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Second computer analysis of micromirror

Second computer analysis of micromirror

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In this study, it is aimed to perform Finite Element Analysis (FEA) of micromirror based on Micro-Electro-Mechanical Systems (MEMS) and to examine the nonlinear and dynamic responses of this system. Micromirror devices are indispensable, especially for optical systems and form the basis of them. In this work, dynamic and nonlinear responses of micr...

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