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Schematic of plasma-enhanced horizontal tube furnace deposition system. Gas is supplied to silica tube, where discharge is sustained due to voltage applied across electrodes installed in the opposite lids
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ZnO nanostructures were grown under different deposition conditions from Zn films pre-deposited onto Si substrates in O2-Ar plasma, ignited in an advanced custom-designed plasma-enhanced horizontal tube furnace deposition system. The morphology and structure of the synthesized ZnO nanostructures were systematically and extensively investigated by s...
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Citations
... At the same time, ZnO nanowires started to grow at 400 °C and they also had the bulk shape (aspect ratio of about 1.0), which then turned to an elongated structure with the aspect ratio of about 13.8 when the growth temperature rose to 500 °C. In the above Equations (1)-(3), O* represents an activated or metastable oxygen atom [31,44]. It is worthwhile to mention that the surface of the metal particles can form micro-hillocks due to the surface roughness of the metal foils during Ar ion bombardment. ...
... This is an entropy reduction process, i.e., ∆S < 0. Owing to the spontaneous process, Gibbs free energy (∆G) is also less than zero. According to the equation ∆G = ∆H − T∆S, it can be concluded that the enthalpy is reduced, so this is an exothermic process [43,44]. Notably, the adsorption of metal oxide species on the substrate is an exothermal process. ...
... Notably, the adsorption of metal oxide species on the substrate is an exothermal process. Also, the recombination of activated oxygen atoms in the gas environment, the adsorption of argon and oxygen ions on the substrate, and the reaction of oxygen ions with metal particles release some extra energy on the metal micro-hillocks [31,44,45]. ...
To unravel the influence of the temperature and plasma species on the growth of single-crystalline metal oxide nanostructures, zinc, iron, and copper foils were used as substrates for the study of nanostructure synthesis in the glow discharge of the mixture of oxygen and argon gases by a custom-made plasma-enhanced horizontal tube furnace deposition system. The morphology and microstructure of the resulting metal oxide nanomaterials were controlled by changing the reaction temperature from 300 to 600 °C. Experimentally, we confirmed that single-crystalline zinc oxide, copper oxide, and iron oxide nanostructures with tunable morphologies (including nanowires, nanobelts, etc.) can be successfully synthesized via such procedure. A plausible growth mechanism for the synthesis of metal oxide nanostructures under the plasma-based process is proposed and supported by the nanostructure growth modelling. The results of this work are generic, confirmed on three different types of materials, and can be applied for the synthesis of a broader range of metal oxide nanostructures.
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