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... inner structure of coaxial input/output coupler is shown in Fig. 9 and the corresponding values of dimension parameters are listed in Table 2. The cylinder coloured in Page 3 of ...

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... The metallic strip width was 40 μm and the thickness was 2 μm. Li et al. [13], fabricated a Ka-band meander-line SWS with a log-periodic geometry by photolithography and studied it experimentally. They also used quartz wafers as dielectric substrates. ...
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Photolithography, deep reactive ion etching, computer numerical control micro- and nanomilling, electro-erosive micromachining, and additive technologies such as 3D printing, selective laser sintering, and selective laser melting are reviewed as electromagnetic microstructure technologies for the production of millimeter and submillimeterwave vacuum microelectronic devices. An innovative method for fabricating planar slow-wave systems based on magnetron sputtering and laser ablation is discussed. The technological tolerances and surface roughness that can be obtained using the technologies under consideration are compared. Link to the paper: https://rdcu.be/cW7wD
... The microfabricated strip line was 40-um width and 2-um thickness. In [13], a Ka-band microstrip angular log-periodic meander-line SWS on quartz substrate was fabricated by the photolithographic process. The strip line of the microfabricated SWS has the width of 25 um and the thickness of 4 um. ...
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Sources of millimeter and submillimeter (terahertz) band radiation are very important in modern society due to their broad application from telecommunication to non-destructive evaluation and chemical analysis. In this work, we present a review of technological approaches for fabrication of RF structures of VEDs. Technological approaches to the microfabrication of planar slow-wave structures (SWS) on dielectric substrates operating with a sheet electron beam are considered. Such SWSs are attractive due to the simplicity of the structure, compact dimensions, low voltage operating, and wide bandwidth. We consider lithography-based technology, deep reactive ion etching, computer-numerical-control (CNC) micro-and nano-milling, electrical discharge micromachining, and technologies based on the additive manufacturing such as three-dimensional (3-D) printing, selective laser sintering, and selective laser melting. We also describe an original approach to microfabrication of planar structures based on magnetron sputtering and CNC laser ablation. Fabrication tolerance and surface roughness provided by the considered technologies are compared.
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A new Hedgehog waveguide, consisting of a bed of nails embedded in a host rectangular hollow waveguide, is proposed and investigated as a promising state-of-the-art low-loss waveguide for millimeter-wave frequency bands. The proposed Hedgehog waveguide gets its name from its electromagnetic behavior. As hedgehogs root through hedges and other undergrowth in search of their favorite food, the proposed waveguide root through its embedded bed of nails. When we choose a host waveguide technology, it is worthwhile spending some time weighing up the pros and cons of the various types of waveguides on offer. The proposed Hedgehog waveguide is extremely low loss and is compatible with the hollow waveguide technology, which gives the ability to develop different components such as low-loss flat phase response phase shifters. In this paper, the proposed Hedgehog waveguide is analytically investigated, and a transition to the hollow waveguide is designed. Moreover, the low-loss nature of the designed Hedgehog waveguide is compared with the ridge gap waveguide, substrate-integrated waveguide (SIW), hollow waveguide, and microstrip line. Finally, the proposed waveguide is designed, simulated, and fabricated. The simulated and measured results show a good agreement, which validates the proposed concept.