FIG 8 - uploaded by Vikas Dubey
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Displacement and velocity curve vs time for a placement offset of 100 µm with 30 µm, 60 µm, and 90 µm gaps.
Source publication
Self-aligned assembly, making use of capillary forces, is considered as an alternative to active alignment
during thermo-compression bonding of Si chips in the 3D heterogeneous integration process.
Various process parameters affect the alignment accuracy of the chip over the patterned binding site
on a substrate/carrier wafer. This paper discusses...
Context in source publication
Context 1
... understand the effect of the gap size on the transient behavior (time it takes to self-align) of the top chip, the motion of the top chip is simulated in Matlab for a 100 µm placement offset for varying gap (see Fig. 8). It is observed that the time it takes for the top chip to finish its oscillation for a 30 µm gap is 600 ms, for a 60 µm gap is 1200 ms, and for a 90 µm gap is 1600 ms. From Eq. (13), the spring constant is inversely proportional to the gap size because of the fluidic volume. Stiffness is inversely proportional to the square root of ...
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Citations
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A theoretical study and experimental validation of the evaporation of a droplet confined between two parallel square chips with a free-standing top chip over a water meniscus is presented in this article. The analytical model describes the surface area of a negatively curved liquid-air interface, and the evaporation model was thus solved for this case. The dynamics of decreasing the gap between the two parallel chips show a linear dependency in time at room temperature. Two main regimes are observed in this case, the constant wetted area (CWA) regime and the varying wetted area (VWA) regime. The theoretical study was lastly validated through experiments.
