Similar publications

Article
Full-text available
Artykuł stanowi próbę ukazania designu jako jednego z elementów istotnie wpływających na konkurencyjność przedsiębiorstw funkcjonujących w ramach współczesnej gospodarki wolnorynkowej. W tym celu przybliżone zostały zagadnienia związane bezpośrednio z pojęciem rynkowej konkurencyjności. Następnie podjęto starania w kierunku nakreślenia ram pojęciow...

Citations

... National physical laboratory AU9 (NPL) started up 170 the research project concerning the need for CMM for micro-scale components at an 171 earlier stage. As a result, the small CMM (Leach et al. 2001(Leach et al. , 2004 was promptly Fig. 4. The basic structure is that the miniature probing 173 system is positioned at the center of three mirrors as indicated in the schematic 174 diagram of Fig. 4a and a picture of Fig. 4b. The displacement of the mirror is 175 measured using the interferometer so that Abbe error is reduced effectively. ...
... Please provide publisher name and location for Leach et al. (2004). ...
... • To develop UK capability in miniature probing A preliminary design study carried out at the project formulation stage indicated that a system based on contact probing was the best choice for measurement of the diversity of geometric features and dimensional characteristics liable to be encountered on a typical micro-component. It was further decided that a probe geometry based upon a design previously investigated by NPL [20] offered a practical and realistic means of achieving the project objectives. This probe design comprises a three-legged, horizontal flexure element supporting a vertical, ball-ended probe stylus. ...
... During the formulation stage of this project it was decided the objectives could be met by using a probe design based upon a prototype, contacting probe that had been previously developed at NPL [20]. The configuration of this prototype probe is based upon a triskelion (three-legged) arrangement of flexures supporting a miniature stylus. ...
... Furthermore, there is no reason why such a probe could not be further miniaturized. The design, manufacture and preliminary characterization of the probe are described in detail elsewhere (Leach et al 2004a) and the further development of the probe has been proposed for the next NMS Engineering Measurement Programme (see section 7). ...
... At NPL, it was realized that the term dC/dz could be linearized if it referred to the sliding of a dielectric into and out of the gap between two electrodes (note that NIST have used a cylindrical capacitor but this is much more difficult to manufacture than a parallel-plate design). The actual design of the NPL capacitor uses a four-plate configuration to allow bi-directional motion and is described elsewhere (Leach et al 2004aLeach et al , 2004b). The NPL design 'primary low force balance' uses a plane mirror differential interferometer to measure the position of a dielectric 'blade' as it moves between capacitor electrodes due to the applied force (see figure 10 for an overall schema of this type of instrument). ...
Article
It is now fully appreciated that metrology will play an integral role in the successful development and commercialization of micro- and nanotechnology. To this end, the UK Government, through the National Measurement System, funded several groundbreaking projects in its 2002–2005 Programme for Length. This paper will briefly describe the background of the research, concentrating on the technical details of the projects. The Programme for Length normally only funds work into dimensional metrology but this funding cycle also funded work into low force metrology as this area is crucial to most mechanical probing techniques. The projects described include a traceable areal contacting instrument designed to calibrate areal transfer artefacts and hence offer traceability for industrial areal instruments, the production of the areal transfer artefacts, the development of Internet-based softgauges for profile parameters, a primary low force balance with a force resolution of 50 pN and the development of methods for measuring complex micro-scale structures. Amongst others, the projects involved collaboration with PTB, TNO, Taylor Hobson, AWE, Rubert & Co. and the Universities of Warwick, Huddersfield and Eindhoven.
... The solution was to use a miniaturised bent-leg structure similar to that reported by Peggs et al (4) and Haijema et al (5) . More information on the design and testing of the NPL probe can be found elsewhere (6) . The finite element modelling showed that for any displacement applied to the stylus tip, there should be a corresponding change in the central island in the same plane. ...
... By repeatedly bringing the probe in and out of contact with a Grade K steel gauge block the repeatability of the probe was measured to be around 0.2 µm in each axis (see (6) for further results). However, it is expected that the biggest contribution to this repeatability value is caused by the micro-translation stage and further work is required with proper metrology on the stage rather than relying on its specified precision. ...