Figure 6 - uploaded by Jun Ni
Content may be subject to copyright.
Source publication
This paper presents the design, analysis and fabrication of a piezoelectric multi-axis stage based on a new stick-and-clamping actuation technology for miniaturized machine tool systems, referred to as meso-scale machine tool (mMT) systems. In the stick-and-clamping actuation system, shearing/expanding piezoelectric actuators, an inertial mass and...
Contexts in source publication
Context 1
... 2-DOF stick-and-clamping actuation technology was implemented in the innovative design of the piezoelectric multi-axis stage that is shown in figure 6. As can be seen in figure 6, three two-mode shearing piezoelectric actuators were located 120 • apart in a circular fashion, and three expanding piezoelectric actuators were also positioned in the same manner. ...
Context 2
... 2-DOF stick-and-clamping actuation technology was implemented in the innovative design of the piezoelectric multi-axis stage that is shown in figure 6. As can be seen in figure 6, three two-mode shearing piezoelectric actuators were located 120 • apart in a circular fashion, and three expanding piezoelectric actuators were also positioned in the same manner. As a result, six piezoelectric actuators were positioned 60 • apart in a circular way. ...
Similar publications
High performance hydrostatic bearing are increasingly in demand in ultra-precision machine tools. To calculate the static performance of hydrostatic bearing more accurately, a fluid-structure interaction model is proposed. The temperature rise and pressure distribution are calculated by computational fluid dynamics (CFD), the influence of which on...
Citations
... Backward motion could cause undesired consequences, such as noise (chatter), high energy loss (friction), surface damage (wear), and component failure (Berman et al. 1996). Thus, backward motion could interrupt the application of stick-slip drives to precision applications and must be properly compensated (Lee et al. 2007). Therefore, numerous studies have been conducted to reduce or eliminate undesired backward motion in stick-slip drives. ...
... The compensation of, not the elimination of, the backward motion was considered. Lee et al. (2007) developed a piezoelectric multi-axis stage based on stick-clamping actuation technology. The slow increase of the saw-tooth input to the actuator drives a slider, which is located on the tips of the actuators, similar to the conventional stick-slip principle. ...
We develop a rotary motor to reduce backward motion in stick–slip with an active clamp mechanism. Backward motion refers to the undesired movement observed when operating a rotary stick–slip motor powered by a piezoelectric actuator under actual conditions, where the rotor rotates in the opposite direction to the intended rotation. This could cause imprecision and inaccurate motion. The conventional stick–slip motor relies on contact with the rotor to induce rotation. The proposed active clamp mechanism adjusts the contact distance with the rotor, ensuring contact is maintained only when the rotor is rotating. This helps reduce backward motion. Additionally, implementing this mechanism using the conventional method requires one stick–slip module for rotation and two inchworm drive modules for clamping. In contrast, the proposed mechanism consists of a single module each for the driving actuator and clamping actuator. A preliminary model with a dimension of 34 × 27 mm was constructed for experimentation. Through the experiments, it was confirmed that the proportion of backward motion relative to the initial movement in one step decreased by approximately 20%. Furthermore, with the reduction in backward motion, the rotational displacement per step was confirmed to improve by about twice, increasing from 17 to 33 millidegrees.
... Ultra-precision positioning is quite demanding for many manufacturing processes and inspection techniques. For example, the ultra-precision machining, micro-nano manufacturing, ultra-largescale integrated circuit manufacturing, diamond turning and grinding, and scanning probe microscopy require high position accuracy (Sang et al., 2007;Faa-Jeng Lin et al., 2009;Cheng et al., 2015;. Different from the traditional positioning system using ball screw, the piezoelectric actuator (PA) has been successfully implemented in many ultra-precision positioning mechanisms due to its advantages of fast response, small size, large output force range, and ultra-high resolution (Zhu and Rui, 2016). ...
In this study, a controller based on two compensators is developed to support a two-axis piezo-scanning mechanism for tracking control. The hysteresis compensator is designed based on a Prandtl–Ishlinskii hysteresis model in order to reduce the nonlinear hysteresis effect of a piezoelectric actuator. Furthermore, to compensate for uncertainties due to parametric variations, hysteresis-compensated error, and un-modeled dynamics, the uncertainties compensator based on the neural network disturbance observer is proposed. The developed controller is verified with regard to control performance by experiment. Those two observers are used to complete hysteresis compensation and disturbance compensation, which will not reduce the stability and bandwidth of the system and improve the control accuracy. Experimental results show that the proposed hybrid controller can overcome the mentioned nonlinearity and uncertainty efficiently and preserve good positioning accuracy with high-bandwidth varying frequencies (1–150 Hz).
... With the rapid development of science and engineering, ultra-precision positioning technology has been gradually becoming a common supporting technology in many fields such as integrated circuit, optical engineering, high-end manufacturing, biomedicine, and MEMS [1][2][3]. The actuator, which plays a big role, is one of the key parts in the ultra-precision positioning system. ...
Piezoelectric actuators have been applied in many research and industrial fields. However, how to improve the working performance of piezoelectric actuators is still a hot issue. Up to now, many new motion principles have been developed for new piezoelectric actuators. The bionic type piezoelectric actuator is a kind of the novel piezoelectric actuators, and it imitates the motion style of different creatures in nature to overcome the limitation of traditional piezoelectric actuators. Bionic type piezoelectric actuators are able to achieve large working stroke or large output force, which is of great significance for the development of piezoelectric actuators. The principle, design, and future of some bionic type piezoelectric actuators are discussed in this chapter.
... High-performance positioning systems have been widely used with the rapid development of the micro-nano machining, high-precision machining, and camera focusing system [1,3,15]. According to the position accuracy, positioning systems can be divided into coarse and precision positioning systems. ...
... Most of piezoelectric actuators used in positioning systems usually run in a quasi-static state. [1][2][3][4][5][6][7]. Li et al. [1] designed a positioning platform based on the inchworm principle that can achieve linear and rotary motions. ...
... The linear motion has a resolution of 0.15 μm and a maximum velocity of 105.31 μm/s. Sang Won Lee et al. [3] presented a piezoelectric multi-axis stage based on a new stick-and-clamping actuation technology for the positioning system of the mesoscale machine tool in 2007. In a 1-DOF linear motion test, the piezoelectric multi-axis stage can achieve a speed of 1.11 mm/s with a resolution of 0.6 μm in the x and y directions. ...
A resonant-type piezoelectric screw motor for one degree of freedom (1-DOF) positioning platform is proposed, fabricated, and investigated in this article. The motor comprises a driver and a screw rod. The driver is composed of four transducers, a nut seat, and a flange nut. The flange nut is bolted connected on the nut seat, and the four piezoelectric transducers are connected with the nut seat by right-angle flexible hinges. Each piezoelectric transducer comprises two piezoelectric stacks and one displacement amplifier. Driven by the four piezoelectric transducers, elliptical vibration is generated by the driver, which is used to actuate the screw rod to realize the linear movement. The driver is analyzed using the finite element analysis software ANSYS. The proposed motor and positioning platform prototype are manufactured, assembled, and tested. The performance of the developed piezoelectric screw motor shows its applicability and effectiveness for the 1-DOF positioning platform with a large force. Experiments demonstrate that the maximum velocity of this motor is 10.53 mm/s without mechanical load and the maximum output force of the platform can reach 17.19 N when the excitation voltage is 230 Vp-p at 365 Hz.
... The systems outperforms with very high positional resolution in the range of millimeter to sub nanometer and also capable to produce force and torque in the range of N to mN [10]. The PEA driven positioning systems were developed with various configurations such as 1-degree-of-freedom (1-DOF) positioning systems with flexure hinge mechanisms [11,12], stick-slip actuators [13], multiple PEA -driven inchworms [14], walking actuators [15,16], multi-DOF positioning systems with series mechanism [17], parallel mechanism [18], stick and clamping actuators [19,20]. Most of the performances of PEA driven systems were significantly degraded due to dynamic issues namely hysteresis and creep effects [21]. ...
The piezoelectric actuators are widely used to realize high precise motion with fractional force and torque in both linear and rotary joints of the micro-systems. The control system plays a major role on overall dynamics including positioning and tracking objectives in piezoelectric actuator based micro-systems. The piezoelectric actuator inherently has its own non-linear behaviour such as hysteresis, creep, thermal drift and vibration which deteriorates overall performances including stability of the developed systems. This article reviews the various efforts for solving the major issues such as hysteresis and creep. It has been inferred that generalized control solution is not appropriate for all kind of piezoelec-tric actuators. Hence it has been observed that appropriate control strategies has to be implemented for reducing tracking error, position error and non-linear characteristic of piezoelectric actuator namely hysteresis and creep.
... The development of nanotechnology has solved many problems in the industrial and scientific fields (Kudela et al. 2018;Nah and Zhong 2007;Liang et al. 2017;Dsouza et al. 2018;Lee et al. 2007). Nanomanipulation usually requires a microscopic operating system to complete the movement, docking, assembly (Tang et al. 2012;Hui et al. 2011), etc., in order to achieve complex high-precision operations, the space limitations of the vacuum chamber place higher demands on the volume of the cross-scale precision-operated motion platform. ...
In order to achieve the nano-operation in a limited space, a precision motion platform with a cubic centimeter volume based on the principle of inertial stick–slip driving is proposed in this paper. The mechanical structure and the operating principle are discussed. Kinematic models are used to analyze the performance of the prototype. To investigate the working performance of the prototype, a series of experiments are carried out. Experimental results show that the displacement outputs is related to the parameters of the electrical signal. The maximum moving speed of the platform reaches 13.1 mm/s when the driving frequency is 3.1 kHz. The maximum single step displacement reaches 4.8 μm. Through proper driving voltage and frequency, the proposed prototype can produce a satisfactory velocity.
... Stick-slip driving technology has been popularized and applied because of its compact structure, powerful driving force, high resolution, and theoretically unlimited displacement. This technology has profound implications for medical and biological sciences (Kudela et al. 2018), ultra-precision machining (Nah and Zhong 2007), semiconductor industry (Liang et al. 2017), precision inspection, operation and assembly of micro-mechanical parts (Dsouza et al. 2018;Lee et al. 2007), and other frontier fields (Tang et al. 2012;Liu et al. 2012). However, it is not easy to achieve stable high precision motion since there are some problems such as one-step displacement instability, besides, problems such as small step by step, slow velocities (Wang et al. 2016), etc. also seriously restrict the development of inertial stickslip motion. ...
The stick–slip driving is widely used in the field of nanotechnology because of its high resolution and theoretically unlimited displacement. However, it suffers from such problems as low velocity and one-step displacement instability. In this paper, a method to improve the performance of inertial stick–slip movement from the perspective of overturning moment is proposed. Firstly, modeling and mechanical analysis of the inertial stick–slip platform structure. Then analyzing the influence of overturning moment through the conservation of energy and getting calculation results. Finally, building an experimental system for verification and finding that the height of the inertial force dropped by 5 mm, and the prototype single step displacement increased by 26%. Through theoretical calculation and experiment, the influence of overturning moment on inertial stick–slip motion is verified, which provides further guidance for inertial stick–slip motion platform design.
... Lee et al. proposed a stage with stick-and-clamping actuation technology. They used some shearing and expanding piezoelectric actuators to achieve the demanded motion [27]. Zhang The working surfaces of the actuator were fabricated by employing hot filament chemical vapor deposition and ion beam etching. ...
Stick-slip piezoelectric actuators have been widely employed in those fields where both large working stroke and high positioning accuracy are required. However, the problems of backward motion and relatively low load capability limit their applications, and these two problems are usually contradictory. Attempted to solve these two problems at the same time, in this study, a composite flexible hinge was designed to actively control the contact force between the driving foot and the slider of a stick-slip piezo-driven linear actuator. To confirm the validity, a prototype actuator was designed and fabricated. The dimensions of the actuator in X, Y and Z directions are about 80 mm, 60 mm and 20 mm, respectively. The output characteristics of the actuator were evaluated by experiments. The results showed that without the active control of the contact force, the maximum speed being free of external load were 1.39 and 2.18 mm/s when the driving frequencies were 100 and 200 Hz, respectively. Correspondingly, the maximum horizontal loads of the actuator were 25 g and 50 g, respectively. However, with the active control of the contact force, the maximum speed were 1.74 and 4.1 mm/s under the driving frequency of 100 and 370 Hz, respectively. Moreover, the maximum horizontal loads under 100 Hz and 200 Hz were improved to be 40 g and 70 g, respectively.
... The multi-degree-of-freedom (multi-DOF) motor has more flexible motion compared to the single-DOF motor [7][8][9]. Nowadays, many structures which can realize rotary and linear motion and screw-type motion have been studied. The screw-type motion is a special coupled motion of rotary motion and linear motion. ...
A novel impact two-degree-of-freedom (2-DOF) motor based on the decomposed screw-type motion of a piezoelectric actuator (PA) has been proposed. The fabricated prototype motor has a maximum diameter of 15 mm and a length of 100 mm which can produce a maximum torsional angle of about 1000 μrad and a maximum longitudinal displacement of about 1.03 μm under a saw-shaped driving voltage with 720 Vp-p (peak-to-peak driving voltage). When the axial prepressure generated by the spring is about 1N and the radial prepressure generated by the snap ring is about 14 N, the fabricated motor realizes rotary motion with the driving frequency from 200 Hz to 4 kHz. When the axial prepressure generated by the spring is about 11.7 N and the radial prepressure generated by the snap ring is about 21.1 N, the fabricated motor realizes linear motion with the driving frequency from 2 kHz to 11 kHz. In the experiments, the prototype motor can achieve 9.9 × 105 μrad/s rotary velocity at 2 kHz and it can achieve 2.4 mm/s linear velocity at 11 kHz under the driving voltage of 720 Vp-p.
... Firstly, if forward and backward movement of the actuator are sufficiently fast or superposed by high-frequency oscillations, there is no stable phase of stiction. Secondly, there are motors (e.g., the nanopositioner by Voigtländer et al. [108] or the "stick-and-clamp" mechanism by Lee et al. [109]) which use alternating phases of stiction and sliding for propulsion, but not the inertia of the driven object. ...
... [110][111][112][113][114][115][116][117][118][119][120][121][122][123][124][125][126][127][128][129]; [213] (pp. [97][98][99][100][101][102][103][104][105][106][107][108][109][110][111][112]). The voltage-strain relationship in piezoelectric actuators is often described by linear equations as a first approximation, but in fact shows several nonlinear effects. ...
Piezoelectric inertia motors—also known as stick-slip motors or (smooth) impact drives—use the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In addition to the typical advantages of piezoelectric motors, they are especially suited for miniaturisation due to their simple structure and inherent fine-positioning capability. Originally developed for positioning in microscopy in the 1980s, they have nowadays also found application in mass-produced consumer goods. Recent research results are likely to enable more applications of piezoelectric inertia motors in the future. This contribution gives a critical overview of their historical development, functional principles, and related terminology. The most relevant aspects regarding their design—i.e., friction contact, solid state actuator, and electrical excitation—are discussed, including aspects of control and simulation. The article closes with an outlook on possible future developments and research perspectives.
