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In this paper a sensor based on MEMS resonators is proposed for digital microfluidics applications. The sensor system consists of a disk as active area immobilized for capturing any special particles. This disk can azimuthally vibrate by means of two in phase electrostatic actuators both sides. Two capacitive sensing elements determine the vibratin...
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In this paper, a MEMS-based biosensor composed of coupled microresonators is proposed for digital microfluidics applications. This sensor consists of three parts including electrostatic comb-drive actuators, capacitive sensing, and active area located in the center of the structure. All applied resonators are in the same sizes which are connected w...
Citations
... Recently, some novel micromechanical resonator structures have been proposed as a biosensor to overcome electrical interference while using them to detect the target molecules of a droplet (Eidi et al. 2019;Mehdipoor and Ghavifekr 2020). These structures prevent the droplets from contacting the electrical electrodes of the sensor structure. ...
... On the other hand, electrostatic actuators have been used to generate mechanical force in these structures, which is a low-cost method compared to other methods. (Eidi et al. 2019(Eidi et al. , 2022(Eidi et al. , 2023Mehdipoor and Ghavifekr 2020). ...
... In this paper, inspired by the works reported in Eidi et al. (2019Eidi et al. ( , 2022Eidi et al. ( , 2023; Mehdipoor and Ghavifekr (2020), a novel micromechanical resonator array is proposed and designed as an implantable biosensor with its sensitive element at the end of the array. This new design allows the array to be embedded inside a needle, and when the tip of the needle enters the vein, the sensitive element of the designed array is also at the needle tip and in contact with blood. ...
Detection and measurement of specific molecules in person's blood is always important in determining his or her health status. Immediate diagnostic methods are essential in this regard, especially when a particular disease is spreading. In this paper, an implantable and real-time molecule detector is proposed for blood analysis which is possible to fabricate using Micro-Electro-Mechanical Systems (MEMS) technology. Inspired by mechanical resonator sensors which are proposed to droplet analysis for lab-on-a-chip applications, a design based on a micro-mechanical resonator is proposed in this work as an implantable biosensor. It can be used inside a needle and its application is suggested in this paper. In order to evaluate the quality of the proposed design, simulations are performed by COMSOL and the results are presented. Also, the fabrication method of this design is presented.
... The integrated MEMS resonator provides compact, lightweight, and low-cost devices. The use of the integrated MEMS resonator structure has been proposed in various applications [28][29][30][31]. The integrated photonic circuits have also been applied in quantum communication and molecular sensing [32]. ...
A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50 µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space–time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59 dB, 0.93 dB, 1.75 dB, and 1.16 dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35 µm⁻², 0.90 µm⁻², 0.97 µm⁻², and 0.81 µm⁻², respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31 prads⁻¹mm³ (electrons)⁻¹, 2.27 prads⁻¹mm³ (electrons)⁻¹, 2.22 prads⁻¹mm³(electrons)⁻¹, and 2.38 prads⁻¹mm³(electrons)⁻¹ are obtained, respectively.
... The integrated MEMS resonator provides compact, lightweight, and low-cost devices. The use of the integrated MEMS resonator structure has been proposed in various applications [28][29][30][31]. The integrated photonic circuits have also been applied in quantum communication and molecular sensing [32]. ...
A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space-time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, where the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35µm ⁻² , 0.90µm ⁻² , 0.97µm ⁻² and, 0.81µm ⁻² , respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31prads ⁻¹ mm ³ (electrons) ⁻¹ , 2.27prads ⁻¹ mm ³ (electrons) ⁻¹ , 2.22prads ⁻¹ mm ³ (electrons) ⁻¹ , 2.38prads ⁻¹ mm ³ (electrons) ⁻¹ are obtained, respectively.
Operating micro-nanoscale sensors in conductive liquids faces challenges due to liquid damping and high feedthrough floor, leading to low signal-to-feedthrough ratio. This work presents an innovative feedthrough engineering technique for resonant sensors immersed in ionic liquids, eliminating the need of isolation layers or additional processing for the sensing device. By leveraging the feedthrough path through substrate, the proposed technique counteracts the feedthrough induced by the ionic liquid, and successfully resumes the desired motional signal of the sensor. A thin-film piezoelectric-on-silicon (TPoS) resonator and oscillator operated in ionic environment are introduced to demonstrate that this technique not only enables the measurement of resonant signals in conductive liquids but also offers suitable options regarding the mode shape and resonant frequency of the sensor in different ion concentration environments. Additionally, the cancellation phenomenon shows potential as a concentration detector for ionic liquids. The fundamental (5MHz) and higher (15MHz) frequency modes of the PZT-based resonator are thoroughly investigated. Measurements show that regardless of the frequency where it operates, the resonator features decent stopband rejection (SBR) of around 18
$\sim$
20dB using the cancellation approach, which is even better than operating in deionized water. When employed as an oscillator, the results indicate a remarkable frequency resolution of approximately 1.8 Hz for both fundamental and higher mode frequencies. These measurements highlight the improved resonant behavior and real-time sensing capability offered by the proposed technique in conductive liquids. Such MEMS resonant transducers using this engineered feedthrough cancellation mechanism would serve as crucial building blocks for chemical and biosensing applications. 2023-0194
Mass sensors based on MEMS resonators are widely used to detect and measure the amount of specific molecules. Also, electrostatic actuators are widely used to actuate resonators. The resonance frequency depends on the applied alternating voltage. Electrostatic capacitors can be used as sensing elements to record the mechanical resonance frequency. The mechanical displacement in the resonator changes the sensing element capacitance level proportional to the alternating voltage. In this work, actuators based on comb drive capacitors are optimized using high dielectric material. The proposed sensor can be fabricated in different scales, according to any application. The performance of the sensor and its quality are evaluated by finite element simulation. Also, the proposed sensor is fabricated and analyzed by experimental test to determine its mass sensitivity which is reported in the range of 0.01 ng.
