Figure 4 - available via license: Creative Commons Attribution 4.0 International
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Gas responses of SiNWs with different widths at variable temperatures. a) Measured ethanol response curves for SiNWs with different widths under 300 K. b) Extracted í µí»¾ b from panel (a) for NWs with different widths. The gray dashed line is to guide the eye. c) Measured ethanol response curves of the 300 nm wide SiNW gas sensors under various self-heated temperatures. d) Extracted í µí»¾ b from panel (c) at each temperature.
Source publication
In this study, an analytical gas response formula is developed based on the classical gaseous molecule adsorption model. To validate the analytical formula, an array of silicon nanowires or microwires is fabricated by patterning the device layer of a silicon‐on‐insulator (SOI) wafer. Gas Hall effect measurements reveal that the surface depletion of...
Contexts in source publication
Context 1
... water and ethanol vapors, it can only sense a concentration above ≈2007 or 1273 ppm, respectively. According to Equation (5), when the wire width decreases to a value slightly larger than the two times of W dep (the channel is continuous but close to pinch off), the gas sensor response will dramatically increase (consistent with the data in Figure 4a) and significantly lower the detection limit. But a completely pinched-off nanowire (W < 2W dep ) becomes nearly insensitive to gaseous analytes (data not shown). ...
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