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Experimental characterization of achromatic metalenses. a Schematic depicting the optical setup. The optics for mapping the 3D far-field of the metalenses are mounted on a motorized stage. A flip mirror allows light to pass from a target focal plane to a power meter for efficiency measurements. b Optical image of a sample metalens. Scale bar: 25 μm. c Measured far-field intensity distributions of metalens M1A, composed of Generation 1A meta-units and with diameter D = 100 μm and target focal length f = 200 μm, corresponding to NA = 0.24. Measured normalized intensity distributions in the axial plane (x-z cross section) are shown for select wavelengths spanning from 1300 to 1660 nm. The x-y cross sections are shown at the target focal plane for each wavelength. d Corresponding experimental results for metalens M1B, composed of Generation 1B metaunits, showing substantially suppressed parasitic focal spots, little elongation of the depth of focus as observed in c, and larger operational bandwidth

Experimental characterization of achromatic metalenses. a Schematic depicting the optical setup. The optics for mapping the 3D far-field of the metalenses are mounted on a motorized stage. A flip mirror allows light to pass from a target focal plane to a power meter for efficiency measurements. b Optical image of a sample metalens. Scale bar: 25 μm. c Measured far-field intensity distributions of metalens M1A, composed of Generation 1A meta-units and with diameter D = 100 μm and target focal length f = 200 μm, corresponding to NA = 0.24. Measured normalized intensity distributions in the axial plane (x-z cross section) are shown for select wavelengths spanning from 1300 to 1660 nm. The x-y cross sections are shown at the target focal plane for each wavelength. d Corresponding experimental results for metalens M1B, composed of Generation 1B metaunits, showing substantially suppressed parasitic focal spots, little elongation of the depth of focus as observed in c, and larger operational bandwidth

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Small, high-performance imaging systems could be built using flat lenses made from specially arranged nanoscale pillars. Traditional lenses rely on the curvature and thickness of glass to focus light, but metalenses, which can be smaller, thinner, and more flexible, have surfaces comprised of thousands of nanoscale pillars whose geometries are care...

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... metalenses are summarized in Supplementary Information Table S1). We fabricated these metalenses using a standard electron beam litho- graphy, lift-off, and etch procedure (Materials and meth- ods section). Scanning electron microscope images of two sample fabricated metalenses are shown in Fig. 2g, h. Using the custom-built setup shown in Fig. 3a, we char- acterized the three-dimensional (3D) intensity distribu- tion of light exiting the fabricated ...
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... the Generation 1A library, we realized an achromatic metalens, M1A, with a diameter of 100 µm, designed focal length of 200 µm (NA ≈ 0.24), and opera- tional bandwidth of λ = 1300-1650 nm. The measured intensity distributions in the focal (x-y cross section) and axial (x-z cross section) planes at different wavelengths for M1A are plotted in Fig. 3c. From the axial intensity distributions, we can see that the chromatic aberration is significantly reduced across the entire operating band- width, with the focal planes for all wavelengths lying very close to one another. It is important to stress that this is a continuous aberration correction over the entire designed wavelength ...
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... therefore designed and fabricated metalens M1B, with the same size and NA as M1A, using the taller meta- units from the Generation 1B library. The corresponding measured focal and axial intensity distributions are plot- ted in Fig. 3d and show substantially suppressed parasitic focal spots and little elongation of the DOF. The wave- length range over which the chromatic aberration is corrected is also expanded to λ = 1200-1650 nm, a 100- nm improvement over the operational bandwidth of M1A. The combination of size, NA, and bandwidth of M1B reaches the fundamental ...
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... aberration correction over a reduced operational bandwidth of λ = 1200-1400 nm (Fig. 4c). Figure 5 summarizes important figures of merit, including the focal length, focusing efficiency, focal spot size, and Strehl ratio, for all of the fabricated metalenses. Figure 5a shows focal plane intensity profiles at the selected wavelengths shown in Fig. 3d for metalens M1B; Fig. 5b shows corresponding horizontal and vertical cuts of the measured focal spots with an ideal Airy disk overlaid for comparison. The results show nearly diffraction-limited focal spots for all wavelengths with no obvious distortion. Figure 5c shows the measured focal lengths of the metalenses at sampled ...
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... the experimental setup (Fig. 3a), a collimated laser beam with a tunable wavelength is incident on the metalens, and the 3D far-field of the lens is measured by acquiring a stack of 2D images at different distances from the lens. The tunable laser beam is generated by passing the emission from a supercontinuum laser source (NKT SuperK Extreme) through a mono- ...

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... These include anapole mode [5][6][7], Fano resonance [8][9][10], and electromagnetically-induced transparency [11][12][13]. The unique capabilities of metasurfaces have led to planar optical meta-components with a wide range of applications across both microwave and optical frequencies in the fields of imaging and lensing [14][15][16][17], holography [18][19][20], structural color printing [21][22][23], energy harvesting [24][25][26], and perfect absorbers [27][28][29], among others. Importantly, the recent development of all-dielectric metasurfaces especially benefit from highly efficient transmission applications [30][31][32]. ...
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... Arrays of individual scatterers, termed "meta-units", provide the local phase, amplitude, and polarization modulation required to shape the reflected or transmitted wavefront. [1][2][3][4][5][6][7] State-of-the-art metasurfaces are thin, compact devices that can offer a compelling alternative to conventional bulk optics and radio-frequency antennas with a wide range of potential applications, including communications, [8][9][10] imaging, [11][12][13][14] sensing, [15] and holography. [16][17][18] Work on metasurfaces has predominantly focused on flat, rigid devices due to reliance on planar fabrication techniques such as lithography and laser cutting. ...
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... Manipulating the dimensions, configurations, and periodicity of metasurface structures empowers precise control over electromagnetic wavefronts. Metasurfaces boost diverse applications, including super-lenses [25][26][27], full-color holographic metasurfaces [28], polarization conversion devices [29], programmable metasurfaces [30], metasurface antennas [31] and more. Due to the planar structure, metasurfaces have negligible thickness and are compatible with semiconductor manufacturing processes, making them an ideal candidate for greatly reducing the volume of the optical path structure. ...
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... However, this strategy suffers from discrete frequency and low efficiency. More recently, broadband achromatic lenses have been fabricated by optimizing the spectral degrees of freedom in the lens phase profiles [24] or introducing light frequency-domain coherence optimization [25]. Despite this impressive progress, a new approach toward the programable chromatic dispersion of planar lenses with large size, high efficiency and compact design is still urgently pursued. ...
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... By appropriately designing a pattern of meta-atoms, one can manipulate the intensity, phase, polarization state, and wavelength dispersion of light incident on the surface with a high degree of freedom. Optical metasurfaces with designed wavelength dispersions are referred to as dispersion-engineered metasurfaces; they are the basis for single-layer achromatic metasurface lenses (metalenses), which have recently attracted significant attention in the field of optics [23][24][25][26][27]. We have extended the concept of dispersion-engineered metasurfaces and have developed a metasurface-based color splitter that splits incident white (W) light into R, G, and B light on high-density pixels [28,29]. ...
... Note that the spatial modulation used in wavefront shaping can be of the amplitude or the phase of the light, but phase-only modulation is the most used because of its high transmission efficiency. Dispersion-engineered metasurfaces extend this basic idea across the wavelength dimension and independently control the wavefront for each wavelength [23][24][25][26][27]. To perform spatial phase-modulation independently for each wavelength with meta-atoms, each meta-atom must be designed to have the desired phases at all designed wavelengths at the same time. ...
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... On the contrary, metasurfaces have the ability to control electromagnetic wave properties (such as phase, amplitude, and polarization) in a subwavelength resolution by arranging the artificially designed sub-wavelength structured nanopillars array in a proper way [1][2][3][4]. Research on metasurfaces has made significant progress recently, and various planar optical devices have been realized, such as beam-bending generators [5,6], holograms [7][8][9][10][11][12], color filters [13,14], polarization converter [15][16][17], vortex beam generators [18][19][20][21] and metalenses [22][23][24][25][26], etc. Owing to their high integration and processing technology, and their compatibility for the manufacture of complementary metal-oxidesemiconductor (CMOS), metasurface devices have unprecedented advantages over traditional optical devices with the same functions [27][28][29][30]. Therefore, the metasurface is expected to revolutionize in various fields of optics and photonics. ...
... µm) through the Si nanopillars by applying unit cell boundary conditions in xand y-directions under plane wave incidence, thereby obtaining the corresponding normalized transmission phase and amplitude response. We use a hexagonal lattice instead of a square because it has the densest planar packing arrangement, which leads to a smoother sampling of the phase near the boundary of each zone and results in better performance compared to a square lattice [22,24]. The Si nanopillars were placed at the centers of each hexagonal unit cell, as shown in Fig. 1 (The different colors in Fig. 1(a) are just to better visually distinguish between nanopillars and substrates). ...
... μm) through the Si nanopillars by applying unit cell boundary conditions in xand y-directions under plane wave incidence, thereby obtaining the corresponding normalized transmission phase and amplitude response. We use a hexagonal lattice instead of a square because it has the densest planar packing arrangement, which leads to a smoother sampling of the phase near the boundary of each zone and results in better performance compared to a square lattice [22,24]. The Si nanopillars were placed at the centers of each hexagonal unit cell, as shown in Fig. 1 (The different colors in Fig. 1a are just to better visually distinguish between nanopillars and substrates). ...
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... In general, the lower efficiency in the 1st order, the more energy in other orders, and this is why we see the bright spot effect. The 2nd order focal point is closer to the lens than the 1st order, and [17][18][19][20][21][22][23][24][25][26][27] . The measurements from this paper are included (black stars, error bars in Fig. 2). ...
... Simulation -CPA, RFA Our use of the constant phase approximation (CPA)where each metaatom is replaced by a constant amplitude and phase, found from the 0 th order mode amplitude, and then propagated to the far-fieldis probably the most widespread method for designing metalenses 2,11,22 . Resolved field approximation (RFA) instead resolves the scalar E field (same polarisation) right on top of the meta-pillar in a low-resolution Cartesian point grid. ...
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... A novel solution extensively explored in recent years is the so-called metasurfaces, which are two-dimensional periodic structures consisting of subwavelength dielectric or metallic units (i.e., meta-atoms) [1][2][3][4]. Metasurfaces can enable an almost arbitrary manipulation of a wavefront with various phases, including resonance phase [5][6][7], propagation phase [8][9][10], and Pancharatnam-Berry (PB) phase [11][12][13][14][15]. The PB phase is particularly attractive since it can cover 2π full range within a broadband of frequencies. ...
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Pancharatnam–Berry (PB) metasurfaces can be applied to manipulate the phase and polarization of light within subwavelength thickness. The underlying mechanism is attributed to the geometric phase originating from the longitudinal spin of light. Here, we demonstrate, to the best of our knowledge, a new type of PB geometric phase derived from the intrinsic transverse spin of guided light. Using full-wave numerical simulations, we show that the rotation of a metallic nano-bar sitting on a metal substrate can induce a geometric phase covering 2 π full range for the surface plasmons carrying an intrinsic transverse spin. Especially, the geometric phase is different for the surface plasmons propagating in opposite directions due to spin-momentum locking. We apply the geometric phase to design metasurfaces to manipulate the wavefront of surface plasmons to achieve steering and focusing. Our work provides a new mechanism for on-chip light manipulations with potential applications in designing ultra-compact optical devices for imaging and sensing.