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... minimize temperature gradient and to recognize sub-cooled water, a silicon integrated dew point mir- ror ( Fig.1) containing a dew/frost capacitance detec- tor, a RTD thermometer and two heaters was designed [1]. ...

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A review of miniaturised humidity sensors is presented. Recent achievements in capacitive-, hygrometric-, gravimetric-, optical- and integrated sensors are discussed. Attention is paid to a general perspective of miniaturised humidity sensors, emphasising on integration issues and technological challenges. A table summarising most of the reviewed devices is included.
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