Response time of the flexible pressure sensor when exposed to external pressure.

Response time of the flexible pressure sensor when exposed to external pressure.

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With advances in new materials and technologies, there has been increasing research focused on flexible sensors. However, in most flexible pressure sensors made using new materials, it is challenging to achieve high detection sensitivity across a wide pressure range. Although traditional silicon-based sensors have good performance, they are not for...

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... Silicon-based passive electronic devices, such as resistors and diodes, are drawn numerous attentions for applications in bioimplantable sensors. Utilizing piezoresistive, thermosensitive as well as bioabsorbable and biocompatible properties of silicon, various types of flexible transient sensors with appropriate structural designs can be prepared to detect temperature, pressure, stress, flow rate, pH value, and other related signals [92][93][94][95][96]. Reasonable structural design reduces the complexity of the fabrication process. ...
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... It is believed that a higher dielectric constant and material stability are the prerequisites for the achievement of higher pressure-sensing properties. [9][10][11][12] As a type of perovskite-type ceramic oxide, SeZnO 3 has attracted increasing attention for pressure sensing applications due to its special crystal structure, 13 large surface area, and abundant oxygen vacancies. 14 SeZnO 3 is a rare perovskite oxide with a valence combination of Se 4+ Zn 2+ -O 3 . ...
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... The photoresist-coated substrate is then placed under a photomask, which contains the desired pattern in opaque and transparent regions. When exposed to UV light, the photoresist in the transparent regions of the photomask becomes soluble and is removed during the development step, leaving behind the desired pattern on the substrate [100]. The photoresist in the opaque regions remains insoluble and acts as a protective mask during subsequent processing steps. ...
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... The most interesting use of nanobiosensors is in the diagnosis of Parkinson's disease and other clinical abnormalities (Perspectives 2022). For example, wearable devices based on silicon nanomembranes have been used to detect clinical abnormalities (Cheng et al. 2023). Nanofabrication enables the development of such sensors that can be used to improve the diagnostic accuracy of Parkinson's disease (Dixit et al. 2023). ...
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