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Schematic design of DMMLA and its working principles: the overall assembling of DMMLA with the prototype shown in the insert (a); the enlarged detailed structure of piezoelectric assembly (b) and electromagnetic assembly (c); the detailed structure of d33 stack (d) and d15 stack (e) and the relationship of displacement and the applied voltage at 1, 10, 100 Hz for d33 stack (f) and d15 stack (g); working principle of the electromagnetic actuator (h).
Source publication
Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of...
Citations
... Jinchuan Zheng et al [2] designed a dual-stage rotary actuator, with a voice coil motor as their primary actuator and a piezoelectric-based actuator system for driving the fine rotation, a similar system was developed and tested by W Dong et al [1]. Xiangyu Gao et al [3] built a linear actuator whose fine motion mechanism is based on electromagnetic induction, and the coarse motion is a piezoelectric actuator. Zheng et al [4] research work focused on fabricating an actuator with a DC motor-based coarse motion actuator and a voice coil motor fine motion actuator. ...
... Run fine motion steps without reading the LVDT values for a particular number of steps.2 Revert Back Return to the initial position from where the fine motion commenced without reading LVDT values.3 Fine Drain Drain all the left-out fine motion steps without reading the LVDT values in case target is nonobtainable via fine motion. ...
Actuators with high resolution and high range are always in demand for critical applications such as space applications, machining, and medical equipment. A dual-resolution actuator that has a coarse motion segment and a fine motion segment in itself that runs through a common drive system was designed. A coupling mechanism is employed to engage and disengage with the coarse motion of the actuator, enabling the use of coarse motion only when required. The actuator can achieve the target in any of three methods: (1) directly through fine motion, (2) utilizing a combination of fine and coarse motion without the need to overshoot the target value, and (3) employing both fine and coarse motion with a need for overshoot of the target value. An intelligent algorithm employing multiple techniques to address sensor-induced delays and enhance runtime efficiency was developed and tested on the realized actuator. This paper describes the techniques adopted and the sequence of conditions used to enable the actuator to reach the target in the shortest time and minimum possible steps.
... Consequently, researchers and innovators have turned their attention to energy harvesters derived from renewable energy sources as a viable alternative solution over the past few decades. These harvesters work based on several physical effects, including the piezoelectric effect [1][2][3][4][5], the electromagnetic effect [6][7][8][9], the triboelectric effect [10,11], and hybrid ones [12][13][14]. Among them, triboelectric nanogenerators (TENGs) [15,16] have been receiving increasing prevalence due to low cost and high maximum energy conversion efficiency [17]. ...
The influence of a mechanical structure’s volume increment on the volume power density (VPD) of triboelectric nanogenerators (TENGs) is often neglected when considering surface charge density and surface power density. This paper aims to address this gap by introducing a standardized VPD metric for a more comprehensive evaluation of TENG performance. The study specifically focuses on 2 frequency-up mechanisms, namely, the integration of planetary gears (PG-TENG) and the implementation of a double-cantilever structure (DC-TENG), to investigate their impact on VPD. The study reveals that the PG-TENG achieves the highest volume average power density, measuring at 0.92 W/m3. This value surpasses the DC-TENG by 1.26 times and the counterpart TENG by a magnitude of 69.9 times. Additionally, the PG-TENG demonstrates superior average power output. These findings introduce a new approach for enhancing TENGs by incorporating frequency-up mechanisms, and highlight the importance of VPD as a key performance metric for evaluating TENGs.
... Numerous unique architectures for micro-displacement actuators have been proposed as a result of the growing demand for ultra-precision machine tools [1][2][3]. Feng [4,5] introduced a novel two-axis differential micro-feed system (TDMS), which addressed the issue of the nonlinear friction-induced creeping of traditional drive-feed systems at low speeds when it is wais used to drive the machine tool. Two permanent -magnet synchronous motors (PMSMs) are used in the TDMS to drive the screw and nut, as seen in Figure 1. ...
... T f rj (j = 1, 2) friction torque of screw and nut T rji (j = 1, 2) friction moment generated by each friction unit of the screw and nut σ rj (j = 1,2) viscous friction coefficient of the screw and nut . θ j (j = 1, 2) speed of the screw and nut T Crj (j = 1,2) Coulomb friction torque of the screw and nut T Srj (j = 1, 2) maximum static friction torque of the screw and nut . ...
... T f rj (j = 1, 2) friction torque of screw and nut T rji (j = 1, 2) friction moment generated by each friction unit of the screw and nut σ rj (j = 1,2) viscous friction coefficient of the screw and nut . θ j (j = 1, 2) speed of the screw and nut T Crj (j = 1,2) Coulomb friction torque of the screw and nut T Srj (j = 1, 2) maximum static friction torque of the screw and nut . θ sj (j = 1, 2) Stribeck speed of the screw and nut F f friction force between the worktable and guide rail M j (j = 1,2,3) number of friction units of the screw, nut and workbench F 3i (i = 1, 2, . . . ...
Ultra-precise actuation at extremely low speeds over a broad range is a major challenge for advanced manufacturing. A novel two-axis differential micro-feed system (TDMS) has been proposed recently to overcome the low-speed crawling of the worktable. However, due to the diversity of the force states of the TDMS, the methods for identification identifyingof friction parameters traditionally (like the all -components identification method, ACIM) didn’t did not perform well. And many studies on the performance of the pre-sliding phase of the TDMS are missing. Therefore, a novel whole-system identification method (WSIM) based on the TDMS was proposed in this paper to precisely identify the friction parameters under different states of motion. The generalized Maxwell sliding (GMS) friction model was also applied to improve the accurate description of the pre-sliding. A novel corrected Stribeck curve based on the TDMS (TDMSSC) was proposed under the uniqueness of the TDMS structure. Control experiments showedn that the WSIM has higher precision and stability rather thancompared torather than the ACIM, and the correction of the Stribeck curve for the TDMS makes a contribution to the performance. This method significantly improves the accuracy and stability of the machine tool drive system.
... The scissoring or grasping operation is essentially a symmetrical actuation between two handles of one pair of scissors or a pair of tweezers, in which they relatively move (toward or away from each other) simultaneously. However, the conventional piezoelectric or electromechanical motors/actuators use single or even multiple stators to drive one runner for generating forward or backward movements [9][10][11]. To produce symmetric actuations and movements, normally, two series-connected or parallel-connected stators are required to respectively drive two runners moving toward or away from each other simultaneously; it is also possible to employ sophisticated transmission mechanisms such as racks and pinions, flexible hinges, etc., to convert one-direction movement of one motor into two opposite movements, but at the cost of the cumbersome structure and very limited stroke [12,13]. ...
Conventionally, to produce a linear motion, one motor’s stator is employed to drive one runner moving forward or backward. So far, there is almost no report of one electromechanical motor or piezoelectric ultrasonic motor that can directly generate two symmetrical linear motions, while this function is desired for precise scissoring and grasping in the minimally invasive surgery field. Herein, we report a brand-new symmetric-actuating linear piezoceramic ultrasonic motor capable of generating symmetrical linear motions of two outputs directly without additional mechanical transmission mechanisms. The key component of the motor is an (2 × 3) arrayed piezoceramic bar stator operating in the coupled resonant mode of the first longitudinal (L1) and third bending (B3) modes, leading to symmetric elliptical vibration trajectories at its two ends. A pair of microsurgical scissors is used as the end-effector, demonstrating a very promising future for high-precision microsurgical operations. The sliders of the prototype show the following features: (a) symmetrical, fast relative moving velocity (~1 m/s) outward or inward simultaneously; (b) high step resolution (40 nm); and (c) high power density (405.4 mW/cm3) and high efficiency (22.1%) that are double those of typical piezoceramic ultrasonic motors, indicating the full capacity of symmetric-actuating linear piezoceramic ultrasonic motor working in symmetric operation principle. This work also has enlightening significance for future symmetric-actuating device designs.
... Furthermore, with the development of high-precision laser direct writing photolithography systems, such as a two-photon laser direct writing equipment, researchers directly used piezoelectric ceramics as actuators to complete the photolithography process. [35][36][37][38][39][40] Brussel et al. designed a work piece with the piezoelectric ceramics, as shown in Figure 13, and the work piece possesses the advantage of high-speed positioning, high precision. Dynamic characterization experiment shows the maximum speed of prototype linear motor can exceed 100 mm/s with the movement range within 3 μm. ...
... Dynamic characterization test experiment prototype shows that the nanomotor can reach 2 nm under the high speed of 50 mm/s. 38 In addition to the electromagnetic motor and piezoelectric ceramic motor, pneumatic motor is also a new development direction for the photolithography system. Worktable driven by pneumatic motor in laser direct writing photolithography system, as shown in ...
As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer-scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photolithography, the exposure is a dynamic process. The accuracy and precision of the movement are determined by the mechanical system, which is even more difficult to control compared with the optical system. In the mechanical system, there are four crucial components: the reticle and wafer stages, the linear motor, the metrology system, and the control system. They work together to secure the reticle and substrate locating at the correct position, which determines the overlay and alignment performance in the lithography. In this paper, the principles of these components are reviewed, and the development history of the mechanical system is introduced.
... Piezoelectric ceramics are the cornerstone for piezoelectric devices and hold a big share in piezoelectric materials family [1,2]. Multilayer structure is an effective method to decrease the driving voltage for piezoelectric actuators [3,4] or increase output electric output signal for piezoelectric transducers [5,6]. Piezoelectric plates with epoxy boding composite is one way to fabricate multilayer structures, but the polymer mid-layers can lead to reduction in fatigue, strain transfer efficiency and signal to noise ratio as well as increased hysteresis and creep. ...
Multilayer structure is an effective approach for reducing driving voltages or increasing output electric signal for piezoelectric devices. However, it is a challenge to achieve high piezoelectric coefficient at low sintering temperature. In this work, we fabricated Li2CO3 (LC) doped Pb(Ni1/3Nb2/3)-Pb(Zr,Ti)O3 (PNN-PZT) ceramics via solid state reaction method. Piezoelectric coefficient at low quasi-static signal d33 and effective piezoelectric coefficient under high electric field d33⁎ are 692 pC/N, 1114 pm/V for PNN-PZT+0.2 wt% LC sintered at 950 oC, which is comparable to high temperature sintered commercial Pb(Zr,Ti)O3 (PZT) based ceramics. Detailed piezoelectric, ferroelectric, dielectric properties, temperature stability and material structure were investigated. The planar electromechanical coupling factor Kp, relative dielectric constant εr and dielectric loss tan δ at 1 kHz, Curie temperature Tc, coercive electric field Ec are measured to be 0.557, 4280, 0.025, 113 oC, 4.34 kV/cm. It shows great potential for applications in multilayer structured cofired piezoelectric actuators and transducers.
... Quasi shear mode actuator [11] Planar actuator [12] Dual Mechanism Linear actuator [13] E 01 mode ultrasonic motor [14] Working respectively. The difference in output displacement can be attributed to the gravity influence on z axis. ...
Piezoelectric actuators are important elements for compact actuations with high precision; however, driving voltage reduction is demanding for integration and minimization of precision actuations. In this work, we proposed a bending-bending mode piezoelectric actuator based on multilayered Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystals. Ultrahigh apparent piezoelectric coefficient d33 of ~10800 pC/N are achieved in four crystal stacks. The crystal stacks are used to fabricate bending-bending mode piezoelectric actuators to reduce driving voltage. Experimental results show that it can produce a maximum travelling velocity of 3.28 mm/s under the driving voltage of 130 Vpp at 1000 Hz and minimum step resolution of 0.35 μm with 25 Vpp driving voltage. Conventional piezoelectric actuators require driving voltage of ~300 Vpp for similar motion velocity. This work demonstrates advantages of crystal stacks in piezoelectric actuators and potential applications in low-voltage precise actuations.
... To meet the demand of long travel range and nanometer resolution at the same time, many techniques have been developed to amplify or accumulate the displacement of the piezoelectric actuator, including the macro-micro dual drive principle [7,8], the inchworm drive principle [9], a piezoelectric ultrasonic motor [10,11], and the stick-slip drive principle [12,13]. Stages based on the macro-micro dual drive principle usually have large dimensions, making them unable to be used in many applications of limited space [14]. The size of an inchworm drive stage is also large, and it needs to be manufactured and assembled precisely [15]. ...
The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the stage, which influences the load capacity, dynamic performance, and positioning accuracy of the PASSNS. Toward solving the influence problems of friction force, this paper presents a novel stick-slip nanopositioning stage where the flexure hinge-based friction force adjusting unit was employed. Numerical analysis was conducted to estimate the static performance of the stage, a dynamic model was established, and simulation analysis was performed to study the dynamic performance of the stage. Further, a prototype was manufactured and a series of experiments were carried out to test the performance of the stage. The results show that the maximum forward and backward movement speeds of the stage are 1 and 0.7 mm/s, respectively, and the minimum forward and backward step displacements are approximately 11 and 12 nm, respectively. Compared to the step displacement under no working load, the forward and backward step displacements only increase by 6% and 8% with a working load of 20 g, respectively. And the load capacity of the PASSNS in the vertical direction is about 72 g. The experimental results confirm the feasibility of the proposed stage, and high accuracy, high speed, and good robustness to varying loads were achieved. These results demonstrate the great potential of the developed stage in many nanopositioning applications.
This letter presents an integrated micromanipulation system suited for precise assembly of micro-parts in intricate environments. By embedding the Global Attention Mechanism (GAM) into YOLOv8, the system not only enhances its performance but also accurately identifies target keypoints, pinpointing the center position and rotational angle of the target. Building on this, we introduce a learning-driven pushing assembly manipulation method, adeptly harnessing a regression model trained on historic micromanipulation data. This model captures the nuanced dynamics of micro-components, addressing challenges like frictional contact and other uncertain factors that are typically tough to model. Our experimental suite, executed in complex settings, covers transportation and assembly tasks utilizing dual micro-manipulators. The system's hallmark is its synthesis of YOLOv8-driven keypoint recognition and an advanced pushing manipulation mechanism. Its innovative design and methodologies can be adapted for assembling micro-parts of diverse geometric configurations, especially in sophisticated biological settings, like manipulating biological cells.
