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Structure of a nozzle-diffuser piezoelectric valveless micropump. (a) Micropump after assembling. (b) Explosive view of a nozzle-diffuser piezoelectric valveless micropump. The microchannels are micromachined on PMMA boards. The top layer, the bottom layer, a piezoelectric membrane, an inlet and an outlet pipe are assembled with glue. 

Structure of a nozzle-diffuser piezoelectric valveless micropump. (a) Micropump after assembling. (b) Explosive view of a nozzle-diffuser piezoelectric valveless micropump. The microchannels are micromachined on PMMA boards. The top layer, the bottom layer, a piezoelectric membrane, an inlet and an outlet pipe are assembled with glue. 

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Unexpected gas bubbles in microfluidic devices always bring the problems of clogging, performance deterioration, and even device functional failure. For this reason, the aim of this paper is to study the characterization variation of a valveless micropump under different existence conditions of gas bubbles based on a theoretical modeling, numerical...

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... micropump is laminated with two pieces of micromachined polymethyl methacrylate (PMMA), piezoelectric membrane, and auxiliary parts, as shown in Fig. 2. The microchannels and pump chamber in the micropump are directly micromachined with a home-made ultraprecise manufacturing machine on acrylic boards, and the piezoelectric diaphragm is bonded on top of the cover layer PMMA. Glues are used for assembling all the compo- nents to prevent the leakage and all the micropump parameters are ...

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... When the water reservoir is placed at the nozzle side that has 6 μm diameter orifices, a net flow occurs towards the diffuser direction that has an array of holes with a diameter of 50 μm. This mechanism is frequently used in nozzle-diffuser-type microfluidic pumps, but they implement an elastic membrane and an intermediate chamber (Singhal et al. 2004;Ahmadian and Mehrabian 2006;Nisar et al. 2008;Li et al. 2013;Zhao et al. 2017). In traditional nozzle-diffuser pumps, the chamber is first supplied with fluid by diffuser action during a chamber volume expansion, and then the fluid is pumped through the second diffuser during the chamber volume contraction. ...
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