Figure 4 - uploaded by Vlad Voronenkov
Content may be subject to copyright.
Download
View publication
The dependence of the sublimation temperature of ammonium chloride on the partial pressures of ammonia and hydrogen chloride.

The dependence of the sublimation temperature of ammonium chloride on the partial pressures of ammonia and hydrogen chloride.

Source publication
Figure 1. (a) The main products of gallium chlorination in a mixture of...
Figure 2. (a) Schematic drawing of the reactor growth chamber. (b)...
Figure 3. Equilibrium partial pressure of gaseous decomposition...
Figure 4. The dependence of the sublimation temperature of ammonium...
Figure 5. (a) Photograph of a freestanding GaN crystal with a thickness...
Hydride Vapor-Phase Epitaxy Reactor for Bulk GaN Growth
Preprint
Full-text available
  • Dec 2019
An HVPE reactor for the growth of bulk GaN crystals with a diameter of 50 mm was developed. Growth rate non-uniformity of 1% was achieved using an axisymmetric vertical gas injector with stagnation point flow. Chemically-resistant refractory materials were used instead of quartz in the reactor hot zone. High-capacity external gallium precursor sour...
Cite
Download full-text

Contexts in source publication

Context 1
... p HCl and p N H3 are the partial pressure of GaCl and ammonia, respectively, and µ N H3 , µ HCl , µ N H4Cl are the standard chemical potentials of the species. The dependence of the temperature required to prevent NH 4 Cl condensation on the partial pressures of hydrogen chloride and ammonia is shown in Fig. 4. If gallium chloride does not completely react in the growth chamber, the formation of the GaCl 3 :NH 3 complex is possible in the exhaust. This substance has a boiling point of 438 • C [51] and requires significantly higher heating of the exhaust compared to ammonium chloride to prevent ...
Context 2
... p HCl and p N H3 are the partial pressure of GaCl and ammonia, respectively, and µ N H3 , µ HCl , µ N H4Cl are the standard chemical potentials of the species. The dependence of the temperature required to prevent NH 4 Cl condensation on the partial pressures of hydrogen chloride and ammonia is shown in Fig. 4. If gallium chloride does not completely react in the growth chamber, the formation of the GaCl 3 :NH 3 complex is possible in the exhaust. This substance has a boiling point of 438 • C [51] and requires significantly higher heating of the exhaust compared to ammonium chloride to prevent ...