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Schematics of the 3-D FE mesh used for ANSYS simulations of the clamped–clamped beam. The domain in light gray is the dielectric, and the one in dark gray is the microbeam.  

Schematics of the 3-D FE mesh used for ANSYS simulations of the clamped–clamped beam. The domain in light gray is the dielectric, and the one in dark gray is the microbeam.  

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A consistent one-dimensional distributed electromechanical model of an electrically actuated narrow microbeam with width/height between 0.5–2.0 is derived, and the needed pull-in parameters are extracted with different methods. The model accounts for the position-dependent electrostatic loading, the fringing field effects due to both the finite wid...

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... [34] on the accuracy of different simulation options, we used the tool ROM 144. We adapted the "Sample Miniature Clamped-Clamped Beam Analysis" [35, Example 6.6] to a narrow microbeam by extending the surrounding dielectric medium in order to accurately model the fringing fields. The region analyzed and its discretization into FEs are reported in Fig. 6 for the clamped-clamped microbeam; only half of the system is modeled due to symmetry conditions, and a refined mesh is employed in the gap region. In particular, the dielectric medium is considered as a block of length 100 , semi-width of 24 , and thickness of 24 . For the cantilever microbeam problem, the dielectric domain has been ...

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