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Macro sized objects (i.e. several centimetres in size) are routinely measured using conventional CMMs, which can achieve uncertainties of the order of a few micrometres. Conversely, nanometre and micrometre sized objects or features normally fall within the measurement capabilities of the field of nanometrology, where SPM-type instruments can achie...
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... By designing structures and materials, hinge-type probe systems can control the stiffness of the probing system. Therefore, the high detection sensitivity could be designed, and multiple probes have achieved resolutions of several nanometers [59,[93][94][95]. Furthermore, hinge-type microprobe systems can be designed to be compact to reduce the dynamic mass [96]. ...
Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.
... In many cases, the complete inner and outer geometry of these micro-parts must be verified to ensure their quality and functionality, whereas small geometrical features are inaccessible by conventional Coordinating Measuring Machines (CMMs). In order to measure those microparts, some novel CMMs with accuracy of tens of nanometers (called micro CMM or nano CMM) have been developed [1], such as the Molecular Measuring Machine developed by the National Institute of Standards and Technology (NIST) [2], the High-Precision Micro-CMM developed by the University of Tokyo and the National Institute of Advanced Industrial Science and Technology (AIST) [3], the special CMM developed by the Physikalisch-Technische Bundesanstalt (PTB) [4], the small-sized CMM developed by the National Physical Laboratory (NPL) [5], the Nanopositioning and Nanomeasuring Machine (NPMM) developed by the Ilmenau University of Technology [6][7][8], etc. The measurement range of these micro CMMs is not larger than 50mm in the X, Y and Z directions. ...
... The schematic structure of the developed micro CMM is shown in Figure 1a. The measuring probe (1) is located under a granite column which is fixed on the granite base (5). The tip-ball of the stylus probe is placed at the center of the XYZ three-dimensional (3D) stage (2) and kept still after assembly. ...
... The physical and schematic structures of the probe are shown in Figure 3. The probe system mainly consists of an autocollimator (1), a mini Michelson interferometer (2), a suspension mechanism constructed by high sensitive elastic leaf springs (4), a reflection mirror (3) and a stylus with ruby ball (5). When the sample on the 3D stage contacts the probe ball and causes a deflection of the stylus, the reflection mirror will generate two angular displacements and a vertical displacement. ...
... In many cases, the complete inner and outer geometry of these micro-parts must be verified to ensure their quality and functionality, whereas small geometrical features are inaccessible by conventional Coordinating Measuring Machines (CMMs). In order to measure those microparts, some novel CMMs with accuracy of tens of nanometers (called micro CMM or nano CMM) have been developed [1], such as the Molecular Measuring Machine developed by the National Institute of Standards and Technology (NIST) [2], the High-Precision Micro-CMM developed by the University of Tokyo and the National Institute of Advanced Industrial Science and Technology (AIST) [3], the special CMM developed by the Physikalisch-Technische Bundesanstalt (PTB) [4], the small-sized CMM developed by the National Physical Laboratory (NPL) [5], the Nanopositioning and Nanomeasuring Machine (NPMM) developed by the Ilmenau University of Technology [6][7][8], etc. The measurement range of these micro CMMs is not larger than 50mm in the X, Y and Z directions. ...
... The schematic structure of the developed micro CMM is shown in Figure 1a. The measuring probe (1) is located under a granite column which is fixed on the granite base (5). The tip-ball of the stylus probe is placed at the center of the XYZ three-dimensional (3D) stage (2) and kept still after assembly. ...
... The physical and schematic structures of the probe are shown in Figure 3. The probe system mainly consists of an autocollimator (1), a mini Michelson interferometer (2), a suspension mechanism constructed by high sensitive elastic leaf springs (4), a reflection mirror (3) and a stylus with ruby ball (5). When the sample on the 3D stage contacts the probe ball and causes a deflection of the stylus, the reflection mirror will generate two angular displacements and a vertical displacement. ...
A micro Coordinate Measuring Machine (CMM) with the measurement volume of 50 mm × 50 mm × 50 mm and measuring accuracy of about 100 nm (2σ) has been developed. In this new micro CMM, an XYZ stage, which is driven by three piezo-motors in X, Y and Z directions, can achieve the drive resolution of about 1 nm and the stroke of more than 50 mm. In order to reduce the crosstalk among X-, Y- and Z-stages, a special mechanical structure, which is called co-planar stage, is introduced. The movement of the stage in each direction is detected by a laser interferometer. A contact type of probe is adopted for measurement. The center of the probe ball coincides with the intersection point of the measuring axes of the three laser interferometers. Therefore, the metrological system of the CMM obeys the Abbe principle in three directions and is free from Abbe error. The CMM is placed in an anti-vibration and thermostatic chamber for avoiding the influence of vibration and temperature fluctuation. A series of experimental results show that the measurement uncertainty within 40 mm among X, Y and Z directions is about 100 nm (2σ). The flatness of measuring face of the gauge block is also measured and verified the performance of the developed micro CMM.
In order for product quality to be significantly improved with time, the use and metrological application of the ubiquitous Coordinate Measuring Machines. CMM—Coordinate Measuring Machines (CMMs)—a universal metrology instrument—must have their accuracy and precision regularly monitored and verified, with stated performance levels substantiated against accepted International Standards; often this is termed Interim-checking.
