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A block diagram of the optical heterodyne detection setup for surface roughness measurement. Inset shows the beam configuration on the mirror surface [21].

A block diagram of the optical heterodyne detection setup for surface roughness measurement. Inset shows the beam configuration on the mirror surface [21].

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Article
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Optical metrology techniques used to measure changes in thickness; temperature and refractive index are surveyed. Optical heterodyne detection principle and its applications for precision measurements of changes in thickness and temperature are discussed. Theoretical formulations are developed to estimate crystal growth rate, surface roughness and...

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... rf wave was generated by mixing the optical waves (10% of the laser power) in a detector. Measurement rf wave was generated by launching the beams to an air-lifted mirror that can be rotated (Figure 8). The p-and s-polarization components are spatially separated by a Wollaston prism and focused at two different points on the air-lifted mirror (inset of Figure 8). ...
Context 2
... rf wave was generated by launching the beams to an air-lifted mirror that can be rotated (Figure 8). The p-and s-polarization components are spatially separated by a Wollaston prism and focused at two different points on the air-lifted mirror (inset of Figure 8). One of the spots is incident at a point that is coincident with the axis of rotation. ...

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