Figure 18 - uploaded by Michael Usrey
Content may be subject to copyright.
Pressure sensor system resonate frequency changes as the pressure sensor capacitance changes due to pressure.
Source publication
In this paper, the development and characterization of a packaged pressure sensor system suitable for jet engine health monitoring is demonstrated. The sensing system operates from 97 to 117 MHz over a pressure range from 0 to 350 psi and a temperature range from 25 to 500°C. The sensing system consists of a Clapp-type oscillator that is fabricated...
Similar publications
A micro electromechanical system piezoresistive pressure sensor with annularly grooved membrane combined with rood beam has been proposed for low pressure measurements based on silicon substrate. The model design, geometry analysis and performance prediction of the novel structure sensor are presented. Compared with other structural membranes, the...
