Figure 5 - uploaded by Maxime Barriere
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Overview of the top-surface of the IGBT with silver-filled epoxy resin layer on the gate and emitter electrodes using profilometer 

Overview of the top-surface of the IGBT with silver-filled epoxy resin layer on the gate and emitter electrodes using profilometer 

Source publication
Research
Full-text available
An innovative process to realize 3D packages with controlled Si-power semiconductor devices has been developed. We purpose, for the first time and based on a low-cost process, to make compatible the silver sintering process with aluminum top-metallization dice. The use of a silver epoxy resin allows to process the top metallization of silicon dice....

Context in source publication

Context 1
... conventional screen-printing method, it is possible to obtain a 40µm thick silver filled epoxy resin ( fig. 4). Silver layer is quiet regular as illustrated in figure 5 and is sufficient to perform silver sintering process on this new metallized surface. ...

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Conference Paper
Full-text available
An innovative process to realize 3D packages with controlled Si-power semiconductor devices has been developed. We purpose, for the first time and based on a low-cost process, to make compatible the silver sintering process with aluminum top-metallization dice. The use of a silver epoxy resin allows to process the top metallization of silicon dice....