated with different ions. It shows that ion masses have a great impact on the beam emittance and output current. This facility has provision for in situ plasma diagnosis using a Langmuir probe and optical emission spectroscopy setups. This system will be used for ion implantation, surface patterning, and studies of basic plasma sciences.
... In most studies, an initial geometry that has been designed beforehand is typically used. Then the approximate specification is predominantly achieved through a trial and error process, and the geometry is subsequently modified [10], [11]. Both of these are time consuming procedures. ...
This study simulated and designed a cyclotron cavity using the circuit model. Based on the full wave electromagnetic numerical simulation, this study proposes an accurate circuit model for all sections of the cavity which allows the investigation of the effects of different parts of the cavity on its characteristics. This procedure could be utilized to estimate structural parameters to avoid time consuming numerical simulations. The resonance frequency of the designed cavity is 71 MHz. A full wave electromagnetic simulation was done based on the finite difference time domain method using CST Microwave Studio.
