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An external laser intensity modulation system based on a micro-electromechanical systems (MEMS) mirror is presented in this paper, for application to gas sensing. The micro mirror is driven by the electrothermal actuator. The rotation direction is decided by the relative position between the driving actuator and the axis of micro-mirror. In contras...
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... experimental setup for characterizing the MEMS mirror is presented in figure 4. It is important that the reflection property of the micro mirror should be constant in the case of various input laser intensities during the tuning of the tunable diode laser (TDL), since the TDL output intensity is proportional to the injection current. ...
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Key Enabling Technologies for Next Generation MEMS Sensors and Actuators
Citations
... In 2007, Li et al. reported such a micromirror, as shown in Figure 16a, where an optical scanning angle of 10 • was obtained at 18 V dc [50]. Another similar 2D micromirror reported by the same group is shown in Figure 16b [51,52], where four actuators were employed to support a gold-coated mirror plate (Φ2 mm). From Figure 16b, we can see that the fill factor of the mirror is significantly improved compared to the previous micromirrors. ...
... In 2007, Li et al. reported such a micromirror, as shown in Figure 16a, where an optical scanning angle of 10° was obtained at 18 V dc [50]. Another similar 2D micromirror reported by the same group is shown in Figure 16b [51,52], where four actuators were employed to support a gold-coated mirror plate (Φ2 mm). From Figure 16b, we can see that the fill factor of the mirror is significantly improved compared to the previous micromirrors. ...
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.
