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Micro-electromechanical system (MEMS) suspended inductors have excellent radiofrequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary pillars under high mechanical shock. In this paper...
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... for the suspended inductor with auxiliary pillar in Figure 1, the inductor coil is divided into two parts by the pillar. Neglecting the deformation of the pillar, each part of the coil can be modeled as an undamped SDOF system, as shown in Figure 4. The mass and the spring constant of each part of the coil are denoted by m and k, respectively. ...
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Citations
... Sundaram et al. [21] proposed a combined experimental-analytical approach by focusing on equating key parts of the device to the SDOF systems and they investigated the failure of a tunable diffraction grating under shock and vibration. Xu and Li [22][23][24] have carried out many meaningful studies. They equated the inductor to an SDOF system to obtain an equivalent acceleration, considered the inductor as a bar system, determined its deformation and stress by solving the super-stationary equations, and analyzed the mechanical reliability of the structure. ...
MEMS suspended inductors are susceptible to deformation under external forces, which can lead to the degradation of their electrical properties. The mechanical response of the inductor to a shock load is usually solved by a numerical method, such as the finite element method (FEM). In this paper, the transfer matrix method of linear multibody system (MSTMM) is used to solve the problem. The natural frequencies and mode shapes of the system are obtained first, then the dynamic response by modal superposition. The time and position of the maximum displacement response and the maximum Von Mises stress are determined theoretically and independently of the shock. Furthermore, the effects of shock amplitude and frequency on the response are discussed. These MSTMM results agree well with those determined using the FEM. We achieved an accurate analysis of the mechanical behaviors of the MEMS inductor under shock load.
... The minimum time step in any explicit analysis should be equal or less than the value finds from the above equation. It shows that minimum characteristic length is controlling the time step size in explicit analysis, therefore element size should be as uniform as possible in one simulation [23] [24]. There is longitudinal and transverse wave in the material as previous one is much faster than latter one therefore time step is controlled by longitudinal wave speed. ...
... At the four bolts of the ring, the shock is produced, and its acceleration profile was created using half sin waveform. The basic governing Equation (5) of this waveform is given below [24]. ...
Various types of mechanical energy-absorbing devices are known that operate by plastic deformation. The corrugated ring mount that is used in this study relates to a device that absorbs energy by plastic deformation. This energy-absorbing device has reduced volumetric proportions, simple in design, and therefore has small overall dimensions and can be mass-produced at low cost. This study aims to determine the shock absorption capability and efficiency of this mount against impact loading. For this, Finite Element Method Analysis (FEA) and experimentation are done. The FEA is done using the Explicit Dynamics (AutoDyn) module of ANSYS Workbench and for experimentation Drop Test Machine (DTM) is used. In this study impact load from low g up to 85 g is applied and a very close agreement is found between FEA and experimental results. There is just a 5-10% deviation between the findings. The results show that this mount is plastically deformed to absorb the impact energy with a maximum efficiency of 70%. It concludes that it is a reliable and safer shock energy device.
... When the shock duration is comparable to the vibration time period of the coil structure, the structure experienced the shock pulse as a dynamic load and the absolute acceleration response will be amplified to various degrees [21,22]. The mechanical properties of the inductor sample is analyzed with the method in [22]. In order to obtain the mechanical properties of the inductor sample under harsher conditions, the half sine pulse shock loads with duration of 20 µs and amplitude of 10,000-100,000 g are applied to the inductor. ...
... The shock pulse width generated by the shock test equipment including air cannon and Hopkinson bar ranges from tens to hundreds of microseconds. When the shock duration is comparable to the vibration time period of the coil structure, the structure experienced the shock pulse as a dynamic load and the absolute acceleration response will be amplified to various degrees [21,22]. The mechanical properties of the inductor sample is analyzed with the method in [22]. ...
... When the shock duration is comparable to the vibration time period of the coil structure, the structure experienced the shock pulse as a dynamic load and the absolute acceleration response will be amplified to various degrees [21,22]. The mechanical properties of the inductor sample is analyzed with the method in [22]. In order to obtain the mechanical properties of the inductor sample under harsher conditions, the half sine pulse shock loads with duration of 20 μs and amplitude of 10,000-100,000 g are applied to the inductor. ...
Microelectromechanical systems (MEMS) suspended inductors have excellent radio frequency (RF) performance and they are compatible with integrated circuit (IC). They will be shocked during manufacturing, transportation, and operation; in some applications, the shock amplitude can be as high as tens of thousands of gravitational acceleration (g, 9.8 m/s2). High-g shock will lead to the inductor deformation which affects its performance or even failure of the inductor structure. However, few studies have been carried out on the inductors under high-g shock. In this study, a kind of MEMS suspended inductor with excellent RF and mechanical performance is designed and fabricated. The failure and performance variation mechanism of the inductor under high-g shock is analyzed by measuring and comparing the performance measurement results and the π model parameters extraction results of the inductors before and after air cannon shock test. The results show that the increase of energy loss caused by substrate parasitic effect and the properties variation of the coil material affected by high-g shock are the main reasons for the decrease of RF performance parameters, and the critical stress exceeding the interlayer adhesion is the main reason for the failure of the inductor.
