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![Schematic diagram of the comprehensive 3D micro/nanofabrication combining additive TPP and subtractive MPA processes [119]](profile/Jong-Bok-Park/publication/277647965/figure/fig17/AS:614167589429254@1523440372172/Schematic-diagram-of-the-comprehensive-3D-micro-nanofabrication-combining-additive-TPP.png)
Schematic diagram of the comprehensive 3D micro/nanofabrication combining additive TPP and subtractive MPA processes [119]
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Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the...
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Citations
... Laser direct writing (LDW) method, utilizing the photothermal conversion, can synthesize materials and then engrave them with the desired morphologies and structures [9][10][11][12]. This versatile process has been widely employed to reduce procedures [13], including metal salt solution [11,14,15] (Ag, Cu, Pd, etc.) and carbon (graphene oxide, Mxene) [9,10,16,17]. Currently, numerous applications of LDW technology have been reported for flexible sensor manufacturing of various types, such as for temperature [18,19], mechanical [20][21][22], acoustic [23,24], optical [25][26][27], gas [28,29] and biosensor [30,31] detection. ...
A highly sensitive temperature sensing array is prepared by all laser direct writing (LDW) method, using laser induced silver (LIS) as electrodes and laser induced graphene (LIG) as temperature sensing layer. A finite element analysis (FEA) photothermal model incorporating a phase transition mechanism is developed to investigate the relationship between laser parameters and LIG properties, providing guidance for laser processing parameters selection with laser power of 1–5 W and laser scanning speed (greater than 50 mm/s). The deviation of simulation and experimental data for widths and thickness of LIG are less than 5% and 9%, respectively. The electrical properties and temperature responsiveness of LIG are also studied. By changing the laser process parameters, the thickness of the LIG ablation grooves can be in the range of 30–120 μm and the resistivity of LIG can be regulated within the range of 0.031–67.2 Ω·m. The percentage temperature coefficient of resistance (TCR) is calculated as − 0.58%/°C. Furthermore, the FEA photothermal model is studied through experiments and simulations data regarding LIS, and the average deviation between experiment and simulation is less than 5%. The LIS sensing samples have a thickness of about 14 μm, an electrical resistivity of 0.0001–100 Ω·m is insensitive to temperature and pressure stimuli. Moreover, for a LIS-LIG based temperature sensing array, a correction factor is introduced to compensate for the LIG temperature sensing being disturbed by pressure stimuli, the temperature measurement difference is decreased from 11.2 to 2.6 °C, indicating good accuracy for temperature measurement.
Graphical Abstract
... Traditionally, nanofabrication makes use of chemical reduction methods which are generally extremely environmentally unfriendly 7 and rely on batch production. In the field of nanofabrication, the current state-of-the-art in research sees a significant focus on the use of laser-based fabrication methods as a rapid, inexpensive, scalable, and green technology [7][8][9][10] . Recent examples of this ongoing laser nanofabrication revolution are ubiquitous in literature and demonstrate the viability, flexibility and scalable nature of these techniques when compared with pre-existing methodologies. ...
The advancement of biosensor research has been a primary driving force in the continuing progress of modern medical science. While traditional nanofabrication methods have long been the foundation of biosensor research, recent years have seen a shift in the field of nanofabrication towards laser-based techniques. Here we report a gold-based biosensor, with a limit of detection (LoD) 3.18 µM, developed using environmentally friendly Laser Ablation Synthesis in Liquid (LASiS) and Confined Atmospheric Pulsed-laser (CAP) deposition techniques for the first time. The sensors were able detect a DNA fragment corresponding to the longest unpaired sequence of the c-Myc gene, indicating their potential for detecting such fragments in the ctDNA signature of various cancers. The LoD of the developed novel biosensor highlights its reliability and sensitivity as an analytical platform. The reproducibility of the sensor was examined via the production and testing of 200 sensors with the same fabrication methodology. This work offers a scalable, and green approach to fabricating viable biosensors capable of detecting clinically relevant oncogenic targets.
... To begin, the photochemical mechanism, which mostly relies on the photon-induced crosslinking process [19] (a photochemical reaction known as single-photon [20], two-photon [12], and multi-photon [21] polymerization) was introduced with an optical setup. To scale the robots volume down to micro/nano-environments [22] with improvements to intelligence, the fabrication resolution of laser synthesis has to be confined to nano-size [23] at a flexible scanning path. In parameter-tunable laser photochemical fabrication [24], the spatiotemporal programming depends on the method of modulating photons [18]. ...
Miniaturized four-dimensional (4D) micro/nanorobots denote a forerunning technique associated with interdisciplinary applications, such as in embeddable labs-on-chip, metamaterials, tissue engineering, cell manipulation, and tiny robotics. With emerging smart interactive materials, static micro/nanoscale architectures have upgraded to the fourth dimension, evincing time-dependent shape/property mutation. Molecular-level 4D robotics promises complex sensing, self-adaption, transformation, and responsiveness to stimuli for highly valued functionalities. To precisely control 4D behaviors, current laser-induced photochemical additive manufacturing, such as digital light projection, stereolithography, and two-photon polymerization, is pursuing high-freeform shape-reconfigurable capacities and high-resolution spatiotemporal programming strategies, which challenge multi-field sciences while offering new opportunities. Herein, this review summarizes the recent development of micro/nano 4D laser photochemical manufacturing, incorporating active materials and shape-programming strategies to provide an envisioning of these miniaturized 4D micro/nanorobots. A comparison with other chemical/physical fabricated micro/nanorobots further explains the advantages and potential usage of laser-synthesized micro/nanorobots.
... ，微纳 4D 打印却正处于发展的初期。微纳 4D 打印，顾名思义，是一种将微纳尺度 3D 打印技术与智能响应材料结合，用于制备亚毫米直至纳米级的刺激响应动态器件的技术。从 宏观领域到微纳领域，由于物理尺度的缩小，微纳器件对刺激的响应程度、响应形式和灵敏 性都有显著差异，并伴随新颖物理现象的产生。得益于尺度的差异性，微纳 4D 打印技术在 生物医学 [8][9][10][11] 、微机械 [12] 等领域具有极佳的应用前景，因而受到国内外研究人员的广泛关注。 高精度制造是微纳 4D 打印研究的基础 [13,14] ，目前主要通过紫外光光刻 [15] 、电子束曝光 [16] 、面投影微立体光刻 [17] 等方式实现微纳结构的成型。基于双光子吸收效应的飞秒激光直写 技术以其数十纳米级的制造精度、任意三维结构加工的能力成为备受关注的技术之一 [12] 。另 一方面，智能材料是微纳结构实现刺激响应的关键，在宏观 4D 打印工作的基础上，微纳 4D 打印技术形成了以智能水凝胶、液晶弹性体和形状记忆聚合物为代表的材料体系 [18] 。驱动方 法是微纳 4D 打印研究的核心内容之一，常用的驱动方法是通过材料对溶剂 [19] 、pH [20] 、温度 [21] 等对刺激的接触响应实现的，以磁场和光场为代表的远程刺激响应赋予了微纳器件的更 多样化的运动形式和更高的集成度 [22] [15] 、直接 墨水书写 [23] (Direct Ink Writing, DIW) 、面投影微立体光刻 [17] (Projection Microstereolithography, PμSL) 和飞秒激光双光子聚合 [24] (Two-Photon Polymerization, TPP) 等。紫外光光刻作为一种成熟的微纳制造方法，可以通过高精度的掩模板实现大规模二维结 构的高精度加工，目前已报道的用于动态微器件制造的工艺加工分辨率可达到 180 nm [15] 。 但该方法受限于高精度掩模板的长制作周期和高昂价格，其难以推广应用于微纳 4D 打印的 前沿探索研究。无掩模光刻技术通过使用数字微镜阵列(Digital Micromirror Devices, ...
In 1959, Richard P. Feynman gave a talk titled “There's Plenty of Room at the
Bottom”, in which he addressed the issues of controlling and guiding things in micro/nano scale, as well as the field's huge potential. There has been an explosion of continuing and in-depth research on materials, manufacturing, manipulation, and characterization at the micro- and nanoscale since then. Using micro/nano technologies, physicists and chemists can view the consequences and even the process of reactions at microscale, biologists can handle a single cell, and engineers can construct integrated circuits with a resolution of several nanometers. However, static architecture is becoming more and more difficult to meet the future demands of complex environment adaptation and multi-functional integration in the micro/nano domain.
4D printing was first proposed by Tibbits at a TED talk in 2013. Although there is no precise
definition, 4D printing is often interpreted as "3D printing + time," which means that the qualities of a static object (shape, property, etc.) will change in response to a specific external stimulus. From the macro-field to the micro/nano field, the reaction time of the micro/nano devices is substantially shortened, the response sensitivity is much enhanced, and the demand for actuation energy is much lowered. In view of the potential of the micro/nano 4D printing technology as mentioned above, it is necessary to make a review of the recent research progress of the micro/nano 4D printing technique.
... TPA is a third-order nonlinear optical effect; the probability of occurrence of TPA is proportional to the square of the incident light intensity. 28,29 The peak energy density of the focused femtosecond laser pulse is as high as 10 18 W/m 2 . Thus, a large number of photons are confined to the tiny voxel of the laser spot. ...
... Some emerging techniques with great promise are the laser-induced ultrafast growth and assembly of different types of functional nanomaterials [68][69][70][71][72][73][74][75][76] and the laser-based printing of nanomaterials, circuits and micro-devices for the fabrication of highly-integrated flexible electronics [77][78][79][80]. Furthermore, laser radiation is also ideal for micro/nanofabrication of structures and devices by selective photo-induced chemical reactions, heating, melting or ablation mechanisms [81][82][83][84][85][86]. ...
Laser-based methodologies for synthesis, reduction, modification and assembly of graphene-based materials are highly demanded for energy-related electrodes and devices for portable electronics. Laser technologies for graphene synthesis and modification exhibit several advantages when compared to alternative methods. They are fast, low-cost and energy saving, allowing selective heating and programmable processing, with controlled manipulation over the main experimental parameters. In this review, we summarize the most recent studies on laser-assisted synthesis of graphene-based materials, as well as their modification and application as electrodes for supercapacitor and battery applications. After a brief introduction to the physical properties of graphene and a discussion of the different types of laser processing operations, the practical uses of laser techniques for the fabrication of electrode materials are discussed in detail. Finally, the review is concluded with a brief discussion of some of the outstanding problems and possible directions for research in the area of laser-based graphene materials for energy storage devices.
... A recent trend in e-skin fabrication is based on mask-free and chemical-free methods, which employ a laser to prepare graphene and fabricate graphene-based electronic skins. Furthermore, Xiong et al. [147] presented the technique of chemically derived graphene oxide (GO) preparation using a laser, while Ye et al. [148] reported further significant advances in mask-free created micro-patterns. ...
Real-time “on-body” monitoring of human physiological signals through wearable systems developed on flexible substrates (e-skin) is the next target in human health control and prevention, while an alternative to bulky diagnostic devices routinely used in clinics. The present work summarizes the recent trends in the development of e-skin systems. Firstly, we revised the material development for e-skin systems. Secondly, aspects related to fabrication techniques were presented. Next, the main applications of e-skin systems in monitoring, such as temperature, pulse, and other bio-electric signals related to health status, were analyzed. Finally, aspects regarding the power supply and signal processing were discussed. The special features of e-skin as identified contribute clearly to the developing potential as in situ diagnostic tool for further implementation in clinical practice at patient personal levels.
... The most popular materials developed for single-photon STL decades ago are acrylatebased and epoxy-based resins which are photosensitized by an excimer laser at 308 nm wavelength or Hg-lamp at 365 nm [16][17][18] and can also be applied in the TPP-DLW nanolithography system. A large diversity of micro-objects, including micro/nano-electromechanical systems (MEMS/ NEMS) [19][20][21], micro/nano-photonics [22], biomimetic interfaces and architectures [23,24], have been fabricated by TPP based on these materials. ...
Micro/nano-fabrication technology via two-photon polymerization (TPP) nanolithography is a powerful and useful manufacturing tool that is capable of generating two dimensional (2D) to three dimensional (3D) arbitrary micro/nano-structures of various materials with a high spatial resolution. This technology has received tremendous interest in cell and tissue engineering and medical microdevices because of its remarkable fabrication capability for sophisticated structures from macro- to nano-scale, which are difficult to be achieved by traditional methods with limited microarchitecture controllability. To fabricate precisely designed 3D micro/nano-structures for biomedical applications via TPP nanolithography, the use of photoinitiators (PIs) and photoresists needs to be considered comprehensively and systematically. In this review, widely used commercially available PIs are first discussed, followed by elucidating synthesis strategies of water-soluble initiators for biomedical applications. In addition to the conventional photoresists, the distinctive properties of customized stimulus-responsive photoresists are discussed. Finally, current limitations and challenges in the material and fabrication aspects and an outlook for future prospects of TPP for biomedical applications based on different biocompatible photosensitive composites are discussed comprehensively. In all, this review provides a basic understanding of TPP technology and important roles of PIs and photoresists for fabricating high-precision stimulus-responsive micro/nano-structures for a wide range of biomedical applications.
... In 2015, X. Wei et al. summarizes recent advances in laser-based material processing methods for growing and fabricating one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nano structures. According to the literature reading, most of the previous reviews are about the micro/nano structures prepared by laser machining in a class of materials, and mainly based on short pulse laser machining [57]. ...
Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.
... In the advanced 3D micro/nano manufacturing area, twophoton polymerization (TPP) based on laser direct writing (LDW) has recently attracted immense interest owing to its outstanding 3D structuring capability with sub-diffractionlimit spatial resolution [1,2]. LDW is performed by scanning a tightly focused fs laser beam inside photoresists for TPP to create 3D micro/nanostructures according to designed patterns [1]. ...
Two-photon polymerization (TPP) based on laser direct writing is currently one of the most prevailing 3D micro/nano fabrication techniques. Nanomaterials can be doped in resins and assembled by TPP for developing advanced 3D functional devices. However, there lacks an effective visualization tool to determine the distribution and orientation of the nanomaterials as-doped in the composite resins. Herein, we present a nondestructive, in situ, and rapid characterization method to determine the orientation and distribution of the nanomaterials within cured resins using polarized second-harmonic generation (p-SHG). The directional assembly of the ZnO nanowires within micro/nanostructures fabricated by TPP is, for the first time to the best of our knowledge, characterized by p-SHG optical microscopy with a fast imaging speed by two orders of magnitude higher than that of the Raman mapping technique. Our method opens a window for nondestructive, rapid, in situ, and polarization-resolved characterization of functional devices made by TPP micro/nanofabrication.
