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Increasing coupling efficiency. In order to increase coupling efficiency of the NV emitter to the guided mode in the waveguide, a structure with a thinner supporting membrane (m = 100 nm) is proposed, enabling better access to the evanescent field. The field profile ( $| E{| }^{2}$ ) of the guided TE and TM mode for two different optimized designs is shown. With the traditional rib design in (a) and (b) the β factor can be increased to 15 % and 10 %. In (c) and (d) a slot of width ws = 50 nm is added and the β factor can be increased to 65 % and 32 % for the TE and TM mode coupling to a vertical and horizontal emitter, respectively.

Increasing coupling efficiency. In order to increase coupling efficiency of the NV emitter to the guided mode in the waveguide, a structure with a thinner supporting membrane (m = 100 nm) is proposed, enabling better access to the evanescent field. The field profile ( $| E{| }^{2}$ ) of the guided TE and TM mode for two different optimized designs is shown. With the traditional rib design in (a) and (b) the β factor can be increased to 15 % and 10 %. In (c) and (d) a slot of width ws = 50 nm is added and the β factor can be increased to 65 % and 32 % for the TE and TM mode coupling to a vertical and horizontal emitter, respectively.

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