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Schematic of the optical configuration for micro-motion measurement.  

Schematic of the optical configuration for micro-motion measurement.  

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A new velocimetry system has been developed for use in microdevices that incorporate silicon as their structural material. The system is designed to illuminate and measure particle and surface motions using infrared wavelengths, taking advantage of the fact that silicon is largely transmissive to light with wavelength above 1 μm. The system allows...

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Citations

... Bos et al. 2011). As silicon is semi-transparent (50-60%) to infrared light with wavelengths between 1.1 and 6.0 μ m, it is possible to look into silicon devices using infrared imaging (Chung et al. 2003;Han et al. 2004;Liu et al. 2005). In our prior work (van der Bos et al. 2011), this was done in MEMS printhead at a shortwave infrared (SWIR) wavelength of 1.2 μ m. ...
... Therefore, the particles could not be tracked to measure flow velocities. However, in future work, the DOD frequency could be substantially lowered to decrease the time-averaged flow velocities which potentially allows for particle tracking velocimetry (PTV) or particle image velocimetry (PIV) such as described by Chung et al. (2003); Han et al. (2004) and Liu et al. (2005). When the actuation was halted, the bubbles dissolved, and in the absence of acoustic streaming the dirt particles were trapped in the viscous surrounding, visible at t = 40.67 ...
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Piezo-acoustic inkjet printing is the method of choice for high-frequency and high-precision drop-on-demand inkjet printing. However, the method has its limitations due to bubble entrainment into the nozzle, leading to jetting instabilities. In this work, entrained air bubbles were visualized in a micrometer scale ink channel inside a silicon chip of a MEMS-based piezo-acoustic inkjet printhead. As silicon is semi-transparent for optical imaging with shortwave infrared (SWIR) light, a highly sensitive SWIR imaging setup was developed which exploited the optical window of silicon at 1550 nm. Infrared recordings of entrained bubbles are presented, showing rich phenomena of acoustically driven bubble dynamics inside the printhead. Graphic abstract Open image in new window
... Although most popular manufacturing techniques offer the possibility to realize transparent windows or sealings, many fluidic devices or components made from silicon or metal do not feature optical access to the fluid flow. In the case of silicon, its transparency in the infrared region can be capitalized upon, so infrared micro-particle image velocimetry can be used to investigate the fluid flow [10][11][12]. ...
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Optical flow analysis methods such as particle image velocimetry can only be performed in fluid systems or components with optical access. Many fluidic components, such as metallic tubes, do not typically feature optical accessibility. A new silicone-based molding technique is presented that makes it possible to replicate non-transparent fluidic components as models with optical accessibility that can be used to perform optical flow analysis. Furthermore, to avoid errors due to refraction, a test fluid is presented whose refractive index matches that of the silicone material of the replication. This new method allows flows to be analyzed in tubes or similar components with diameters in the range of only a few millimeters. An initial test was performed demonstrating the proof of concept and the velocity field of the flow inside a manifold was measured using a micro-particle image velocimetry setup. The study showed that both simple parts like tubes and complex parts such as manifolds can be replicated and investigated.
... Burner is the round entry with air and fuel concentric jet ; Uniform layered materials is simplified to the uniform distribution cylinder in furnace [12][13] , as in figure 2 shown. ...
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... Han et al. [23] first demonstrated an micro-infrared, IR mPIV technique by measuring the velocity field in a micro-nozzle with a 300 mm depth and 40 mm throat width. The solid motion of a micro-rotor was also measured with this infrared diagnostic system. ...
... In this case the IR range would be advantageous for measuring the flow fields in micro-devices (Han et al. [23]; Liu et al. [24]; Franssila et al. [25]; Patil and Narayanan [18]; Golonka [26]; Hardt [27]; Jones [28]). ...
... This material has been widely used to create microfluidic structures and has the added benefit of being optically transparent. Although transparent microfluidic devices are ideal for visual observation, lPIV techniques can be expanded for fluid investigations inside opaque devices, including silicon using infrared illumination (Han and Breuer 2001; Liu et al. 2005) or a wide array of substrates with X-ray illumination ( Kim 2005, 2008b; Kim and Lee 2006). Components and characteristics of a traditional lPIV system are discussed in the following section, starting with volume illumination. ...
... Similar to X-rays, IR lPIV can be applied to measure the velocity profile within silicon microchannels. Conventional tracer particles do not emit and absorb in the IR regime, and the wavelength and tracer particle diameter needs to be chosen to maximize scattering intensity (Han and Breuer 2001). The very high index of refraction of silicon (n = 3.3) will also distort the image. ...
... The very high index of refraction of silicon (n = 3.3) will also distort the image. Therefore, the spatial resolution of IR lPIV is not as good as that of the conventional lPIV (Han and Breuer 2001; Liu et al. 2005). IR lPIV was applied to investigate flow around a heat sink (Jones et al. 2008), and the images were processed with an algorithm that was developed to improve the quality of IR recordings. ...
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... Data processing of thermal speckle images has been performed not using DIC typical approach but a very similar measurement technique commonly used on fluid flows: Particle Image Velocimetry (PIV). Near infrared imaging technique [6] has been proposed in order to investigate flows inside materials transparent to near infrared but not at visible light. ...
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... While they could be useful in low temperature reacting flows found in catalytic systems, they are unable to survive at temperatures associated with most gas phase combustion processes. Breuer [73] took advantage of silicon's transmissivity in the infrared regime to measure velocity using Micro-Particle Image Velocimetry (MPIV). ...
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... Since silicon is quite transparent to wavelengths between 1100 and 2500 nm, a diagnostic technique in the infrared range would be advantageous for measuring subsurface flow fields in silicon microdevices. Han et al. [8] first demonstrated an infrared lPIV (IR lPIV) technique by measuring the velocity field in a micronozzle with a 300 lm depth and 40 lm throat width. The solid motion of a microrotor was also measured with this infrared diagnostic system. ...
... Using tan h % NA/n and Eqs. (8) and (9) gives ...
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The flow distribution in a silicon microchannel heat sink was studied using infrared micro-particle image velocimetry (IR μPIV). The microchannel test piece consisted of seventy-six 110 μm wide × 371 μm deep channels etched into a silicon substrate. Inlet and outlet manifolds, also etched into the substrate, were fed by 1.4 mm inner-diameter tubing ports. An image-processing algorithm was developed that significantly improves the quality of IR μPIV recordings in low signal-to-noise ratio environments. A general expression for the PIV measurement depth is presented, which is valid for PIV images that have undergone a threshold image-processing operation. Experiments were performed at two different flow rates: 10 ml/min (Re = 10.2) and 100 ml/min (Re = 102). Little flow maldistribution was observed at the lower flow rate. However, significant flow maldistribution was observed at Re = 102, with the channels near the centerline having an approximately 30% greater mass flux than the channels near the lateral edges of the heat sink. Numerical simulations carried out for flow in the microchannel heat sink agreed very well with the experimental measurements, validating the use of a computational approach for studying the effect of manifold design on flow distribution in microchannel heat sinks.
... However, when the pressure ratio is 2, the flow would spend approximately 80% of its time in Mode 2 and 20% of its time in Mode 1. This issue could be resolved conclusively by using infrared micro-particle image velocimetry [30] to visualize the flow field. Fig. 11 shows experimental measurements of separation factors in two different devices operating with two different gas mixtures: N 2 /SF 6 and Ar/SF 6. ...
... Finally, it would be very useful to verify that the two simulated flow modes are actually realized within the device. This could be accomplished in the present device using an infrared micro-PIV technique that is capable of measuring velocity fields through silicon walls [30]. ...
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